Applications of protective ceramics
First Claim
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1. A capacitor-like device in an integrated circuit comprisinga first bottom electrode, said first bottom electrode comprising conductive materials, said first bottom electrode having a top surface;
- a second top electrode, said second top electrode comprising conductive materials;
an insulating layer interposed between said first bottom electrode and said second top electrode, said insulating layer comprising at least one layer of a protective ceramic which is a compound of at least one metallic element and at least one non-metallic element from a group consisting of C, N, O, P, S.
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Abstract
It is beneficial for an FPGA, PROM, DRAM and superconductive circuit to use a protective ceramic as its insulating material. This protective ceramic can densely cover metal surface and is free of defects. As a result, a high yield can be ensured. The Pilling-Bedworth ratio is a good indicator of the protective nature of an insulating material. It is desirable to limit the Pilling-Bedworth ratio larger than 1 and preferably smaller than 2. Multiple layers of ceramics can be used to further reduce the defect density and improve yield.
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Citations
26 Claims
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1. A capacitor-like device in an integrated circuit comprising
a first bottom electrode, said first bottom electrode comprising conductive materials, said first bottom electrode having a top surface; -
a second top electrode, said second top electrode comprising conductive materials; an insulating layer interposed between said first bottom electrode and said second top electrode, said insulating layer comprising at least one layer of a protective ceramic which is a compound of at least one metallic element and at least one non-metallic element from a group consisting of C, N, O, P, S. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
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Specification