Stage apparatus and linear motor, and exposure apparatus and device production method using the stage apparatus

• US 5,841,250 A
• Filed: 10/03/1996
• Issued: 11/24/1998
• Est. Priority Date: 10/09/1995
• Status: Expired due to Term

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Korenage, Nobushige, Ebinuma, Ryuichi
• Primary Examiner(s): LaBalle, Clayton E.
• Application Number:
  US08/725,401
• Time in Patent Office: 782 Days
• Field of Search: 318/135, 310/12, 310/13, 250/491.1, 356/401
• US Class Current: 318/135
• CPC Class Codes: G03F 7/70358 Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
• CPC Class Codes: G03F 7/70725 control
• CPC Class Codes: G03F 7/70758 Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
• CPC Class Codes: H01J 2237/20221 Translation
• CPC Class Codes: H01J 2237/20278 Motorised movement
• CPC Class Codes: H01J 2237/3175 Lithography
• CPC Class Codes: H01L 21/682 Mask-wafer alignment in general G03F7/70, G03F9/70
• CPC Class Codes: H02K 41/031 of the permanent magnet type
• CPC Class Codes: H02K 41/0356 moving along a straight path

Abstract

It is an object to provide a compact, lightweight, and inexpensive stage apparatus. A stage apparatus for moving a stage in a predetermined direction includes a stage accelerating/decelerating thrust generation unit arranged along the moving direction, a stage speed control thrust generation unit arranged to be parallel to the stage accelerating/decelerating thrust generation unit, an accelerating unit for generating a stage accelerating thrust at a portion corresponding to the stage accelerating interval of the accelerating/decelerating thrust generation unit, a decelerating unit for generating a stage decelerating thrust at a portion corresponding to the stage decelerating interval of the accelerating/decelerating thrust generation unit, and a speed control unit for controlling the stage thrust generated by the speed control thrust generation unit at least within a predetermined range between the accelerating interval and the decelerating interval.

Claims

1. A stage apparatus comprising:

a stage movable in a predetermined direction;

stage accelerating/decelerating thrust generation means arranged along the moving direction;

stage speed control thrust generation means arranged to be parallel to said stage accelerating/decelerating thrust generation means;

accelerating means for generating a stage accelerating thrust at a portion corresponding to a stage accelerating interval of said stage accelerating/decelerating thrust generation means;

decelerating means for generating a stage decelerating thrust at a portion corresponding to a stage decelerating interval of said stage accelerating/decelerating thrust generation means; and

speed control means for controlling a stage thrust generated by said stage speed control thrust generation means at least within a predetermined range between the accelerating interval and the decelerating interval,

wherein each of said stage accelerating/decelerating thrust generation means and said stage speed control thrust generation means comprises a linear motor whose movable unit has a magnet with its one pole opposing coils of a fixed unit, and said fixed unit comprises a yoke for applying a predetermined magnetic field to part of said coils in accordance with a position of said magnet over an entire stroke of said stage, and, as said coils, a single-phase speed control coil wound on said yoke and a plurality of polyphase accelerating/decelerating coils.

3. A stage apparatus according to claim 1 or 2, wherein said yoke has a main yoke having a straight portion parallel to the moving direction of said stage and arranged at least over the entire stroke of said stage, and a side yoke having a straight portion parallel to said straight portion of said main yoke at least over the entire stroke of said stage and magnetically connected to said main yoke outside the stroke.

4. A stage apparatus according to claim 3, wherein said plurality of polyphase accelerating/decelerating coils are wound on said single-phase speed control coil.

5. A stage apparatus according to claim 3, wherein said single-phase speed control coil is wound on said main yoke, and said plurality of polyphase accelerating/decelerating coils are wound on said side yoke.

6. A stage apparatus according to claim 3, wherein two side yokes are arranged on both sides of said main yoke, said single-phase speed control coil is wound on said main yoke, and two sets of said plurality of polyphase accelerating/decelerating coils are wound on said two side yokes, respectively.

7. A stage apparatus according to claim 3, wherein two sets of said movable unit and said fixed unit of said linear motor are arranged on both sides of said stage, respectively.

2. A stage apparatus comprising:

a stage movable in a predetermined direction;

stage accelerating/decelerating thrust generation means arranged along the moving direction;

stage speed control thrust generation means arranged to be parallel to said stage accelerating/decelerating thrust generation means;

accelerating means for generating a stage accelerating thrust at a portion corresponding to a stage accelerating interval of said stage accelerating/decelerating thrust generation means;

decelerating means for generating a stage decelerating thrust at a portion corresponding to a stage decelerating interval of said stage accelerating/decelerating thrust generation means; and

speed control means for controlling a stage thrust generated by said stage speed control thrust generation means at least within a predetermined range between the accelerating interval and the decelerating interval,

wherein each of said stage accelerating/decelerating thrust generation means and said stage speed control thrust generation means comprises a linear motor whose movable unit has a magnet with its two poles opposing coils of a fixed unit and separated from each other by at least a maximum stroke distance of said stage, and said fixed unit comprises a yoke for applying a predetermined magnetic field to part of said coils in accordance with a position of said magnet over an entire stroke of said stage, and, as said coils, two sets of a single-phase speed control coil wound on said yoke and a plurality of polyphase accelerating/decelerating coils, which two sets of coils are separated from each other by a distance substantially equal to a pole-to-pole distance of said magnet.

