Optical scanning system with diffractive optics

• US 5,838,480 A
• Filed: 04/29/1996
• Issued: 11/17/1998
• Est. Priority Date: 04/29/1996
• Status: Expired due to Fees

• Current Assignee: University of Rochester
• Original Assignee: University of Rochester
• Inventors: Morris, G. Michael, McIntyre, Kevin J.
• Primary Examiner(s): Phan, James
• Application Number:
  US08/639,588
• Time in Patent Office: 932 Days
• Field of Search: 359/205-207, 359/212-219, 359/17, 359/19, 359/563, 359/568-570, 359/900
• US Class Current: 359/205.1
• CPC Class Codes: G02B 27/0031 for scanning purposes

Abstract

An improved optical system having diffractive optic elements is provided for scanning a beam. This optical system includes a laser source for emitting a laser beam along a first path. A deflector, such as a rotating polygonal mirror, intersects the first path and translates the beam into a scanning beam which moves along a second path in a scan plane. A lens system (F-θ lens) in the second path has first and second elements for focusing the scanning beam onto an image plane transverse to the scan plane. The first and second elements each have a cylindrical, non-toric lens. One or both of the first and second elements also provide a diffractive element, which provides not only astigmatic correction, but may further provide chromatic aberration correction of the scanning beam. This astigmatic correction is achieved without the presence of any lens having a toroidal (toric) surface. The system may further have a third element in the first path of the beam prior to the deflector. This third element provides a lens having another diffractive element. This diffractive element can correct chromatic and spherical aberration of the scanning beam in the cross-scan plane, a plane perpendicular to the scan plane.

Claims

1. An optical system for scanning a beam comprising:

a laser source for emitting a beam along a first path;

a deflector intersecting said first path for translating said beam into a scanning beam which moves along a second path in a scan plane;

a F-θ

lens system in said second path comprising first and second elements for focusing said scanning beam onto an image plane transverse to said scan plane;

said first and second elements each comprising at least one body having a non-toric lens; and

the body of at least one of said first and second elements also provides a diffractive element which corrects optical aberrations of said scanning beam, wherein said diffractive element corrects optical aberrations in said scanning beam which includes at least correcting of astigmatic aberrations of said scanning beam.

2. The optical system of claim 1 wherein:

said F-θ

lens system has an optical axis and a focal length F in the scan plane;

said deflector moves said beam along said second path at an angle θ

with respect to said optical axis in which said angle θ

varies responsive to said deflector movement to provide said scanning beam;

said image plane being spaced from said lens system by said focal length F; and

said first and second elements of said F-θ

lens system being oriented to focus said scanning beam onto the image plane having a lateral position from the optical axis in the scan plane based upon said focal length F and angle θ

.

3. The optical system of claim 1 wherein the diffractive element provided by at least one of said first and second elements corrects optical aberrations including both astigmatic and chromatic aberration of said scanning beam.

4. The optical system of claim 1 further comprising a substrate substantially located in said image plane.

5. The optical system of claim 1 wherein said deflector is a rotating polygonal mirror.

6. The optical system of claim 1 further comprising:

a lens intersecting said first path of said beam prior to said deflector for substantially collimating said beam from said laser source.

7. An optical system for scanning a beam comprising:

a laser source for emitting a beam along a first path;

a deflector intersecting said first path for translating said beam into a scanning beam which moves along a second path in a scan plane;

a lens system in said second path comprising first and second elements for focusing said scanning beam onto an image plane transverse to said scan plane;

said first and second elements each comprising at least one body having a non-toric lens; and

the body of at least one of said first and second elements also provides a diffractive element wherein said body of said first and second elements providing said non-toric lens defines a first cylindrical surface and a second spherical surface.

8. The optical system of claim 7 wherein said body having said diffractive element provides a diffractive profile on said second spherical surface.

9. An optical system for scanning a beam comprising:

a laser source for emitting a beam along a first path;

a deflector intersecting said first path for translating said beam into a scanning beam which moves along a second path in a scan plane;

a lens system in said second path comprising first and second elements for focusing said scanning beam onto an image plane transverse to said scan plane;

said first and second elements each comprising at least one body having a non-toric lens; and

the body of at least one of said first and second elements also provides a diffractive element wherein said body of said first and second elements is a cylindrical lens.

10. An optical system for scanning a beam comprising:

a laser source for emitting a beam along a first path;

a deflector intersecting said first path for translating said beam into a scanning beam which moves along a second path in a scan plane;

a lens system in said second path comprising first and second elements for focusing said scanning beam onto an image plane transverse to said scan plane;

said first and second elements each comprising at least one body having a non-toric lens; and

the body of at least one of said first and second elements also provides a diffractive element, and wherein the body of both said first and second elements provides a diffractive element.

11. An optical system for scanning a beam comprising:

a laser source for emitting a beam along a first path;

a deflector intersecting said first path for translating said beam into a scanning beam which moves along a second path in a scan plane;

a lens system in said second path comprising first and second elements for focusing said scanning beam onto an image plane transverse to said scan plane;

said first and second elements each comprising at least one body having a non-toric lens;

the body of at least one of said first and second elements also provides a diffractive element; and

a third lens element in said first path of said beam prior to said deflector for focusing said beam such that said second path of said beam is focused in a cross-scan plane substantially perpendicular to said scan plane.

12. The optical system of claim 11 wherein said third lens element comprises a body having another diffractive element.

13. The optical system of claim 12 wherein said another diffractive element corrects chromatic and spherical aberration of said beam in said cross-scan plane.

14. The optical system of claim 11 wherein said first, second and third lens elements are made of the same optical material.

15. An optical system for scanning a beam comprising:

a laser source for emitting a beam along a first path;

a deflector intersecting said first path for translating said beam into a scanning beam which moves along a second path in a scan plane;

a F-θ

lens system in said second path comprising first and second elements for focusing said scanning beam onto an image plane transverse to said scan plane;

said first and second elements each comprising at least one body having a non-toric lens; and

the body of at least one of said first and second elements also provides a diffractive element which corrects optical aberrations of said scanning beam, wherein said F-θ

lens system has an optical axis and a focal length F in the scan plane, said deflector moves said beam along said second path at a varying angle θ

with respect to said optical axis, and said F-θ

lens system focuses said scanning beam into a nearly diffraction-limited spot having a lateral position from said optical axis in said scan plane approximately equal to F multiplied by θ

.

16. A method for scanning a beam comprising the steps of:

emitting a beam from a laser source along a first path;

translating said beam from said first path into a scanning beam which moves along a second path in a scan plane; and

directing said scanning beam through a F-θ

lens system in said second path for focusing said scanning beam onto an image plane transverse to said scan plane, wherein said first and second elements each comprise at least one body having a non-toric lens, and the body of at least one of said first and second elements also provides a diffractive element which corrects at least astigmatic aberrations of said scanning beam.

17. The method of claim 16 wherein said body of said first and second elements provides a non-toric lens defining a first cylindrical surface and a second spherical surface.

18. The method of claim 17 wherein said body having said diffractive element provides a diffractive profile on said second spherical surface.