Method of protecting surfaces on diamond, diamondlike carbon or carbon

• US 5,855,967 A
• Filed: 10/23/1997
• Issued: 01/05/1999
• Est. Priority Date: 11/29/1995
• Status: Expired due to Term

• Current Assignee: Lumentum Operations, LLC (Lumentum Holdings Inc.)
• Original Assignee: Epion Corporation (Tokyo Electron Limited)
• Inventors: Kirkpatrick, Allen R.
• Primary Examiner(s): PIANALTO, BERNARD D
• Application Number:
  US08/959,114
• Time in Patent Office: 439 Days
• Field of Search: 427/526, 427/527, 427/530, 427/531, 427/397.1, 427/376.1, 427/372.2, 427/249, 427/255.4, 427/399, 427/113, 427/122, 427/523
• US Class Current: 427/527
• CPC Class Codes: C04B 41/0027 Ion-implantation, ion-irradiation or ion-injection
• CPC Class Codes: C04B 41/52 Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
• CPC Class Codes: C04B 41/80 of only ceramics
• CPC Class Codes: C04B 41/89 for obtaining at least two superposed coatings having different compositions
• CPC Class Codes: C23C 14/0605 Carbon
• CPC Class Codes: C23C 14/0611 Diamond
• CPC Class Codes: C23C 14/48 Ion implantation
• CPC Class Codes: C23C 14/5833 Ion beam bombardment
• CPC Class Codes: C23C 16/26 Deposition of carbon only
• CPC Class Codes: C23C 16/56 After-treatment

Abstract

This invention concerns a method for protecting surfaces of diamond, diamondlike carbon and of other forms of carbon, from the effects of oxidation which can occur at high temperatures in an oxidizing environment. The method involves exposing the surface of the diamond or other carbon material to energetic ions of, or containing, an element or elements which can be caused to react with the carbon to form a thin layer containing a carbide compound that is itself more oxidation resistant than the diamond or other carbon material and which is able to serve as a barrier to prevent or delay penetration of oxygen to the thereby protected diamond or other carbon material.

Claims

1. A method of protecting diamond, diamondlike carbon, or other carbon materials from high temperature oxidation, including the steps of:

providing an item of diamond, diamondlike carbon or other carbon materials or of other materials coated by diamond, diamondlike carbon or other carbon materials;

ion implanting said item with ions of a reactive material that reacts with carbon to form a compound that is more oxidation-resistant than the diamond, diamondlike carbon or other carbon material, for introducing said ions into said item; and

heating said item during and/or after said exposing step, to react said ions with the carbon of said item and form a layer of said compounds in said item, for oxidation-protecting said item;

wherein said layer of said compound includes, at is maximum, a concentration of said reactive material of at least 10% of the stoichiometric concentration, to create an oxidation-resistant barrier layer which substantially prevents the underlying diamond, diamondlike carbon or other carbon material from oxidizing.

2. The oxidation protection method of claim 1 in which said material reacts with carbon to form a carbide.

3. The oxidation protection method of claim 2 in which said material is silicon.

4. The oxidation protection method of claim 3 in which said item is made of diamond.

5. The oxidation protection method of claim 1 in which said ion is selected from the group of ions consisting of silicon, titanium, tantalum, tungsten, zirconium, vanadium, molybdenum, niobium and boron.

6. The oxidation protection method of claim 1 in which the step of implanting said ions into said item includes providing ions at an energy of 1 keV up to 10 MeV.

7. The oxidation protection method of claim 6 in which said ions are provided at an ion energy of between 5 keV and 400 keV.

8. The oxidation protection method of claim 1 in which the step of implanting said ions into said item includes providing an ion dose of from 10¹⁵ to 10¹⁹ ions per cm².

9. The oxidation protection method of claim 8 in which said ion dose is from 10⁶ to 3×

10¹⁸ ions per cm².

10. The oxidation protection method of claim 1 in which the step of heating said item during said ion implanting step includes heating said item to at least 400°

C.

11. The oxidation protection method of claim 1 in which the step of ion implanting includes implanting at a dose of at least 10¹⁷ ions per cm².

12. The oxidation protection method of claim 1 further including depositing on a surface of said item a refractory metal oxide coating to decrease the reflectivity of said item.

13. A method of protecting diamond, diamondlike carbon or other carbon material, or of other materials coated by diamond, diamondlike carbon or other carbon materials, from high-temperature oxidation, including the steps of:

providing an item of diamond, diamondlike carbon or other carbon material, or of other materials coated by diamond, diamondlike carbon or other carbon material;

ion implanting said item with silicon ions at an ion energy of from 5 keV to 400 keV, and an ion dose of 10¹⁷ to 3×

10¹⁸ ions per cm² ; and

heating said item, during and/or after said ion implanting step, to at least 400°

C., to form a silicon carbide layer in said item having a maximum silicon concentration of at least 10% of the stoichiometric silicon concentration in silicon carbide, to create an oxidation-resistant silicon carbide layer which substantially prevents the underlying diamond, diamondlike carbon or other carbon material from oxidizing, for protecting said item from high temperature oxidation.