Manufacturing control method for IC plant batch sequential machine

• US 5,838,565 A
• Filed: 05/15/1997
• Issued: 11/17/1998
• Est. Priority Date: 05/15/1997
• Status: Expired due to Fees

• Current Assignee: Vanguard International Semiconductor Corporation
• Original Assignee: Vanguard International Semiconductor Corporation
• Inventors: Hsieh, Hung-Ming, Tseng, Horng-Huei, Pan, Yirn-Sheng
• Primary Examiner(s): Elmore, Reba I.
• Assistant Examiner(s): Garland, Steven R.
• Application Number:
  US08/857,165
• Time in Patent Office: 551 Days
• Field of Search: 364/468.01, 364/468.02, 364/468.03, 364/468.05-468.09, 364/468.13, 364/468.15, 364/468.18, 364/468.23, 364/468.28, 705/7-9
• US Class Current: 700/11
• CPC Class Codes: G05B 19/41865 characterised by job scheduling, process planning, material flow
• CPC Class Codes: G05B 2219/31386 Determine size of batch of material for each process to meet mfl rate
• CPC Class Codes: G05B 2219/32015 Optimize, process management, optimize production line
• CPC Class Codes: G05B 2219/32077 Batch control system
• CPC Class Codes: G05B 2219/32096 Batch, recipe configuration for flexible batch control
• CPC Class Codes: G05B 2219/32304 Minimize flow time, tact, shortest processing, machining time
• CPC Class Codes: G06Q 10/06 Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

A method of operating a batch sequential machine in a manufacturing plant to optimize processing of lots of work through a plurality of series of processing stations which perform various functions comprising the following steps. Collect interval-times (I_i,j) for processing of lots through individual processing stations. Form a matrix of reduced times for processing lots through the processing stations. Determine permutations of the reduced times for a series of combinations of the processing stations for performing required processing tasks. Select the combination of interval-times providing the maximum reduction of total processing time.

Claims

1. A method of operating a batch sequential machine in a manufacturing plant subsequent to preventative maintenance steps to optimize processing of lots of work through a plurality of series of processing stations which perform various processing functions, comprising the following steps:

providing a batch sequential machine in a manufacturing plant,

providing a data processing system having memory means for data storage,

providing central processing means for

a) accessing data from said memory means,

b) receiving data from data input means and

c) supplying data to said memory means,

collecting interval-times (I_i,j) for processing of lots through individual processing stations,

forming a matrix of reduced times for processing lots through said processing stations,

determining permutations of said reduced times for a series of combinations of said processing stations for performing required processing tasks, and

selecting the combination of interval-times providing the maximum reduction of total processing time.

2. A method in accordance with claim 1 wherein forming a matrix of reduced times for processing lots through said processing stations is performed in accordance with the equation:

space="preserve" listing-type="equation">C.sub.i C.sub.j =R.sub.ij =(I.sub.ij,1 -I.sub.i,1)+(I.sub.ij,2 -I.sub.i,2)+. . . +(I.sub.ij,M -I.sub.iM).

3. A method in accordance with claim 2 wherein, individual reduced total time is calculated in accordance with the equation:

space="preserve" listing-type="equation">T.sub.i =R.sub.i,1 +R.sub.i,2 +. . . +R.sub.i,N, i=1 to N|.

4. A method in accordance with claim 3 wherein the combination of maximum reduction of time is calculated in accordance with the equation:

space="preserve" listing-type="equation">Optimum Combination=Max (T.sub.i, i=1 to N|).

5. A method in accordance with claim 2 wherein the combination of maximum reduction of time is calculated in accordance with the equation:

space="preserve" listing-type="equation">Optimum Combination=Max (T.sub.i, i=1 to N|).

6.

6. A method in accordance with claim 1 wherein

N is the number of recipe routes in a plant,

F_s is Furnace run size,

C_s is Chemical station run size, and

the number M of cluster recipes is calculated according to the equation:

space="preserve" listing-type="equation">M=F.sub.s /C.sub.s =6/2=3.

7. A method in accordance with claim 6 wherein forming matrix of reduced times for processing lots through said processing stations is performed in accordance with the equation:

space="preserve" listing-type="equation">C.sub.i C.sub.j =R.sub.ij =(I.sub.ij,1 -I.sub.i,1)+(I.sub.ij,2 -I.sub.i,2)+. . . +(I.sub.ij,M -I.sub.iM).

8. A method in accordance with claim 7 wherein, following forming of said matrix of reduced times the combinations are expanded to N| and data on the expanded combinations is processed.

9. A method in accordance with claim 8 wherein, individual reduced total time is calculated in accordance with the equation:

space="preserve" listing-type="equation">T.sub.i =R.sub.i,1 +R.sub.i,2 +. . . +R.sub.i,N, i=1 to N|.

10. A method in accordance with claim 9 wherein the combination of maximum reduction of time is calculated in accordance with the equation:

space="preserve" listing-type="equation">Optimum Combination=Max (T.sub.i, i=1 to N|).

11.

11. A method in accordance with claim 8 wherein the combination of maximum reduction of time is calculated in accordance with the equation:

space="preserve" listing-type="equation">Optimum Combination=Max (T.sub.i, i=1 to N|).

