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Monolithic sensor of fingerprints

  • US 5,844,287 A
  • Filed: 10/10/1996
  • Issued: 12/01/1998
  • Est. Priority Date: 10/17/1995
  • Status: Expired due to Fees
First Claim
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1. A fingerprint sensor comprising a matrix of pressure microsensors sensitive to the pattern of a fingerprint, the matrix of pressure microsensors being implemented in an integrated circuit, each pressure microsensor of the matrix including a deformable diaphragm which closes off a cavity, the cavity being disposed between the diaphragm and a substrate of the integrated circuit, the diaphragm being formed of an insulator material, and the diaphragm having disposed thereon a conductive element of the microsensor which deforms under the effect of a pressure applied to the diaphragm.

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