Ultrasonic phased array transducer with an ultralow impedance backfill and a method for making
First Claim
1. A method for forming an ultrasonic phased array transducer with an ultralow impedance backing, the method comprising the steps of:
- providing a low density backfill material having an ultralow acoustic impedance, wherein the backfill material is a carbon xerogel;
bonding a piezoelectric ceramic material and a plurality of matching layers to the backfill material; and
cutting through portions of the bonded plurality of matching layers, the piezoelectric ceramic material, and the backfill material to form an array of electrically and acoustically isolated individual elements.
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Abstract
The present invention discloses an ultrasonic phased array transducer with an ultralow backfill and a method for making. The ultrasonic phased array includes a low density backfill material having an ultralow acoustic impedance. The backfill material is either an aerogel, a carbon aerogel, an xerogel, or a carbon xerogel. A piezoelectric ceramic material and two matching layers are bonded to the backfill material. In one embodiment, a plurality of interconnect vias are formed in the backfill material with conducting material deposited in the vias. A portion of the bonded matching layers, the piezoelectric ceramic material, and the backfill material have isolation cuts therethrough to form an array of electrically and acoustically isolated individual elements. In a second embodiment, the backfill material is bonded to an electronic layer at a face opposite to the piezoelectric ceramic material and the matching layers. Then isolation cuts are made through the matching layers, the piezoelectric ceramic material, and the backfill material, to form an array of electrically and acoustically isolated individual elements.
71 Citations
12 Claims
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1. A method for forming an ultrasonic phased array transducer with an ultralow impedance backing, the method comprising the steps of:
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providing a low density backfill material having an ultralow acoustic impedance, wherein the backfill material is a carbon xerogel; bonding a piezoelectric ceramic material and a plurality of matching layers to the backfill material; and cutting through portions of the bonded plurality of matching layers, the piezoelectric ceramic material, and the backfill material to form an array of electrically and acoustically isolated individual elements. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method for forming an ultrasonic phased array transducer with an ultralow impedance backing, the method comprising the steps of:
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providing an electrically conductive low density backfill material having an ultralow acoustic impedance, wherein the backfill material is a carbon xerogel; bonding a piezoelectric ceramic material and a plurality of matching layers to the backfill material; bonding an electronic layer to the backfill material at a face opposite to the bonded piezoelectric ceramic material and plurality of matching layers, the electronic layer used for making electrical contacts to the piezoelectric ceramic material and to external devices; and cutting through portions of the bonded plurality of matching layers, the piezoelectric ceramic material, and the backfill material to form an array of electrically and acoustically isolated individual elements. - View Dependent Claims (9, 10, 11, 12)
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Specification