Method of planarizing an insulating layer in a semiconductor device

• US 5,853,604 A
• Filed: 06/19/1997
• Issued: 12/29/1998
• Est. Priority Date: 06/21/1996
• Status: Expired due to Fees

• Current Assignee: Magnachip Semiconductor Limited (Magnachip Semiconductor)
• Original Assignee: Hyundai Electronics Industries Co. Ltd. (SK Hynix Inc.)
• Inventors: Kim, Sang Yong
• Primary Examiner(s): Breneman, R. Bruce
• Assistant Examiner(s): GOUDREAU, GEORGE A
• Application Number:
  US08/877,635
• Time in Patent Office: 558 Days
• Field of Search: 216/88, 216/89, 438/692, 438/693, 438/734, 438/750
• US Class Current: 216/88
• CPC Class Codes: H01L 21/31053 involving a dielectric removal step

Abstract

The present invention discloses a method of planarizing an insulating layer of a semiconductor device. The method of the present invention comprises a first polishing step for rotating the platen and the rotating carrier holding the wafer contacted with the polishing pad secured to the platen, applying a nitrogen (N₂) gas to the rear surface of the wafer to contact a surface of the wafer with the polishing pad, and applying force to the wafer through the rotating carrier to press the wafer against the polishing pad. Then, a second polishing step for increasing a speed of revolution of the platen and the rotating carrier and decreasing the force applied to the wafer is performed.

Claims

1. A method of planarizing an insulating layer of a semiconductor device using a chemical mechanical polish apparatus which comprises a rotatable platen, a polishing pad secured to said platen and a rotating carrier having recesses for holding a wafer, said rotating carrier operated to position said wafer on said polishing pad, the method comprising steps of:

a first polishing step for rotating said platen and said rotating carrier holding said wafer contacted with said polishing pad secured to said platen, applying a nitrogen (N₂) gas to the rear surface of the wafer to contact a surface of said wafer with the polishing pad, and applying force to said wafer through said rotating carrier to press said wafer against said polishing pad;

a second polishing step for increasing a speed of revolution of said platen and said rotating carrier and decreasing the force applied to said wafer.

2. The method of planarizing an insulating layer of a semiconductor device as claimed in claim 1, wherein said force applied to said wafer through said rotating carrier in said first polishing step is 5 through 9 psi.

3. The method of planarizing an insulating layer of a semiconductor device as claimed in claim 1, wherein said nitrogen (N₂) is applied through a passage formed in said rotating carrier at pressure of 0.5 through 1 psi.

4. The method of planarizing an insulating layer of a semiconductor device as claimed in claim 1, wherein, the speed of revolution of said platen and said rotating carrier in said first polishing step are 26 through 30 r.p.m and 28 through 34 r.p.m., respectively.

5. The method of planarizing an insulating layer of a semiconductor device as claimed in claim 1, wherein said force applied to said wafer through said rotating carrier in the second polishing step is 1 through 4 psi.

6. The method of planarizing an insulating layer of a semiconductor device as claimed in claim 1, wherein, the speed of revolution of said platen and said rotating carrier in said second polishing step are 28 through 32 r.p.m and 64 through 94 r.p.m., respectively.

7. The method of planarizing an insulating layer of a semiconductor device as claimed in claim 1, wherein said first polishing step and said the second polishing step are performed continuously.