Mixing, modulation and demodulation via electromechanical resonators

• US 5,839,062 A
• Filed: 03/18/1994
• Issued: 11/17/1998
• Est. Priority Date: 03/18/1994
• Status: Expired due to Term

• Current Assignee: Regents of the University of California (University of California)
• Original Assignee: Regents of the University of California (University of California)
• Inventors: Howe, Roger T., Nguyen, Clark Tu-Cuong, Gutnik, Vadim
• Primary Examiner(s): Urban, Edward F.
• Application Number:
  US08/210,199
• Time in Patent Office: 1,705 Days
• Field of Search: 329/333, 329/344, 332/117, 333/193, 333/194, 333/196, 333/197, 333/186, 310/313 B, 310/316, 455/323, 455/325, 455/330, 455/333, 455/307, 455/319
• US Class Current: 455/323
• CPC Class Codes: H03H 2009/02496 Horizontal, i.e. parallel to the substrate plane
• CPC Class Codes: H03H 9/02377 Symmetric folded-flexure
• CPC Class Codes: H03H 9/2426 in combination with other electronic elements
• CPC Class Codes: H03H 9/465 in combination with other electronic elements
• CPC Class Codes: H04B 1/26 for superheterodyne receivers multiple frequency-changing H03D7/16

Abstract

Mixing, modulation and demodulation using the nonlinear properties of microelectromechanical resonators and filters are described. Mixing followed by filtering is implemented using microelectromechanical filters with nonlinear input transducers. AM modulation is implemented by passing a carrier signal through the output transducer of a microelectromechanical filter. FM and FSK demodulation is accomplished using parallel banks of microelectromechanical filters. The invention can be implemented using integrated circuit technology.

Claims

1. An apparatus comprising:

a first electromechanical filter having a nonlinear input transducer;

means for driving said input transducer of said first electromechanical filter with a first electrical input signal having AC components comprised of a carrier signal and an excitation signal;

wherein said input transducer of said first electromechanical filter is driven by said electrical input signal and a passband of said first electromechanical filter includes a difference frequency between a center frequency of said carrier signal and a center frequency of said excitation signals;

a second electromechanical filter matched to said first electromechanical filter and having a nonlinear input transducer;

means for driving said input transducer of said second electromechanical filter with a second input signal having AC components comprised of said carrier signal phase shifted by 90° and

said excitation signal;

a phase shifter for shifting the phase of an output signal of said second electromechanical filter by one of 90° and

-90°

; and

a summer for summing an output signal of said phase shifter with an output signal of said first electromechanical filter.

2. The apparatus of claim 1 further comprising a local oscillator for producing said carrier signal.

3. The apparatus of claim 1 wherein said input transducer of said first electromechanical filter is selected from the group consisting of electrostatic piezoelectric, piezoresistive and magnetic transducers.

4. The apparatus of claim 1 wherein said input transducer of said first electromechanical filter comprises two electrostatically coupled electrodes.

5. The apparatus of claim 4 wherein said electrostatically coupled electrodes are patterned to provide for each at least one comb with fingers interdigitated with those of the other.

6. An apparatus comprising:

a first member of an input transducer;

a second member of said input transducer movable relative to said first member;

a first member of an output transducer;

a second member of said output transducer movable relative to said first member of said output transducer and coupled to said second member of said input transducer to form an electromechanical filter having a passband; and

means for providing an electrical input signal having AC components comprised of a carrier signal and an excitation signal to said input transducer; and

wherein

said second member of said input transducer is driven relative to said first member of said input transducer by a mechanical signal which is a nonlinear function of said electrical input signal; and

a passband of said filter includes a difference frequency between a center frequency of said carrier signal and a center frequency of said excitation signal.

7. The apparatus of claim 6 further comprising a local oscillator for producing said carrier signal.

8. The apparatus of claim 6 wherein said first and second members of said input transducer and said first and second members of said output transducer are electrostatically coupled electrodes.

9. The apparatus of claim 8 wherein said electrostatically coupled electrodes are patterned to provide for each at least one comb with fingers interdigitated with those of the other.

10. The apparatus of claim 8 further comprising a transimpedance amplifier connected to said output transducer.

11. An apparatus comprising:

a first electromechanical filter having an input transducer and a passband;

an AC source for driving said input transducer of said first electromechanical filter with a carrier signal and an excitation signal;

a second electromechanical filter matched to said first electromechanical filter and having an input transducer;

an AC source for driving said input transducer of said second electromechanical filter with said carrier signal phase shifted by 90° and

said excitation signal shifted by 90°

; and

a summer for summing an output signal of said second electromechanical filter with an output signal of said first electromechanical filter.

12. A method for mixing a carrier signal and an excitation signal comprising the steps of:

providing an electrical input signal having AC components comprised of said carrier signal and said excitation signal;

applying said electrical input signal to an electromechanical filter having a nonlinear input transducer, said filter having a passband including a difference frequency between a center frequency of said carrier signal and a center frequency of said excitation signal;

wherein said input transducer comprises two electrostatically coupled electrodes that are patterned to provide for each at least one comb with fingers interdigitated with those of the other; and

applying the output of the electromechanical filter to a matched electromechanical filter with a non-linear input transducer patterned to provide at least one comb with interdigitated fingers.

13. The method of claim 12 wherein said input transducer is selected from the group consisting of electrostatic, piezoelectric, piezoresistive and magnetic transducers.

14. An apparatus, comprising:

an electromechanical filter having a nonlinear input transducer, said nonlinear input transducer including two electrostatically coupled electrodes that are patterned to provide for each at least one comb with fingers interdigitated with those of the other;

an oscillator for driving said nonlinear input transducer with a first electrical input signal having AC components comprised of a carrier signal and an excitation signal;

wherein

said nonlinear input transducer is driven by said electrical input signal and a passband of said filter includes a difference frequency between a center frequency of said carrier signal and a center frequency of said excitation signal to provide for mixing of said carrier signal and said excitation signal; and

a second electromechanical filter having a second nonlinear input transducer, said second electromechanical filter matched with and coupled to said first electromechanical filter, said second non-linear input transducer patterned to provide at least one comb with interdigitated fingers.

15. A method of mixing and filtering an RF signal by an electromechanical resonator having a resonance frequency, comprising:

applying the RF signal and a carrier signal to a nonlinear input transducer of the electromechanical resonator;

receiving an output signal on an output of the electromechanical resonator, said output signal including a signal with a frequency equal to the difference between a center frequency of the RF signal and a center frequency of the carrier signal; and

applying the output of the electromechanical resonator to a matched electromechanical filter with a non-linear input transducer patterned to provide at least one comb with interdigitated fingers.