Protective shield around the inner edge of endpoint window in a plasma etching chamber

• US 5,851,343 A
• Filed: 05/16/1997
• Issued: 12/22/1998
• Est. Priority Date: 05/16/1997
• Status: Expired due to Term

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Wu, Ching-Chung, Hsu, Yung-Mao
• Primary Examiner(s): Utech, Benjamin
• Assistant Examiner(s): GOUDREAU, GEORGE A
• Application Number:
  US08/857,961
• Time in Patent Office: 585 Days
• Field of Search: 156/345, 118/723 MW, 118/723 ME, 315/111.21
• US Class Current: 156/345.25
• CPC Class Codes: H01J 37/32477 characterised by the means for protecting vessels or internal parts, e.g. coatings

Abstract

The present invention provides a protective shield for a plasma etcher. The protective shield 40 protects the chamber wall 30 around the etch detect window from plasma etching and electrical arcing. The invention comprises a plasma etcher 10 has a wall 30 surrounding a chamber 14. The wall has an opening 16. The wall 30 having an inside face 30A and an outside face 30B. An opening edge 30C defines the opening 16. A window 24 covers over the opening 16 and over a portion of the outside face 30B of the wall. The protective shield 40 covers the opening edge 30C around the opening 16 and a portion of the inside face 30A of the wall 30 around the opening 16. The shield 40 is composed of an electrically insulating and plasma resistant material whereby the protective shield 40 prevents the chamber from arching and generating particles and extends the lifetime of the wall 30.

Claims

1. A protective shield around a window in a plasma etcher comprising:

a plasma etcher having a wall surrounding a chamber, an opening in said wall;

said wall having an inside face and an outside face;

said inside face of said wall covered by a protective coating;

an opening edge, of said wall defining said opening;

a window pane over said opening and over a portion of said outside face of said wall;

the improvement being;

a) a shield covering said opening edge of said wall adjacent to said opening and a portion of said inside face of said wall adjacent to said opening;

said shield comprised of an electrically insulating and plasma resistant material whereby said shield prevents the chamber from arcing and generating particles and extend the lifetime of said wall.

2. The protective shield of claim 1 wherein said shield has a cross sectional "L" shape and comprises a first extending portion and a second extending portion;

said first extending portion covering a portion of said inside face of said wall and said second extending portion covering said opening edge and a portion of said window pane.

3. The protective shield of claim 1 wherein said shield covers said opening edge around said opening and covers a portion between 5 and 20 mm of the inside face of the wall around said opening.

4. The protective shield of claim 1 wherein said protective shield is comprised of polytetrafluoroethylene and has a thickness in a range of between 0.5 and 3.0 mm.

5. The protective shield of claim 1 wherein said window pane has a circular shape and said shield has a cross sectional "L" shape and comprises a first extending portion and a second extending portion;

said first extending portion covering a portion of said inside face of said wall and said second extending portion covering said opening edge and a portion of said window pane and said shield covers said opening edge around said opening and covers a portion between 5 and 20 mm of the inside face of the wall around said opening.

6. The protective shield of claim 1 wherein said window pane covers said opening and is comprised of quartz.

7. The protective shield of claim 1 wherein said chamber comprised of a material selected from the group consisting of aluminum, stainless steel and Ti.

8. The protective shield of claim 1 wherein said protective coating is comprised of aluminum oxide and said protective coating being an electrical insulator.

12. The method of claim 1 wherein said window pane is an end point detection window.

13. The method of claim 1 wherein said shield covers a portion of said protective coating adjacent to said opening.

14. The method of claim 1 wherein said shield covers a portion of said window pane adjacent to said opening.

9. A protective shield around a window in a plasma etcher comprising:

a plasma etcher having a wall surrounding a chamber, an opening in said wall;

said wall having an inside face and an outside face;

said inside face of said wall covered by a protective coating;

an opening edge, of said wall, defining said opening;

a window pane over said opening and over a portion of said outside face of said wall;

the improvement being;

a shield covering said opening edge of said wall around said opening and a portion of said inside face of said wall around said opening; and

covering portions of said protective coating adjacent to said opening;

said shield comprised of an electrically insulating and plasma resistant material;

said protective shield has a thickness in a range of between 0.5 and 3.0 mm;

whereby said shield prevents the chamber from arcing and generating particles and extend the lifetime of said well.

15. The method of claim 9 wherein said shield covers a portion of said window pane adjacent to said opening.

10. A protective shield around a horizontal window in a plasma etcher comprising:

a plasma etcher having a wall surrounding a chamber, an opening in said wall;

said wall having an inside face and an outside face;

said inside face of said wall covered by a protective coating;

a opening edge, of said wall, defining said opening;

a window pane over said opening and over a portion of said outside face of said wall;

said chamber comprised of a material selected from the group consisting of aluminum, stainless-steel and Ti;

said chamber has a coating of anodized material composed of aluminum oxide and said coating being an electrical insulator;

a shield covering said opening edge of said wall around said opening and a portion of said inside face of said wall around said opening;

said shield covers said opening edge around said opening and covers a portion between about 5 and 20 mm of the inside face of the wall 30 around the opening; and

covering portions of said protective coating adjacent to said opening; and

covering a portion of said window pane adjacent to said opening;

said shield comprised of an electrically insulating and plasma resistant material;

said protective shield is comprised of polytetrafluoroethlyene and has a thickness in a range of between 0.5 and 3.0 mm;

whereby said shield prevents the chamber from arcing and generating particles and extend the lifetime of said well.

11. The protective shield of claim 10 wherein said shield has a cross sectional "L" shape and comprises a first extending portion and a second extending portion;

said first extending portion covering a portion of said inside face of said wall and said second extending portion covering said opening edge and a portion of said window pane.