Semiconductor electro-optical device
First Claim
1. An electro-optical device comprising a pixel portion having a thin film transistor using silicon as a semiconductor layer and a pixel electrode connected to the thin film transistor,wherein said pixel electrode comprises a first transparent electrically conductive film electrically connected to said semiconductor layer and a second transparent electrically conductive film disposed on the first transparent electrically conductive film,said first transparent electrically conductive film comprises an oxide layer of a first metal having an oxidation potential lower than that of silicon, andsaid second transparent electrically conductive film comprises an oxide layer of a second metal having an oxidation potential higher than that of silicon.
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Accused Products
Abstract
A display device comprising a pixel portion having a thin film transistor using silicon as a semiconductor layer and a pixel electrode connected to the thin film transistor, wherein: said pixel electrode having a first transparent electrically conductive film electrically connected to said semiconductor layer and a second transparent electrically conductive film disposed on the first transparent electrically conductive film; said first transparent electrically conductive film comprises an oxide layer of a first metal having an oxidation potential lower than that of silicon; and said second transparent electrically conductive film comprises an oxide layer of a second metal having an oxidation potential higher than that of silicon. Also claimed is a process for fabricating the display device.
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Citations
10 Claims
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1. An electro-optical device comprising a pixel portion having a thin film transistor using silicon as a semiconductor layer and a pixel electrode connected to the thin film transistor,
wherein said pixel electrode comprises a first transparent electrically conductive film electrically connected to said semiconductor layer and a second transparent electrically conductive film disposed on the first transparent electrically conductive film, said first transparent electrically conductive film comprises an oxide layer of a first metal having an oxidation potential lower than that of silicon, and said second transparent electrically conductive film comprises an oxide layer of a second metal having an oxidation potential higher than that of silicon.
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4. An electro-optical device comprising a pixel portion having a thin film transistor using a semiconductor layer comprising silicon and a pixel electrode connected to the thin film transistor,
wherein said pixel electrode having a first transparent electrically conductive film electrically connected to said semiconductor layer and a second transparent electrically conductive film placed on the first transparent electrically conductive film, said first transparent electrically conductive film comprises an oxide layer obtained by oxidizing by heat treatment a first metal having an oxidation potential lower than that of silicon, and said second transparent electrically conductive film comprises an oxide layer of a second metal having an oxidation potential higher than that of silicon.
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5. An electro-optical device comprising a pixel portion having a thin film transistor using a semiconductor layer comprising silicon and a pixel electrode electrically connected to said thin film transistor,
wherein said pixel electrode comprises a titanium oxide film electrically connected to said semiconductor layer and an indium oxide film disposed on the titanium oxide film.
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7. An electro-optical device comprising a pixel portion having a thin film transistor using a semiconductor layer comprising silicon and a pixel electrode connected to said thin film transistor,
wherein said pixel electrode comprises a titanium oxide film electrically connected to said semiconductor layer and a metal compound film comprising an indium oxide in contact with said titanium oxide film.
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9. An electro-optical device comprising:
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a first electrically conductive film comprising an oxide layer of a first metal electrically connected to a semiconductor layer comprising silicon; and a second electrically conductive film comprising an oxide layer of a second metal, wherein said first metal has an oxidation potential lower than that of said second metal. - View Dependent Claims (10)
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Specification