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Stage apparatus and linear motor, and exposure apparatus and device production method using the stage apparatus

  • US 5,841,250 A
  • Filed: 10/03/1996
  • Issued: 11/24/1998
  • Est. Priority Date: 10/09/1995
  • Status: Expired due to Term
First Claim
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1. A stage apparatus comprising:

  • a stage movable in a predetermined direction;

    stage accelerating/decelerating thrust generation means arranged along the moving direction;

    stage speed control thrust generation means arranged to be parallel to said stage accelerating/decelerating thrust generation means;

    accelerating means for generating a stage accelerating thrust at a portion corresponding to a stage accelerating interval of said stage accelerating/decelerating thrust generation means;

    decelerating means for generating a stage decelerating thrust at a portion corresponding to a stage decelerating interval of said stage accelerating/decelerating thrust generation means; and

    speed control means for controlling a stage thrust generated by said stage speed control thrust generation means at least within a predetermined range between the accelerating interval and the decelerating interval,wherein each of said stage accelerating/decelerating thrust generation means and said stage speed control thrust generation means comprises a linear motor whose movable unit has a magnet with its one pole opposing coils of a fixed unit, and said fixed unit comprises a yoke for applying a predetermined magnetic field to part of said coils in accordance with a position of said magnet over an entire stroke of said stage, and, as said coils, a single-phase speed control coil wound on said yoke and a plurality of polyphase accelerating/decelerating coils.

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