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Nanometer-scale silicon-on-insulator photonic componets

  • US 5,838,870 A
  • Filed: 02/28/1997
  • Issued: 11/17/1998
  • Est. Priority Date: 02/28/1997
  • Status: Expired due to Fees
First Claim
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1. A silicon-on-insulator single mode waveguide for transmitting optical waves in the near infra-red wavelength range comprising:

  • (a) a silicon light transmissive strip having a lower surface portion, a cross sectional height H of less than about 300 nanometers and wherein said lower surface portion has a cross sectional width of less than 1-5 H;

    (b) a dielectric insulating layer having an upper surface portion underlying the lower surface portion of said light transmissive strip, and a lower surface portion;

    (c) a silicon substrate having an upper surface portion underlying the lower surface portion of said dielectric insulating layer.

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