Method of forming uniform thin coatings on large substrates

• US 5,853,815 A
• Filed: 09/02/1997
• Issued: 12/29/1998
• Est. Priority Date: 08/18/1994
• Status: Expired due to Term

• Current Assignee: Oerlikon Metco AG (OC Oerlikon Corporation AG)
• Original Assignee: Oerlikon Metco AG (OC Oerlikon Corporation AG)
• Inventors: Muehlberger, Erich
• Primary Examiner(s): PIANALTO, BERNARD D
• Application Number:
  US08/922,001
• Time in Patent Office: 483 Days
• Field of Search: 427/446, 427/569, 427/248.1, 427/250, 427/294, 427/422, 427/453, 427/455
• US Class Current: 427/446
• CPC Class Codes: B41N 3/032 Graining by laser, arc or plasma means
• CPC Class Codes: C23C 4/134 Plasma spraying
• CPC Class Codes: C23C 4/137 Spraying in vacuum or in an inert atmosphere

Abstract

A plasma system forms a dense, uniform coating of metallic oxide or other material on a relatively large substrate of metal foil or other composition located a substantial distance from the plasma gun so that the plasma stream covers the entire width of the substrate. A large pressure differential between the pressure inside the plasma gun and the ambient pressure outside of the plasma gun creates a shock pattern within the exiting plasma stream so as to disperse the plasma stream and maintain a high energy level therein, as well as thoroughly mixing a coating material introduced into the plasma stream within the gun. Mixing of the coating material within the plasma stream is further enhanced by introducing the coating material into the plasma stream either in liquid form or in the form of very small particles. In one arrangement, the plasma stream is delivered in a long, narrow configuration across the width of the substrate by a nozzle with a slit-like opening at the lower end of the plasma gun. In still other arrangements, a plasma stream of elongated configuration is provided by a plasma gun of elongated configuration having an elongated cathode assembly disposed within the hollow interior of an elongated anode having a nozzle-forming slot therein. Arc gas introduced into the space between the cathode and adjacent portions of the anode flows out of the slot to form a broad plume plasma stream, in conjunction with spray material introduced in powder form into the spaces between the cathode and the opposite portions of the anode along the length of the plasma gun. The cathode assembly may be of integral construction along the length of the anode, or it may be divided into plural segments disposed in spaced-apart relation along the length of the anode.

Claims

1. A method of forming a coating on a substrate with a plasma gun, comprising the steps of:

providing a plasma gun and a substrate;

operating the plasma gun to produce a plasma stream which flows from the plasma gun to the substrate, the step of operating including introducing a plasma gas into the plasma gun to establish plasma gas operating conditions;

introducing coating material into the plasma stream within the plasma gun so that the coating material is carried by the plasma stream to the substrate to form a coating on the substrate;

providing an ambient pressure outside of the plasma gun and an internal pressure within the plasma gun which is substantially larger than and forms a relatively large ratio with the ambient pressure; and

providing the plasma gun with an exit configuration for the plasma stream through an opening which, for the plasma gas, plasma gas operating conditions and the ratio of the internal pressure with the ambient pressure, causes the plasma to undergo substantial expansion, with accompanying shock waves and turbulence, as the plasma stream exits the plasma gun, so that enough energy is contained in the plasma stream to provide a relatively uniform coating of the coating material on the substrate, over a region of the substrate many times wider than the width of the opening of the plasma gun.

2. A method in accordance with claim 1, wherein the step of providing a pressure differential comprises providing an ambient pressure of 10-0.001 Torr. outside of the plasma gun.

3. A method in accordance with claim 1, wherein the step of providing a pressure differential comprises providing a pressure inside the plasma gun of 1-100 atm.

4. A method in accordance with claim 1, wherein the step of introducing coating material comprises introducing powder particles no greater than 10 microns in size into the plasma stream within the plasma gun.

5. A method in accordance with claim 1, wherein the substrate comprises an elongated strip of material having a generally uniform width thereacross and the plasma stream extends across the width of the substrate at a fixed location, and comprising the further step of continuously advancing the elongated strip comprising the substrate through the fixed location.