8. A stage apparatus comprising:

a stage movable in a predetermined direction;

stage accelerating/decelerating thrust generation means arranged along the moving direction;

stage speed control thrust generation means arranged to be parallel to said stage accelerating/decelerating thrust generation means;

accelerating means for generating a stage accelerating thrust at a portion corresponding to a stage accelerating interval of said stage accelerating/decelerating thrust generation means;

decelerating means for generating a stage decelerating thrust at a portion corresponding to a stage decelerating interval of said stage accelerating/decelerating thrust generation means;

speed control means for controlling a stage thrust generated by said stage speed control thrust generation means at least within a predetermined range between the accelerating interval and the decelerating interval; and

position detection means for detecting a position of said stage, command means for outputting a current command on the basis of a current position of said stage, which is detected by said position detection means, and a target position of said stage, a PWM accelerating power amplifier and a PWM decelerating power amplifier each of which outputs a current corresponding to the current command, switch means for connecting an output from said accelerating power amplifier to said accelerating means and an output from said decelerating power amplifier to said decelerating means, and a linear speed control power amplifier for outputting a current corresponding to said current command to drive said stage speed control thrust generation means.

9. A stage apparatus comprising:

position detection means for detecting a position of a stage;

command means for outputting a current command on the basis of a current position of said stage, which is detected by said position detection means, and a target position of said stage;

a first power amplifier of a PWM type;

first driving means for driving said stage in accordance with an output current from said first power amplifier;

a second power amplifier of a linear type; and

second driving means for driving said stage in accordance with an output current from said second power amplifier,

wherein said first and second driving means are arranged to be parallel to each other.

10. A stage apparatus according to claim 9, further comprising means for selecting one of said first and second power amplifiers such that, in accelerating/decelerating said stage, said stage is driven through said first power amplifier, and in positioning and speed control of said stage, said stage is driven through said second power amplifier.

11. A stage apparatus according to claim 9, wherein each of said first and second driving means comprises a linear motor whose movable unit has accelerating/decelerating coils connected to said first power amplifier, and a positioning/speed control coil connected to said second power amplifier.

12. A stage apparatus according to claim 11, wherein two sets of said movable unit and said fixed unit of said linear motor are arranged on both sides of said stage, respectively.

13. A stage apparatus according to claim 9, wherein each of said first and second driving means comprises a linear motor whose movable unit has a magnet with its one pole opposing coils of a fixed unit, said fixed unit has a yoke for applying a predetermined magnetic field to part of said coils over an entire stroke of said stage, and said coils comprise a single-phase speed control coil wound on said yoke and a plurality of polyphase accelerating/decelerating coils.

14. A stage apparatus according to claim 13, wherein said plurality of polyphase accelerating/decelerating coils are wound on said single-phase speed control coil.

15. A stage apparatus according to claim 13, wherein said yoke has a main yoke having a straight portion parallel to the moving direction of said stage and arranged at least over the entire stroke of said stage, and a side yoke having a straight portion parallel to said straight portion of said main yoke at least over the entire stroke of said stage and magnetically connected to said main yoke outside the stroke.

16. A stage apparatus according to claim 15, wherein said single-phase speed control coil is wound on said main yoke, and said plurality of polyphase accelerating/decelerating coils are wound on said side yoke.

17. A stage apparatus according to claim 15, wherein two side yokes are arranged on both sides of said main yoke, said single-phase speed control coil is wound on said main yoke, and two sets of said plurality of polyphase accelerating/decelerating coils are wound on said two side yokes, respectively.

18. A stage apparatus according to claim 9, wherein said second driving means comprises a linear motor having a coil fixed on said stage, and a magnet and a yoke for applying a magnetic field to said coil, and said first driving means comprises a screwing mechanism, and a power transmission unit for transmitting a power of said screwing mechanism to said stage.

19. A stage apparatus according to claim 9, wherein each of said first and second driving means comprises a linear motor whose movable unit has a heteropolar magnet unit and whose fixed unit has a plurality of flat coil units, and each of said flat coil units has an accelerating/decelerating coil connected to said first power amplifier and positioning/speed control coil connected to said second power amplifier.

20. A scanning exposure apparatus using, as a reticle stage, a stage apparatus, said stage apparatus comprising:

a stage movable in a predetermined direction;

stage accelerating/decelerating thrust generation means arranged along the moving direction;

stage speed control thrust generation means arranged to be parallel to said stage accelerating/decelerating thrust generation means;

accelerating means for generating a stage accelerating thrust at a portion corresponding to a stage accelerating interval of said stage accelerating/decelerating thrust generation means;

decelerating means for generating a stage decelerating thrust at a portion corresponding to a stage decelerating interval of said stage accelerating/decelerating thrust generation means; and

speed control means for controlling a stage thrust generated by said stage speed control thrust generation means at least within a predetermined range between the accelerating interval and the decelerating interval.

21. A device production method comprising producing a device by using a scanning exposure apparatus using, as a reticle stage, a stage apparatus, said stage apparatus comprising:

a stage movable in a predetermined direction;

stage accelerating/decelerating thrust generation means arranged along the moving direction;

stage speed control thrust generation means arranged to be parallel to said stage accelerating/decelerating thrust generation means;

accelerating means for generating a stage accelerating thrust at a portion corresponding to a stage accelerating interval of said stage accelerating/decelerating thrust generation means;

decelerating means for generating a stage decelerating thrust at a portion corresponding to a stage decelerating interval of said stage accelerating/decelerating thrust generation means; and

speed control means for controlling a stage thrust generated by said stage speed control thrust generation means at least within a predetermined range between the accelerating interval and the decelerating interval.