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Work transporting robot and semiconductor device manufacturing apparatus

  • US 5,857,826 A
  • Filed: 01/22/1997
  • Issued: 01/12/1999
  • Est. Priority Date: 01/25/1996
  • Status: Expired due to Term
First Claim
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1. A work transporting robot comprising,first, second and third arms each of which is rotationally moved within a plane around a common axis by an individual driving source, the planes being parallel to one another,a first pair of coupled arms with ends which are coupled together, said first pair of coupled arms being rotatably connected at one end to the second arm and connected at the other end to the first arm,a first work supporting table which is connected to the coupled ends of the first pair of coupled arms,a second pair of coupled arms with ends which are coupled together, said second pair of coupled arms being rotatably connected at one end to the second arm and connected at the other end to the third arm,a second work supporting table which is connected to the coupled ends of the second pair of coupled arms,the first and third arms both being movable to positions located on a same side of a plane which includes the axis and the second arm.

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