Method for producing a layered piezoelectric element
First Claim
1. A method, of producing a layered piezoelectric element formed with at least two individually actuating portions, comprising the steps of:
- forming a stacked body where at least one layer of a piezoelectric material and at least two electrode layers of a conductive material are stacked alternatively in a first direction; and
forming at least one hole in the stacked body through an ultrasonic wave abrasive particle machining operation, each of the at least one hole extending at least in a part of the stacked body in the first direction so as to divide the stack body into at least two actuating portions which are individually deformable when electric fields are developed between corresponding areas of the at least two electrode layers.
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Accused Products
Abstract
In a method of manufacturing a layered piezoelectric element 38 constructed from alternately stacked piezoelectric ceramic layers 40 and internal electrode layers 42, 44 and having a plurality of fine actuator portions 46, wherein the layered piezoelectric element 38 deforming the actuator portions 46 in the direction in which they are stacked, slit-shaped holes 52 are formed using ultrasonic wave abrasive particle machining after sintering the stacked body of green sheets 50, 51. The holes 52 are formed as through holes in the layered piezoelectric element 38. The actuator portions 46 are formed so as to be connected by non-through-hole portions 48 at both ends.
40 Citations
23 Claims
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1. A method, of producing a layered piezoelectric element formed with at least two individually actuating portions, comprising the steps of:
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forming a stacked body where at least one layer of a piezoelectric material and at least two electrode layers of a conductive material are stacked alternatively in a first direction; and forming at least one hole in the stacked body through an ultrasonic wave abrasive particle machining operation, each of the at least one hole extending at least in a part of the stacked body in the first direction so as to divide the stack body into at least two actuating portions which are individually deformable when electric fields are developed between corresponding areas of the at least two electrode layers. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A method of manufacturing a layered piezoelectric element having at least a pair of internal electrodes with at least a portion divided into a plurality of actuator portions deformable when selectively energized to develop electric fields between the electrodes, the method comprising the steps of:
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forming a stacked body by pressing together alternately stacked piezoelectric layers of a piezoelectric material and electrode layers of a conductive material; and forming, using ultrasonic wave abrasive particle machining, holes in the stacked body to a depth in a direction in which the layers are stacked to divide the stacked body into actuator portions. - View Dependent Claims (19, 20, 21, 22, 23)
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Specification