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Computed tomography metrology

  • US 5,848,115 A
  • Filed: 05/02/1997
  • Issued: 12/08/1998
  • Est. Priority Date: 05/02/1997
  • Status: Expired due to Term
First Claim
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1. A method for comparing actual geometry to predetermined geometry of an object, the method comprising:

  • three-dimensionally scanning the object using computed tomography (CT) to produce multiple slices of actual geometrical data of the object;

    processing said multiple slices of actual geometrical data into actual boundary data which defines internal and external actual boundaries of the object and features of the object; and

    producing point cloud data from the actual boundary data.

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