Semiconductor device including active matrix circuit

• US 5,856,689 A
• Filed: 10/31/1997
• Issued: 01/05/1999
• Est. Priority Date: 06/13/1994
• Status: Expired due to Term

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Suzawa, Hideomi
• Primary Examiner(s): Ngo , Ngan V.
• Application Number:
  US08/961,807
• Time in Patent Office: 431 Days
• Field of Search: 257/59, 257/71, 257/72, 257/296, 257/379
• US Class Current: 257/296
• CPC Class Codes: H01L 27/124 with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits wiring structures per se H01L23/52
• CPC Class Codes: H01L 27/1255 integrated with passive devices, e.g. auxiliary capacitors
• CPC Class Codes: H01L 29/78621 with LDD structure or an extension or an offset region or characterised by the doping profile
• CPC Class Codes: Y10S 257/90 MOSFET type gate sidewall insulating spacer

Abstract

There is provided a combination of doping process and use of side walls which allows the source and drain of a thin film transistor of an active matrix circuit to be doped with only one of N-type and P-type impurities and which allows the source and drain of a thin film transistor used in a peripheral circuit of the same conductivity type as that of the thin film transistor of the active matrix circuit to include both of N-type and P-type impurities. Also, a thin film transistor in an active matrix circuit has offset regions by using side walls, and another thin film transistor in a peripheral circuit has a lightly doped region by using side walls.

Claims

1. An active matrix device comprising:

a pixel electrode provided over a substrate;

at least two thin film transistors formed over said substrate, said thin film transistors connected to said pixel electrode in series, each thin film transistor comprising a semiconductor layer including at least a channel forming a region, a pair of impurity regions, a pair of lightly doped regions interposed between said channel forming region and said pair of impurity regions; and

at least one auxiliary capacitor formed between said pixel electrode and a capacitor forming electrode.

2. The device according to claim 1 wherein said capacitor forming electrode is kept at a constant voltage.

3. An active matrix device comprising:

a pixel electrode provided over a substrate;

a capacitor forming electrode provided between said substrate and said pixel electrode;

at least two thin film transistors formed over said substrate, said thin film transistors connected to said pixel electrode in series, each thin film transistor comprising a semiconductor layer including at least a channel forming region and a pair of impurity regions, and a gate electrode adjacent to said semiconductor layer with a gate insulating film interposed therebetween;

side wall insulators provided at least side surfaces of said gate electrodes and said capacitor forming electrode, respectively;

an interlayer insulating film over said gate electrodes and said capacitor forming electrode; and

at least one auxiliary capacitor formed between said pixel electrode and said capacitor forming electrode with said interlayer insulating film therebetween.

4. A device according to claim 3 wherein said gate electrode is provided over said semiconductor layer.

5. An active matrix device comprising:

a pixel electrode formed over a substrate;

a capacitor forming electrode formed between said substrate and pixel electrode;

at least two thin film transistors connected to said pixel electrode in series, each of thin film transistors comprising a semiconductor layer comprising at least a channel forming region and source and drain regions, and a gate electrode provided adjacent to said semiconductor layer with an insulating film interposed therebetween;

a gate line connected to each of said gate electrodes of said thin film transistors;

a signal line connected to one of said source regions of said thin film transistors connected in series,

wherein an auxiliary capacitor is formed between said semiconductor layer and said capacitor forming electrode.

6. A device according to claim 5 wherein said gate electrode is provided over said semiconductor layer.

7. An active matrix device comprising:

a semiconductor layer formed over a substrate;

at least first and second thin film transistors formed with said semiconductor film, each of which includes a channel forming region in said semiconductor layer and a gate electrode adjacent to said channel forming region;

pixel electrode formed over said substrate;

a signal line formed over substrate, electrically connected to said pixel electrode through said first and second thin film transistors in series;

a capacitor forming electrode formed adjacent to a portion of said semiconductor layer to form a capacitor therebetween, wherein said portion of said semiconductor layer has a same conductivity type as said channel forming region.

8. A device according to claim 7 wherein said gate electrode is provided over said semiconductor layer.

9. An active matrix circuit comprising:

a pixel electrode formed over a substrate;

a capacitor forming electrode formed between said substrate and pixel electrode;

at least two thin film transistors connected to said pixel electrode in series, each thin film transistors comprising a semiconductor layer comprising at least a channel forming region, source and drain regions, and a gate electrode provided adjacent to said semiconductor layer with an insulating film interposed therebetween;

a gate line connected to each of said gate electrodes of said thin film transistors;

a signal line connected to one of said source regions of said thin film transistors connected in series,

wherein a first capacitor is formed between said semiconductor layer and said capacitor forming electrode and a second capacitor is formed between said capacitor forming electrode and said pixel electrode.

10. A device according to claim 9 wherein said gate electrode is provided over said semiconductor layer.

11. A semiconductor device comprising:

a plurality of thin film transistors over a substrate having an insulating surface, one of said thin film transistor comprising;

a semiconductor layer formed on said insulating surface, said semiconductor layer comprising at least a channel forming region and source and drain regions;

a gate electrode provided adjacent to said semiconductor layer with a gate insulating layer interposed therebetween, said gate electrode having an anodic oxide film and side wall insulators on at least side surfaces thereof;

at least one first interlayer insulating film formed over said gate electrode;

a wiring formed on said first interlayer insulating film, said wiring connected to said semiconductor layer; and

at least one second interlayer insulating film formed over said first interlayer insulating film and said wiring,

wherein said source and drain regions of said thin film transistor comprise both boron ions and phosphorous ions and concentration of phosphorous therein is larger than that of boron ions.

12. A device according to claim 11 wherein said gate electrode is provided over said semiconductor layer.