Flow controller, parts of flow controller, and related method

• US 5,850,850 A
• Filed: 07/23/1996
• Issued: 12/22/1998
• Est. Priority Date: 12/29/1994
• Status: Expired due to Term

• Current Assignee: Brooks Instrument LLC (Illinois Tool Works Inc.)
• Original Assignee: Millipore Corporation
• Inventors: Mudd, Daniel T.
• Primary Examiner(s): Michalsky, Gerald A.
• Application Number:
  US08/685,260
• Time in Patent Office: 882 Days
• Field of Search: 137/82, 137/486, 137/487.5, 251/129.17, 251/129.2, 251/303, 251/335.2
• US Class Current: 137/486
• CPC Class Codes: B23P 11/005 by expanding or crimping
• CPC Class Codes: G01F 1/6842 with means for influencing the fluid flow
• CPC Class Codes: G01F 1/6847 where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
• CPC Class Codes: G01F 15/00 Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
• CPC Class Codes: G01F 15/005 Valves valves in general F16K
• CPC Class Codes: G01F 5/00 Measuring a proportion of the volume flow
• CPC Class Codes: G05D 7/0635 by action on throttling means G05D7/0688, G05D7/0694 take precedence
• CPC Class Codes: Y10T 137/0898 By shifting of liquid level
• CPC Class Codes: Y10T 137/7759 Responsive to change in rate of fluid flow
• CPC Class Codes: Y10T 137/7761 Electrically actuated valve
• CPC Class Codes: Y10T 137/87338 Flow passage with bypass
• CPC Class Codes: Y10T 137/87354 Including flowmeter
• CPC Class Codes: Y10T 29/49423 including metal deforming
• CPC Class Codes: Y10T 29/49426 including metal shaping and diverse operation

Abstract

A mass fluid flow controller has a valve which is controlled by a controller rod which is substantially pivotally mounted on a metallic diaphragm which stretches and unstretches with the movement of the rod. The actuation of the rod movement is by the expansion and contraction of an actuator wire which is heated for the expansion and allowed to cool for the contraction. The primary fluid flow path through the controller is straight. A sensor conduit, providing a parallel sensor fluid flow path, is connected in position using metallic sealer members which extend into openings to the primary fluid flow path and which are rounded along the direction through such openings. The pressure drop, along the primary fluid flow path, to create flow through the sensor conduit, is provided by a fluid flow restrictor having a core and having lengths of wire along the core which are squeezed between the core and a tapered fluid flow path wall in the vicinity of the sensor conduit input and output connections. A spherical or a conical shape may be used for the form of the core. A valve seat bushing is mounted in pipe structure providing the primary fluid flow path by applying a force against an end surface of the bushing, with movement of the bushing blocked, in order to deform the end surface, push the outer wall of the bushing against the inner wall of the pipe structure, and fix the bushing in the pipe structure.

Claims

1. A fluid flow controller, comprising:

input pipe structure defining an inlet for receiving a fluid having a flow and defining a fluid flow opening through said structure;

a sensor to provide measurements corresponding to said fluid flow;

an actuator to adjust said fluid flow in response to said sensor;

intermediate pipe structure for receiving said fluid downstream from said input pipe structure and defining a fluid flow opening through said intermediate pipe structure;

output pipe structure for receiving said fluid downstream from said intermediate pipe structure and defining a fluid flow opening through said output pipe structure;

a valve seat mounted in said intermediate pipe structure;

a valve gate member associated with said valve seat;

a gate-member controller including,

a controller rod structure having a gate-member control portion,

a mounting portion and an actuation portion, and

a mounting structure for said controller rod structure including a diaphragm having a first face for the gate-member control portion side of said diaphragm and a second face for the actuation portion side of said diaphragm, said controller rod structure substantially pivotally connected to said diaphragm along said controller rod structure mounting portion, said actuation and gate-member control portions of said controller rod structure movable to multiple alternative positions in opposing directions with reference to the position of said mounting structure in substantially pivotal fashion in response to said actuator to adjust said fluid flow to multiple alternative flow rates, with said diaphragm carrying substantially the full structurally-supported weight of said controller rod structure and substantially unsupported by fixed structure along said second face in the vicinity of said substantially pivotal connection.

2. A fluid flow controller as defined in claim 1 wherein:

said diaphragm is a metallic diaphragm.

3. A fluid flow controller as defined in claim 2 wherein:

said diaphragm is substantially unbent.

4. A fluid flow controller as defined in claim 2 wherein:

said diaphragm has a substantially circular shape.

5. A fluid flow controller as defined in claim 1 wherein:

said diaphragm stretches and unstretches as said actuation and said gate-member control portions of said controller rod structure move in said opposing directions.

6. A fluid flow controller as defined in claim 1 wherein:

said mounting portion of said controller rod structure includes a first section on an actuation portion side of said diaphragm and a second section on a gate-member control side of said diaphragm, said first and second sections having a differential strength against bending to favor bending along one of said sections over the other of said sections.

7. A fluid flow controller as defined in claim 6 wherein:

said first and second sections are substantially cylindrically-shaped.

8. A fluid flow controller as defined in claim 1 wherein:

said valve seat defines a fluid flow opening substantially aligned with said fluid flow opening through said input pipe structure.

9. A fluid flow controller as defined in claim 1 wherein:

said valve seat defines a fluid flow opening substantially aligned with said fluid flow openings through said input and output pipe structures.

10. A fluid flow controller as defined in claim 1 wherein:

said diaphragm carries substantially the full structurally-supported weight of said controller rod structure independently of the orientation of said flow controller.

11. A fluid flow controller as defined in claim 1 wherein:

said diaphragm carries substantially the full structurally-carried force of said fluid at said diaphragm.

12. A fluid controller as defined in claim 1 wherein:

said diaphragm, at rest and in operation, is substantially unsupported by fixed structure along said second face in the vicinity of said substantially pivotal connection.