Antisoiling coatings for antireflective surfaces and methods of preparation
First Claim
1. An antireflective article comprising a substrate having an antireflective surface and an antisoiling coating of less than about 100 Angstroms thick deposited thereon;
- wherein the antisoiling coating comprises a fluorinated siloxane prepared by applying a coating composition comprising a fluorinated silane of the following formula;
space="preserve" listing-type="equation">R.sub.f --R.sup.1 --SiX.sub.3-x R.sup.2.sub.xwherein;
Rf is a perfluorinated group optionally containing one or more heteroatoms;
R1 is a divalent alkylene group, arylene group, or mixture thereof, substituted with one or more heteroatoms or functional groups, containing about 2 to about 16 carbon atoms;
R2 is a lower alkyl group;
X is a halide, a lower alkoxy group, or an acyloxy group; and
x is 0 or 1.
1 Assignment
0 Petitions
Reexamination
Accused Products
Abstract
An antisoiling coating for an antireflective surface, particularly the outer surface of an antireflective film stack, wherein the antisoiling coating includes a fluorinated siloxane, preferably prepared by applying a coating composition of a fluorinated silane of the following formula:
R.sub.f --R.sup.1 --SiX.sub.3-x R.sup.2.sub.x
wherein:
Rf is a perfluorinated group optionally containing one or more heteroatoms;
R1 is a divalent alkylene group, arylene group, or mixture thereof, substituted with one or more heteroatoms or functional groups, containing about 2 to about 16 carbon atoms;
R2 is a lower alkyl group;
X is a halide, a lower alkoxy group, or an acyloxy group; and
x is 0 or 1.
144 Citations
39 Claims
-
1. An antireflective article comprising a substrate having an antireflective surface and an antisoiling coating of less than about 100 Angstroms thick deposited thereon;
- wherein the antisoiling coating comprises a fluorinated siloxane prepared by applying a coating composition comprising a fluorinated silane of the following formula;
space="preserve" listing-type="equation">R.sub.f --R.sup.1 --SiX.sub.3-x R.sup.2.sub.xwherein; Rf is a perfluorinated group optionally containing one or more heteroatoms; R1 is a divalent alkylene group, arylene group, or mixture thereof, substituted with one or more heteroatoms or functional groups, containing about 2 to about 16 carbon atoms; R2 is a lower alkyl group; X is a halide, a lower alkoxy group, or an acyloxy group; and x is 0 or 1. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
- wherein the antisoiling coating comprises a fluorinated siloxane prepared by applying a coating composition comprising a fluorinated silane of the following formula;
-
11. An antireflective article comprising a substrate having an antireflective surface and an antisoiling coating deposited thereon;
- wherein the antisoiling coating comprises a fluorinated siloxane base film of an approximately monolayer thickness on which is adsorbed oligomeric fluorinated siloxane material in an amount that does not substantially change the antireflective characteristics of the antireflective article;
wherein the fluorinated siloxane is prepared by applying a coating composition comprising a fluorinated silane of the following formula;
space="preserve" listing-type="equation">R.sub.f --R.sup.1 --SiX.sub.3-x R.sup.2.sub.xwherein; Rf is a perfluorinated group optionally containing one or more heteroatoms; R1 is a divalent alkylene group, arylene group, or mixture thereof, substituted with one or more heteroatoms or functional groups, containing about 2 to about 16 carbon atoms; R2 is a lower alkyl group; X is a halide, a lower alkoxy group, or an acyloxy group; and x is 0 or 1. - View Dependent Claims (12, 13, 14)
- wherein the antisoiling coating comprises a fluorinated siloxane base film of an approximately monolayer thickness on which is adsorbed oligomeric fluorinated siloxane material in an amount that does not substantially change the antireflective characteristics of the antireflective article;
-
15. An antireflective article comprising a substrate having an antireflective surface and an antisoiling coating deposited thereon;
- wherein the antisoiling coating is less than about 100 Angstroms thick and comprises a fluorinated siloxane base film of an approximately monolayer thickness on which is adsorbed oligomeric fluorinated siloxane material in an amount that does not significantly reduce the antireflective characteristics of the antireflective article.