12. A method in accordance with claim 7 wherein, individual reduced total time is calculated in accordance with the equation:

space="preserve" listing-type="equation">T.sub.i =R.sub.i,1 +R.sub.i,2 +. . . +R.sub.i,N, i=1 to N|.

13. A method in accordance with claim 12 wherein the combination of maximum reduction of time is calculated in accordance with the equation:

space="preserve" listing-type="equation">Optimum Combination=Max (T.sub.i, i=1 to N|).

14. A method in accordance with claim 7 wherein the combination of maximum reduction of time is calculated in accordance with the equation:

Optimum Combination=Max (T_i, i=1 to N|).

15.

15. A method in accordance with claim 6 wherein, following forming of said matrix of reduced times the combinations are expanded to N| and data on the expanded combinations is processed.

16. A method in accordance with claim 15 wherein, individual reduced total time is calculated in accordance with the equation:

space="preserve" listing-type="equation">T.sub.i =R.sub.i,1 +R.sub.i,2 +. . . +R.sub.i,N, i=1 to N|.

17. A method in accordance with claim 16 wherein the combination of maximum reduction of time is calculated in accordance with the equation:

space="preserve" listing-type="equation">Optimum Combination=Max (T.sub.i, i=1 to N|).

18.

18. A method in accordance with claim 15 wherein the combination of maximum reduction of time is calculated in accordance with the equation:

space="preserve" listing-type="equation">Optimum Combination=Max (T.sub.i, i=1 to N|).

19. A method in accordance with claim 6 wherein, individual reduced total time is calculated in accordance with the equation:

space="preserve" listing-type="equation">T.sub.i =R.sub.i,1 +R.sub.i,2 +. . . +R.sub.i,N, i=1 to N|.

20. A method in accordance with claim 19 wherein the combination of maximum reduction of time is calculated in accordance with the equation:

space="preserve" listing-type="equation">Optimum Combination=Max (T.sub.i, i=1 to N|).

21.

21. A method in accordance with claim 6 wherein the combination of maximum reduction of time is calculated in accordance with the equation:

space="preserve" listing-type="equation">Optimum Combination=Max (T.sub.i, i=1 to N|).

22. A method in accordance with claim 1 wherein, individual reduced total time is calculated in accordance with the equation:

space="preserve" listing-type="equation">T.sub.i =R.sub.i,1 +R.sub.i,2 +. . . +R.sub.i,N, i=1 to N|.

23. A method in accordance with claim 22 wherein the combination of maximum reduction of time is calculated in accordance with the equation:

space="preserve" listing-type="equation">Optimum Combination=Max (T.sub.i, i=1 to N|).

24. A method in accordance with claim 1 wherein the combination of maximum reduction of time is calculated in accordance with the equation:

space="preserve" listing-type="equation">Optimum Combination=Max (T.sub.i, i=1 to N|).

25.

25. A production scheduling apparatus for operating a manufacturing plant subsequent to preventative maintenance steps, comprising

a data processing system having memory means for data storage,

central processing means for

a) accessing data from said memory means,

b) receiving data from data input means and

c) supplying data to said memory means,

means for collecting interval-times (I_i,j) for processing of lots through individual processing stations,

means for forming a matrix of reduced times for processing lots through said processing stations,

means for determining permutations of said reduced times for a series of combinations of said processing stations for performing required processing tasks, and

means for selecting the combination of interval-times for maximum reduction of total processing time.

26. Apparatus in accordance with claim 25 wherein forming a matrix of reduced times for processing lots through said processing stations is performed in accordance with the equation:

space="preserve" listing-type="equation">C.sub.i C.sub.j =R.sub.ij =(I.sub.ij,1 -I.sub.i,1)+(I.sub.ij,2 -I.sub.i,2)+. . . +(I.sub.ij,M -I.sub.iM).

27. Apparatus in accordance with claim 26 wherein

N is the number of recipe routes in a plant,

F_s is Furnace run size,

C_s is Chemical station run size, and

said apparatus including means for calculating the number M of cluster recipes according to the equation:

space="preserve" listing-type="equation">M=F.sub.s /C.sub.s =6/2=3.

28.

28. Apparatus in accordance with claim 27 wherein means is provided for forming a matrix of reduced times for processing lots through said processing stations is performed in accordance with the equation:

space="preserve" listing-type="equation">C.sub.i C.sub.j =R.sub.ij =(I.sub.ij,1 -I.sub.i,1)+(I.sub.ij,2 -I.sub.i,2)+. . . +(I.sub.ij,M -I.sub.iM).

29. Apparatus in accordance with claim 28 wherein, means is provided for expanding the combinations of said matrix of reduced times to N| and means for processing data on the expanded combinations.

30. Apparatus in accordance with claim 29 wherein means is provided for calculating the combination of individual reduced total time in accordance with the equation:

space="preserve" listing-type="equation">Ti.sub. =R.sub.i,1 +R.sub.i,2 +. . . +R.sub.i,N, i=1 to N|.

31. Apparatus in accordance with claim 30 wherein means is provided for calculating the combination of maximum reduction of time in accordance with the equation:

space="preserve" listing-type="equation">Optimum Combination=Max (T.sub.i, i=1 to N|).