Work transporting robot and semiconductor device manufacturing apparatus
First Claim
1. A work transporting robot comprising,first, second and third arms each of which is rotationally moved within a plane around a common axis by an individual driving source, the planes being parallel to one another,a first pair of coupled arms with ends which are coupled together, said first pair of coupled arms being rotatably connected at one end to the second arm and connected at the other end to the first arm,a first work supporting table which is connected to the coupled ends of the first pair of coupled arms,a second pair of coupled arms with ends which are coupled together, said second pair of coupled arms being rotatably connected at one end to the second arm and connected at the other end to the third arm,a second work supporting table which is connected to the coupled ends of the second pair of coupled arms,the first and third arms both being movable to positions located on a same side of a plane which includes the axis and the second arm.
1 Assignment
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Accused Products
Abstract
A work transporting robot includes a first, second and third arms each of which is rotationally moved around a common axis by individual driving source within a plane, the plane being parallel to one another, a pair of first coupled arms each of which is rotatably connected its one end to a leading edge section of the second arm which is disposed intermediate position of the first and third arms, and a leading edge section of one of the first and third arms, a first work supporting table which is connected to the other end of the pair of first coupled arms, a pair of second coupled arms each of which is rotatably connected its one end to a leading edge section of the second arm which is disposed intermediate position of the first and third arms, and a leading edge section of the other of the first and third arms, and a second work supporting table which is connected to the other end of the pair of second coupled arms, and wherein the first and third arms are disposed in the same side to one another with respect to a plane which includes the axis and the second arm.
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Citations
8 Claims
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1. A work transporting robot comprising,
first, second and third arms each of which is rotationally moved within a plane around a common axis by an individual driving source, the planes being parallel to one another, a first pair of coupled arms with ends which are coupled together, said first pair of coupled arms being rotatably connected at one end to the second arm and connected at the other end to the first arm, a first work supporting table which is connected to the coupled ends of the first pair of coupled arms, a second pair of coupled arms with ends which are coupled together, said second pair of coupled arms being rotatably connected at one end to the second arm and connected at the other end to the third arm, a second work supporting table which is connected to the coupled ends of the second pair of coupled arms, the first and third arms both being movable to positions located on a same side of a plane which includes the axis and the second arm.
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4. A work transporting robot comprising,
first and second arms each of which is rotationally moved within a plane around a common axis by an individual driving source, the planes being parallel to one another, the first and second arms each having first and second arm sections which extend from a central section which is at said axis, said arm sections of said first arm having lengths which are different from the lengths of the arm sections of the second arm, and a first pair of coupled arms, one of which is rotatably connected to a first arm portion of the first arm and a another of which is rotatably connected to a first arm portion of the second arm, said arms of said first pair of coupled arms being connected to one another, and a work supporting table connected to one of the first pair of coupled arms, a second pair of coupled arms, one of which is connected to a second arm portion of the first arm and the other of which is connected to a second arm portion of the second arm, said second pair of coupled arms being connected to one another, and a work supporting table connected to one of the second pair of coupled arms.
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7. A semiconductor device manufacturing apparatus comprising,
a central chamber, a plurality of process chambers each of which is disposed at a predetermined position of the central chamber, and a work transporting robot which is in the central chamber, said work transporting robot including: -
first, second and third arms each of which is rotationally moved within a plane around a common axis by an individual driving source, the planes being parallel to one another, a first pair of coupled arms with ends which are coupled together, said first pair of coupled arms being rotatably connected at one end to the second arm and connected at the other end to the first arm, a first work supporting table which is connected to the coupled ends of the first pair of coupled arms, a second pair of coupled arms with ends which are coupled together, said second pair of coupled arms being rotatably connected at one end to the second arm and connected at the other end to the third arm, a second work supporting table which is connected to the coupled ends of the second pair of coupled arms, the first and third arms both being movable to positions located on a same side of a plane which includes the axis and the second arm.
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8. A semiconductor device manufacturing apparatus comprising,
a central chamber, a plurality of process chambers each of which is disposed at a predetermined position of the central chamber, a work transporting robot which is in the central chamber, said work transporting robot including: -
first and second arms each of which is rotationally moved within a plane around a common axis by an individual driving source, the planes being parallel to one another, the first and second arms each having first and second arm sections which extend from a central section which is at said axis, said arm sections of said first arm having lengths which are different from the lengths of the arm sections of the second arm, and a first pair of coupled arms, one of which is rotatably connected to a first arm portion of the first arm and a another of which is rotatably connected to a first arm portion of the second arm, said arms of said first pair of coupled arms being connected to one another, and a work supporting table connected to one of the first pair of coupled arms, a second pair of coupled arms, one of which is connected to a second arm portion of the first arm and the other of which is connected to a second arm portion of the second arm, said second pair of coupled arms being connected to one another, and a work supporting table connected to one of the second pair of coupled arms.
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Specification