-
16. A method of applying an antisoiling coating to a substrate having an antireflective surface, the method comprising treating the antireflective surface with a coating composition comprising a fluorinated silane without subsequent processing;
- wherein the fluorinated silane has the following formula;
space="preserve" listing-type="equation">R.sub.f --R.sup.1 --SiX.sub.3-x R.sup.2.sub.xwherein; Rf is a perfluorinated group optionally containing one or more heteroatoms; R1 is a divalent alkylene group, arylene group, or mixture thereof, substituted with one or more heteroatoms or functional groups, containing about 2 to about 16 carbon atoms; R2 is a lower alkyl group; X is a halide, a lower alkoxy group, or an acyloxy group; and x is 0 or 1. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
- wherein the fluorinated silane has the following formula;
-
29. A method of applying an antisoiling coating to a substrate having an antireflective surface, the method consisting essentially of treating the antireflective surface with a coating composition comprising less than about 0.5 weight percent of a fluorinated silane for less than 30 minutes;
- wherein the fluorinated silane has the following formula;
space="preserve" listing-type="equation">R.sub.f --R.sup.1 --SiX.sub.3-x R.sup.2.sub.xwherein; Rf is a perfluorinated group optionally containing one or more heteroatoms; R1 is a divalent alkylene group, arylene group, or mixture thereof, substituted with one or more heteroatoms or functional groups, containing about 2 to about 16 carbon atoms; R2 is a lower alkyl group; X is a halide, a lower alkoxy group, or an acyloxy group; and x is 0 or 1. - View Dependent Claims (30)
- wherein the fluorinated silane has the following formula;
-
31. A method of applying an antisoiling coating to a substrate having an antireflective surface, the method comprising immersing the substrate in a coating composition comprising less than about 0.5 weight percent of a fluorinated silane for less than about 20 minutes and removing the coated antireflective substrate, wherein upon removal the coated substrate emerges substantially autophobic.
-
32. A method of applying an antisoiling coating to a substrate having an antireflective surface, the method comprising immersing the substrate in a coating composition comprising a fluorinated silane of the following formula:
-
space="preserve" listing-type="equation">R.sub.f --R.sup.1 --SiX.sub.3-x R.sup.2.sub.xwherein; Rf is a perfluorinated group optionally containing one or more heteroatoms; R1 is a divalent alkylene group, arylene group, or mixture thereof, substituted with one or more heteroatoms or functional groups, containing about 2 to about 16 carbon atoms; R2 is a lower alkyl group; X is a halide, a lower alkoxy group, or an acyloxy group; and x is 0 or 1; wherein the antisoiling coating formed has a thickness of less than about 100 Angstroms. - View Dependent Claims (33, 34, 35)
-
-
36. A method of applying an antisoiling coating to a substrate having an antireflective surface, the method comprising immersing the substrate in a coating composition comprising a fluorinated silane of the following formula:
-
space="preserve" listing-type="equation">R.sub.f --R.sup.1 --SiX.sub.3-x R.sup.2.sub.xwherein; Rf is a perfluorinated group optionally containing one or more heteroatoms; R1 is a divalent alkylene group, arylene group, or mixture thereof, substituted with one or more heteroatoms or functional groups, containing about 2 to about 16 carbon atoms; R2 is a lower alkyl group; X is a halide, a lower alkoxy group, or an acyloxy group; and x is 0 or 1; wherein the antisoiling coating comprises a fluorinated siloxane base film of an approximately monolayer thickness on which is adsorbed oligomeric fluorinated siloxane material in an amount that does not substantially change the antireflective characteristics of the antireflective article. - View Dependent Claims (37)
-
-
38. A method of applying an antisoiling coating to a substrate having an antireflective surface, the method comprises immersing the substrate in a coating composition comprising less than about 0.5 weight percent of a fluorinated silane for less than about 5 minutes without subsequent processing;
- wherein the fluorinated silane is of the following formula;
space="preserve" listing-type="equation">R.sub.f --R.sup.1 --SiX.sub.3-x R.sup.2.sub.xwherein; Rf is a perfluorinated group optionally containing one or more heteroatoms; R1 is a divalent alkylene group, arylene group, or mixture thereof, substituted with one or more heteroatoms or functional groups, containing about 2 to about 16 carbon atoms; R2 is a lower alkyl group; X is a halide, a lower alkoxy group, or an acyloxy group; and x is 0 or 1; wherein the antisoiling coating formed has a thickness of less than about 100 Angstroms and comprises a fluorinated siloxane base film of an approximately monolayer thickness on which is adsorbed oligomeric fluorinated siloxane material in an amount that does not substantially change the antireflective characteristics of the antireflective article. - View Dependent Claims (39)
- wherein the fluorinated silane is of the following formula;
Specification