Flow sensor having an intermediate heater between two temperature-sensing heating portions
First Claim
1. A flow sensor for sensing a flow rate of a fluid, comprising:
- a first heating portion, provided at a first position in a flow of the fluid, for heating the fluid and for outputting a voltage in response to a temperature of the first position;
a second heating portion, provided at a second, downstream position in the flow of the fluid, for heating the fluid and for outputting a voltage in response to a temperature of the second position, the first position and the second position being spaced from each other in a direction parallel to the flow of the fluid; and
an intermediate heater, provided between the first heating portion and the second heating portion, for heating the fluid at an intermediate position between the first position and the second position.
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Accused Products
Abstract
A flow sensor includes a first heating portion, provided at a first position in a flow of a fluid, which heats the fluid and outputs a voltage in response to a temperature of the first position. A second heating portion, provided at a second, downstream position in the flow of the fluid, heats the fluid and outputs a voltage in response to a temperature of the second position, the first position and the second position being spaced from each other in a direction parallel to the flow of the fluid. An intermediate heater, provided between the first heating portion and the second heating portion, heats the fluid at an intermediate position between the first position and the second position.
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Citations
8 Claims
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1. A flow sensor for sensing a flow rate of a fluid, comprising:
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a first heating portion, provided at a first position in a flow of the fluid, for heating the fluid and for outputting a voltage in response to a temperature of the first position; a second heating portion, provided at a second, downstream position in the flow of the fluid, for heating the fluid and for outputting a voltage in response to a temperature of the second position, the first position and the second position being spaced from each other in a direction parallel to the flow of the fluid; and an intermediate heater, provided between the first heating portion and the second heating portion, for heating the fluid at an intermediate position between the first position and the second position. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification
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- Resources
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Current AssigneeRicoh Company Limited
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Original AssigneeRicoh Company Limited, Ricoh Elemex Corporation (Ricoh Company Limited), Ricoh Seiki Co. Ltd. (Ricoh Company Limited)
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InventorsAzumi, Junichi, Kaminishi, Morimasa, Yamaguchi, Takayuki, Sato, Yukito, Shoji, Hiroyoshi
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Primary Examiner(s)Dougherty, Elizabeth L.
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Assistant Examiner(s)PATEL, HARSHAD R
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Application NumberUS08/873,455Time in Patent Office558 DaysField of Search73/204.26, 73/204.25, 73/204.23, 73/204.17, 73/204.15, 73/204.11US Class Current73/204.26CPC Class CodesG01F 1/6845 Micromachined devices
