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Closed loop resonant rotation rate sensor

  • US 5,850,035 A
  • Filed: 04/11/1997
  • Issued: 12/15/1998
  • Est. Priority Date: 06/07/1995
  • Status: Expired due to Fees
First Claim
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1. A sensor comprising:

  • a piezoelectric structure;

    a sensor circuit to generate an AC drive signal and an AC control signal; and

    drive electrodes coupled to the sensor circuit and configured on the piezoelectric structure so that (a) all of the drive electrodes together apply the AC drive signal to the piezoelectric structure to cause drive mode displacement of the piezoelectric structure, and (b) at least some of the drive electrodes also together apply the AC control signal to the piezoelectric structure to cancel motion induced pickup mode and quadrature displacements of the piezoelectric structure.

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