Method for producing semiconductor substrate

• US 5,854,123 A
• Filed: 10/07/1996
• Issued: 12/29/1998
• Est. Priority Date: 10/06/1995
• Status: Expired due to Term

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Sakaguchi, Kiyofumi, Sato, Nobuhiko, Yonehara, Takao
• Primary Examiner(s): Bowers, Jr., Charles L.
• Assistant Examiner(s): CHRISTIANSON, KEITH ALAN
• Application Number:
  US08/729,722
• Time in Patent Office: 813 Days
• Field of Search: 437/21, 437/228, 437/233, 437/247, 156/628.1, 148/DIG. 12, 438/478, 438/507
• US Class Current: 438/507
• CPC Class Codes: H01L 21/02032 by reclaiming or re-processing
• CPC Class Codes: H01L 21/3221 of silicon bodies, e.g. for gettering
• CPC Class Codes: H01L 21/3223 using cavities formed by hydrogen or noble gas ion implantation
• CPC Class Codes: H01L 21/3226 of silicon on insulator
• CPC Class Codes: H01L 21/76251 using bonding techniques
• CPC Class Codes: H01L 21/76254 with separation/delamination along an ion implanted layer, e.g. Smart-cut, Unibond
• CPC Class Codes: H01L 21/76259 with separation/delamination along a porous layer
• CPC Class Codes: H01L 31/1892 methods involving the use of temporary, removable substrates
• CPC Class Codes: Y02E 10/50 Photovoltaic [PV] energy

Abstract

A method is provided for producing, with high reproducibility, an SOI substrate which is flat and high in quality, and simultaneously for achieving resources saving and reduction in cost through recycling of a substrate member. For accomplishing this, a porous-forming step is performed forming a porous Si layer on at least a surface of an Si substrate and a large porosity layer forming step is performed for forming a large porosity layer in the porous Si layer. This large porosity layer forming step is performed by implanting ions into the porous Si layer with a given projection range or by changing current density of anodization in said porous-forming step. At this time, a non-porous single-crystal Si layer is epitaxial-grown on the porous Si layer. Thereafter, the surface of the porous Si layer and a support substrate are bonded together, and then separation is performed at the porous Si layer with the large porosity. Subsequently, selective etching is performed to remove the porous Si layer.

Claims

1. A semiconductor substrate producing method comprising:

forming a first porous Si layer on at least one surface of a Si substrate; and

forming a second layer having a larger porosity than the first porous Si layer at a constant depth from a surface of said porous Si in said first porous Si layer.

2. The semiconductor substrate producing method according to claim 1, wherein said second layer forming step comprises implanting ions into said first porous Si layer with a given projection range.

3. The semiconductor substrate producing method according to claim 2, further comprising a non-porous layer forming step for forming a non-porous layer on a surface of said first porous layer before said ion implanting step.

4. The semiconductor substrate producing method according to claim 2, wherein said ions comprise at least one kind of noble gas, hydrogen and nitrogen.

5. The semiconductor substrate producing method according to claim 3, further comprising a bonding step for bonding said non-porous layer and a support substrate together;

and a separating step for separating said Si substrate into two portions at said second layer.

6. The semiconductor substrate producing method according to claim 5, wherein said separating step is performed by heat-treating said Si substrate.

7. The semiconductor substrate producing method according to claim 5, wherein said separating step is performed by pressurizing said Si substrate in a direction perpendicular to a surface thereof.

8. The semiconductor substrate producing method according to claim 5, wherein said separating step is performed by drawing said Si substrate in a direction perpendicular to a surface thereof.

9. The semiconductor substrate producing method according to claim 5, wherein said separating step is performed by applying a shearing force to said Si substrate.

10. The semiconductor substrate producing method according to claim 3, wherein said non-porous layer is made of single-crystal Si.

11. The semiconductor substrate producing method according to claim 3, wherein said non-porous layer is made of single-crystal Si having an oxidized Si layer on a surface to be bonded.

12. The semiconductor substrate producing method according to claim 3, wherein said non-porous layer is made of a single-crystal compound semiconductor.

13. The semiconductor substrate producing method according to claim 5, wherein said support substrate is an Si substrate.

14. The semiconductor substrate producing method according to claim 5, wherein said support substrate is an Si substrate having an oxidized Si layer on a surface to be bonded.

15. The semiconductor substrate producing method according to claim 5, wherein said support substrate is a light transmittable substrate.

16. The semiconductor substrate producing method according to claim 5, wherein said bonding step is performed by anode bonding, pressurization, heat treatment or a combination thereof.

