Apodizing filter system useful for reducing spot size in optical measurements and other applications
First Claim
1. A method for measuring a sample, including the steps of:
- focusing radiation from a source into a sampling beam directed at the sample;
detecting radiation of the sampling beam that has been modified by a portion of the sample, said portion defining a measurement spot; and
apodizing radiation that is from the source, wherein said detecting step detects radiation that has been apodized in the apodizing step, to reduce size of the measurement spot.
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Accused Products
Abstract
Because of diffraction effects caused by slits or apertures in optical measurement systems, the radiation energy which is directed towards a particular region on a sample will be spread over a larger area than desirable. By employing an apodizing filter in the radiation path in such system, diffraction tails of the system will be reduced. The apodizing filter preferably has a pattern of alternating high transmittance areas and substantially opaque areas where the locally averaged transmittance function is an apodizing function. In the preferred embodiment, the locally averaged transmittance function varies smoothly and monotonically from the periphery to the center of the filter.
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Citations
69 Claims
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1. A method for measuring a sample, including the steps of:
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focusing radiation from a source into a sampling beam directed at the sample; detecting radiation of the sampling beam that has been modified by a portion of the sample, said portion defining a measurement spot; and apodizing radiation that is from the source, wherein said detecting step detects radiation that has been apodized in the apodizing step, to reduce size of the measurement spot. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 37, 38, 39, 40, 41)
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18. An apparatus for measuring a sample, including:
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a source which emits radiation; means for focusing radiation from the source into a sampling beam to the sample; means for detecting radiation of the sampling beam that has been modified by a portion of the sample, said portion defining a measurement spot; and means for apodizing radiation that is from the source, wherein said detecting means detects radiation that has been apodized by the apodizing means, to reduce size of the measurement spot. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 42)
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- 43. An apodizing filter comprising a plate having a two dimensional pattern of alternating high transmittance areas and substantially opaque areas, said pattern having a locally averaged transmittance function that is an apodizing function.
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59. A radiation imaging system with improved resolution, comprising:
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means for focusing radiation from an object surface to a focal surface; an apodizer positioned in a radiation path between the object surface and the focal surface, said apodizer having a two dimensional pattern of alternating high transmittance areas and substantially opaque areas, said pattern having a locally averaged transmittance function that is an apodizing function; and a filter in the radiation path following the apodizer, said filter blocking scattered radiation that is generated by, or passed by, the apodizer; wherein radiation transmitted through the apodizer and the filter along said radiation path comprises image radiation, said image radiation having a diffraction point spread function;
wherein the apodizer reduces tails of the point spread function relative to that of a clear, unapodized aperture. - View Dependent Claims (60, 61)
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62. A method for measuring ellipsometric parameters of a sample, including the steps of:
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focusing polarized broadband radiation from a source into a sampling beam directed at the sample; separating into wavelength components radiation of the sampling beam that has been modified by a portion of the sample, said portion defining a measurement spot; detecting the wavelength components to provide outputs; and determining from the outputs changes of polarized state caused by the sample; and apodizing radiation that is from the source, wherein said detecting step detects radiation that has been apodized in the apodizing step, to reduce size of the measurement spot. - View Dependent Claims (63, 64, 65)
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66. An apparatus for measuring ellipsometric parameters of a sample, including the steps of:
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means for focusing polarized broadband radiation from a source into a sampling beam directed at the sample; means for separating into wavelength components radiation of the sampling beam that has been modified by a portion of the sample, said portion defining a measurement spot; a detector detecting the wavelength components to determine changes of polarized state caused by the sample; and an apodizer that apodizes radiation that is from the source and that is detected by the detector to reduce size of the measurement spot. - View Dependent Claims (67, 68, 69)
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Specification