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Laser and laser-assisted free electron beam deposition apparatus and method

  • US 5,849,371 A
  • Filed: 07/22/1996
  • Issued: 12/15/1998
  • Est. Priority Date: 07/22/1996
  • Status: Expired due to Fees
First Claim
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1. A vapor deposition apparatus for vaporizing a material contained in a crucible contained in a deposition chamber to coat a thin film of the material on a substrate contained in the deposition chamber, comprising:

  • a first laser located outside of the deposition chamber provided with means for directing a first laser beam emitted by said laser to the crucible;

    a second vaporizing beam apparatus selected from the group consisting of at least one electron beam generating apparatus and at least one second laser provided with means for directing a vaporizing beam generated by said second vaporizing beam generating apparatus to the crucible.

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