Flat diffraction grating light valve

• US 5,841,579 A
• Filed: 06/07/1995
• Issued: 11/24/1998
• Est. Priority Date: 06/07/1995
• Status: Expired due to Term

• Current Assignee: Silicon Light Machines Corporation (SCREEN Holdings Co., Ltd.)
• Original Assignee: Silicon Light Machines Corporation (SCREEN Holdings Co., Ltd.)
• Inventors: Banyai, William C., Straker, Bryan P., Bloom, David M., Corbin, Dave B.
• Primary Examiner(s): Dzierzynski, Paul M.
• Assistant Examiner(s): CHANG, AUDREY Y
• Application Number:
  US08/482,188
• Time in Patent Office: 1,266 Days
• Field of Search: 359/872, 359/295, 359/290, 359/224, 359/226, 345/108, 348/203
• US Class Current: 359/572
• CPC Class Codes: G02B 26/0808 by means of one or more diffracting elements
• CPC Class Codes: G02B 5/1828 having means for producing variable diffraction controlling the direction of light by means of one or more diffracting elements G02B26/0808; acousto-optical elements G02F1/11, G02F1/33; electro- or magneto-optical diffraction G02F1/292, G02F1/2955
• CPC Class Codes: Y10S 359/904 Micromirror

Abstract

A diffraction grating light valve modulates an incident beam of light. A plurality of elongated elements each have a reflective surface. The elongated elements are suspended with their respective ends substantially coplanar. Alternate ones of the elongated elements are electrically coupled for receiving a first bias voltage. The interdigitated elongated elements are electrically coupled for receiving a second bias voltage. By applying a appropriate first and second biasing voltages, all the reflective surfaces can be maintained in a first plane. When all the elongated elements are in the first plane, the diffraction grating light valve reflects the beam of light. A predetermined group of the elongated elements, preferably alternate ones, are deformable to be substantially coplanar in a second plane which is parallel to the first plane. When the predetermined group of elements is in the second plane, the diffraction grating light valve diffracts the beam of light.

Claims

1. A modulator for modulating an incident beam of light comprising:

a. a plurality of elongated elements, each element having a first end and a second end and a light reflective planar surface, wherein the elements are grouped into a first group and a second group such that the elements of the first group are interdigitated with the elements of the second group, the elements being arranged parallel to each other;

b. means for suspending the elements of the first group and the second group by their ends;

c. means for electrically coupling all the elongated elements of the first group in each row together;

d. means for electrically coupling all the elongated elements of the second group in each row together;

e. means for applying a first bias voltage to the first group and means for applying a second bias voltage to the second group such that the reflective surfaces are substantially coplanar and in a first plane such that the incident beam of light is reflected; and

f. means for selectively deflecting the elements of the first group perpendicular to the first plane toward a second plane which is parallel to the first plane such that the incident beam of light is diffracted.

2. The modulator according to claim 1 further comprising means for adjusting a position of the second group perpendicular to the first plane, independently of the first group.

3. The modulator according to claim 1 wherein adjacent elements are spaced from one another by a gap such that the extent of each reflective surface is larger than each gap.

4. The modulator according to claim 1 wherein the second plane is approximately λ

/4 from the first plane, where λ

is the wavelength of the bean of light.

5. The modulator according to claim 1 wherein the elements do not lie in the first plane when the first bias voltage is removed.

6. The modulator according to claim 1 wherein an electrostatic attraction is formed by applying the first bias voltage and the second bias voltage as an electrical potential across the elements and an underlying conductor.

7. The modulator according to claim 1 further comprising a means for sensing a diffracted light and for automatically adjusting the electrical bias in response thereto.

8. The modulator according to claim 1 wherein the elements reflect light when in the second plane regardless of wavelength.

9. A digital display system for displaying an image comprising:

a. a plurality of pixels, each pixel for displaying a portion of the image, wherein the pixels are arranged in an array having a plurality of rows and plurality of columns, and further wherein each pixel comprises;

(1) a plurality of elongated elements, each element having a first end and a second end and a light reflective planar surface, wherein the elements are grouped into a first group and a second group such that the elements of the first group are interdigitated with the elements of the second group, the elements being arranged parallel to each other; and

(2) means for suspending the elements of the first group and the second group over a substrate by their ends;

b. means for electrically coupling all the elongated elements of the first group in each row together;

c. means for electrically coupling all the elongated elements of the second group in each row together;

d. means for applying a first bias voltage to the first group and means for applying a second bias voltage to the second group such that the reflective surfaces are substantially coplanar and in a first plane such that the incident beam of light is reflected; and

e. means for selectively deflecting the elements of the first group perpendicular to the plane to a second plane which is parallel to the first plane such that the incident beam of light is diffracted.

10. The apparatus according to claim 9 wherein the means for selectively deflecting the elements of the first group comprises a conductive layer mounted to the substrate and under all the elongated elements in a column.