Integral rigid chip test probe
First Claim
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1. A structure comprising:
- a substrate having a surface;
said surface has a plurality of electrically conductive bumps disposed on said surface;
each of said electrically conductive bumps has an electrically conductive perimeter which is raised above said surface and an electrically conductive portion within the boundaries of said perimeter which is raised above said surface, there being a region of said electrically conductive bump between said electrically conductive perimeter and said electrically conductive portion, said electrically conductive perimeter and said electrically conductive portion are raised above said region; and
said electrically conductive bump remains substantially stationary with respect to said surface when said structure is disposed to press said bumps in contact with a workpiece.
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Abstract
The present invention is directed to probe structures for testing of electrical interconnections to integrated circuit devices and other electronic components and particularly to testing integrated circuit devices with high density area array solder ball interconnections. The probe structure is formed from a substrate having a surface having at least one electrical contact location which has a perimeter which is raised above the surface and a location within the boundaries of said perimeter which is raised above the surface.
130 Citations
5 Claims
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1. A structure comprising:
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a substrate having a surface; said surface has a plurality of electrically conductive bumps disposed on said surface; each of said electrically conductive bumps has an electrically conductive perimeter which is raised above said surface and an electrically conductive portion within the boundaries of said perimeter which is raised above said surface, there being a region of said electrically conductive bump between said electrically conductive perimeter and said electrically conductive portion, said electrically conductive perimeter and said electrically conductive portion are raised above said region; and said electrically conductive bump remains substantially stationary with respect to said surface when said structure is disposed to press said bumps in contact with a workpiece. - View Dependent Claims (2, 3, 4, 5)
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Specification