6. A method in accordance with claim 1, wherein the plasma gun has an internal throat upstream of the opening and the step of providing the plasma gun with an exit configuration comprises, for a given cross-sectional area of the internal throat, providing the opening with a cross-sectional area which expands the plasma stream to a sufficient extent to create a substantial shock wave in the plasma stream as it exits the opening.

7. A method in accordance with claim 1, wherein the step of providing the plasma gun with an exit configuration comprises, for the plasma gas, plasma gas operating conditions and the ratio of the internal pressure with the ambient pressure, determining an ideal exit configuration of the plasma gun which provides relatively smooth, aerodynamic flow of the plasma stream from the plasma gun, and providing the plasma gun with an exit configuration substantially different from the given exit configuration to produce a plasma stream which undergoes substantial expansion, with accompanying shock waves and turbulence, as the plasma stream exits the plasma gun.

8. A method in accordance with claim 1, wherein the exit configuration is defined by the ratio of an area of an exit of the plasma gun to an area of a throat upstream of the exit.

9. A method of operating a plasma system comprising the steps of:

operating a plasma gun to produce a plasma stream, the plasma gun having a flow path with an exit configuration from an internal throat through and opening downstream of the internal throat where the plasma stream exits the plasma gun;

providing an ambient pressure of 10-0.001 Torr. outside of the plasma gun;

providing an internal pressure within the plasma gun which is substantially greater than the ambient pressure outside of the plasma gun, to provide a relatively large ratio of internal pressure to ambient pressure;

introducing a plasma gas into the plasma gun to establish plasma gas operating conditions; and

for the ratio of internal pressure to ambient pressure, the plasma gas and the plasma gas operating conditions, determining an ideal exit configuration of the flow path which provides smooth, aerodynamic flow of the plasma stream from the plasma gun, and then providing the plasma gun with an exit configuration substantially different from the ideal exit configuration to produce a plasma stream which undergoes substantial expansion, with accompanying shock waves and turbulence, as the plasma stream exits the plasma gun.

10. A method in accordance with claim 9, wherein the plasma gun has a nozzle exit with a cross-sectional area forming an area ratio with a cross-sectional area of the internal throat, and the step of determining an ideal exit configuration comprises the steps of:

for the ratio of internal pressure to ambient pressure, the plasma gas and the plasma gas operating conditions, determining an optimum area ratio of the cross-sectional area of the internal throat of the plasma gun to the cross-sectional area of the nozzle exit of the plasma gun which produces natural expansion of the plasma stream as it exits the nozzle exit; and

having determined the optimum area ratio, configuring the flow path of the plasma gun to have an area ratio substantially less than the optimum area ratio.

11. A method in accordance with claim 9, wherein the step of providing an internal pressure within the plasma gun comprises providing an internal pressure of 1-100 atm.

12. A method in accordance with claim 9, comprising the further step of introducing powder particles no greater in size than approximately 10 microns into the plasma stream within the plasma gun.

13. A method in accordance with claim 9, wherein the substrate is provided in the form of an elongated strip of material having a generally uniform width thereacross, and comprising the further steps of positioning the substrate so that the plasma steam extends across the width of the substrate at a fixed location, and continuously advancing the substrate through the fixed location.

14. A method of operating a plasma system comprising the steps of:

operating a plasma gun to produce a plasma stream, the plasma gun having a flow path with a given exit configuration having an opening through which the plasma stream exits the plasma gun;

providing an internal pressure within the plasma gun which is substantially greater than the ambient pressure outside of the plasma gun, to provide a relatively large ratio of internal pressure to ambient pressure;

introducing a plasma gas into the plasma gun to establish plasma gas operating conditions;

for a given exit configuration, determining an ideal ratio of internal pressure to ambient pressure which provides relatively smooth, aerodynamic flow of the plasma stream from the plasma gun; and

operating the plasma gun with a ratio of internal pressure to ambient pressure sufficiently different from the ideal ratio so that the plasma stream undergoes substantial expansion, with accompanying shock waves and turbulence, as the plasma stream exits the plasma gun.

15. A method in accordance with claim 14, wherein the given exit configuration is defined by the ratio of an area of the opening to an area of a throat upstream of the exit.