17. The semiconductor substrate producing method according to claim 5, further comprising a porous Si removing step, after said separating step, for removing the porous Si layer exposed on a surface of said support substrate and exposing said non-porous layer.

18. The semiconductor substrate producing method according to claim 17, wherein said porous Si removing step is performed by electroless wet etching using at least one liquid selected from the group consisting of hydrofluoric acid, a mixed liquid obtained by adding at least one of alcohol and hydrogen peroxide to hydrofluoric acid, buffered hydrofluoric acid, and a mixed liquid obtained by adding at least one of alcohol and hydrogen peroxide to buffered hydrofluoric acid.

19. The semiconductor substrate producing method according to claim 17, further comprising a flattening step for flattening a surface of said non-porous layer after said porous Si removing step.

20. The semiconductor substrate producing method according to claim 19, wherein said flattening step is performed by heat treatment in the atmosphere including hydrogen.

21. The semiconductor substrate producing method according to claim 5, wherein said step of forming a first porous Si layer forms porous Si layers on both sides of said Si substrate, and said bonding step bonds two support substrates to said porous Si layers formed on both sides of said Si substrate.

22. The semiconductor substrate producing method according to claim 5, further comprising a second non-porous layer forming step, after said separating step, for forming non-porous layer again on the surface of said porous Si layer, and a second ion implanting step, after said second non-porous layer forming step, for implanting ions into said porous Si layer with a given projection range and forming said second layer in said porous Si layer.

23. The semiconductor substrate producing method according to claim 1, wherein said step of forming a first porous Si layer is performed by anodization.

24. The semiconductor substrate producing method according to claim 23, wherein said anodization is performed in an HF solution or a mixture of an HF solution and alcohol.

25. The semiconductor substrate producing method according to claim 1, wherein said second layer forming step is performed by changing a current density of anodization in said step of forming a first porous Si layer.

26. A semiconductor substrate producing method comprising:

forming on a surface of a Si substrate a first porous Si layer, a second porous Si layer and a third porous Si layer, wherein the second porous Si layer is located under the first porous Si layer and has a porosity higher than the first porous Si layer, and the third porous Si layer is located under the second porous Si layer and has a porosity lower than the second porous Si layer;

forming a non-porous monocrystalline semiconductor layer on the first porous Si layer;

bonding the non-porous monocrystalline semiconductor layer located on the Si substrate to another substrate; and

separating the Si substrate and the other substrate at the second porous Si layer so that the non-porous monocrystalline semiconductor layer remains on the other substrate.

27. The semiconductor substrate producing method according to claim 26, wherein said forming step for forming said first, second and third porous Si layers comprises a step for turning a surface portion of said Si substrate porous.

28. The semiconductor substrate producing method according to claim 27, wherein said second porous Si layer is formed by means of ion implantation.

29. The semiconductor substrate producing method according to claim 26, wherein said non-porous monocrystalline semiconductor layer is formed by epitaxial growth.

30. The semiconductor substrate producing method according to claim 26, wherein said bonding step is conducted after forming an insulating layer on a surface of said non-porous monocrystalline semiconductor layer.

31. The semiconductor substrate producing method according to claim 26, wherein said second porous Si layer is formed by implanting ions after forming said non-porous monocrystalline semiconductor layer through epitaxial growth.

32. A semiconductor substrate producing method comprising:

forming on a surface of a Si substrate a first porous Si layer;

implanting ions into the first porous Si layer to form a second porous Si layer having a porosity higher than the first porous Si layer at a constant depth from a surface of the first porous Si layer;

forming a non-porous monocrystalline semiconductor layer on the first porous Si layer;

bonding the non-porous monocrystalline semiconductor layer located on the Si substrate to another substrate; and

separating the Si substrate and the other substrate at the second porous Si layer so that the non-porous monocrystalline semiconductor layer remains on the other substrate.

33. The semiconductor substrate producing method according the claim 32, wherein said forming step for forming said first porous Si layer comprises a step for turning a surface portion of said Si substrate porous.

34. The semiconductor substrate producing method according to claim 32, wherein said non-porous monocrystalline semiconductor layer is formed by epitaxial growth.

35. The semiconductor substrate producing method according to claim 32, wherein said bonding step is conducted after forming an insulating layer on a surface of said non-porous monocrystalline semiconductor layer.

36. The semiconductor substrate producing method according to claim 32, wherein said second porous Si layer is formed by conducting said ion implantation after forming said non-porous monocrystalline semiconductor layer through epitaxial growth.