Polishing apparatus

• US 5,860,847 A
• Filed: 09/06/1996
• Issued: 01/19/1999
• Est. Priority Date: 09/06/1995
• Status: Expired due to Fees

• Current Assignee: Ebara Corporation
• Original Assignee: Ebara Corporation, Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Inventors: Katsuoka, Seiji, Togawa, Tetsuji, Kodera, Masako, Nishi, Toyomi, Yajima, Hiromi, Sakurai, Kunihiko
• Primary Examiner(s): Morgan, Eileen P.
• Application Number:
  US08/708,948
• Time in Patent Office: 865 Days
• Field of Search: 451/8, 451/10, 451/11, 451/41, 451/285, 451/287, 451/288, 451/289, 437/225, 156/626
• US Class Current: 451/10
• CPC Class Codes: B24B 37/013 Devices or means for detecting lapping completion
• CPC Class Codes: B24B 37/04 designed for working plane surfaces
• CPC Class Codes: B24B 49/04 involving measurement of the workpiece at the place of grinding during grinding operation
• CPC Class Codes: B24B 49/16 taking regard of the load
• CPC Class Codes: H01L 22/26 Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement endpoint detection arrangements in CMP apparatus B24B37/013, in discharge apparatus H01J37/32

Abstract

A polishing apparatus has a turntable with an abrasive cloth mounted on an upper surface thereof and a top ring disposed above the turntable for supporting a workpiece to be polished against the abrasive cloth under predetermined pressure. The turntable is rotatable by a first motor through a timing pulley connected to the first motor, and the top ring is rotatable by a second motor through a timing pulley connected to the second motor. A torque detector incorporated in the timing pulley connected to at least one of the first motor and the second motor detects an output torque produced by the at least one of the first motor and the second motor.

Claims

1. A polishing apparatus comprising:

a turntable having mounted on an upper surface thereof an abrasive cloth;

a first motor having connected thereto a first timing pulley, said first motor being coupled to said turntable through said first timing pulley for rotating said turntable;

a top ring positioned above said turntable for supporting a workpiece to be polished against said abrasive cloth;

a second motor having connected thereto a second timing pulley, said second motor being coupled to said top ring through said second timing pulley for rotating said top ring;

at least one of said first motor and said second motor having an output shaft; and

a torque detector, incorporated between said output shaft and a respective at least one of said first timing pulley and said second timing pulley, operable to detect an output torque produced by said at least one of said first motor and said second motor.

2. A polishing apparatus as claimed in claim 1, wherein said first timing pulley has incorporated therein a first torque detector, and said second timing pulley has incorporated therein a second torque detector.

3. A polishing apparatus as claimed in claim 2, wherein said first motor includes a first output shaft extending into said first timing pulley, said first torque detector is interposed between said first output shaft and said first timing pulley, said second motor includes a second output shaft extending into said second timing pulley, and said second torque detector is interposed between said second output shaft and said second timing pulley.

4. A polishing apparatus as claimed in claim 1, wherein said out put shaft extends into said respective one of said first timing pulley and said second timing pulley, and said torque detector is interposed between said output shaft and said respective timing pulley.

5. A polishing apparatus as claimed in claim 4, wherein said torque detector comprises a boss fixed to said output shaft and rotatable therewith, a driven sleeve spaced radially outwardly of said boss and fixed to said respective timing pulley for rotation therewith, and a detector unit interposed radially between and connected to said boss and said driven sleeve.

6. A polishing apparatus as claimed in claim 5, wherein said detector unit includes a strain gage.

7. A polishing apparatus as claimed in claim 1, further comprising a dressing device positioned above said turntable for dressing said abrasive cloth, a third motor having connected thereto a third timing pulley, said third motor being coupled to said dressing device through said third timing pulley for rotating said dressing device, and said third timing pulley having incorporated therein another torque detector operable to detect an output torque produced by said third motor.

8. A polishing apparatus comprising:

a turntable having mounted on an upper surface thereof an abrasive cloth;

a top ring positioned above said turntable for supporting a workpiece to be polished against said abrasive cloth;

a motor for rotating one of said turntable or said top ring, said motor including an output shaft;

coupling means connected to said output shaft for transmitting rotation torque produced by said motor to said one of said turntable or said top ring; and

a torque detector, interposed between said output shaft and said coupling means, for detecting an output torque produced by said motor.

9. A polishing apparatus as claimed in claim 8, wherein said output shaft extends into said coupling means, and said torque detector is positioned between said output shaft and said coupling means.

10. A polishing apparatus as claimed in claim 9, wherein said torque detector comprises a boss fixed to said output shaft and rotatable therewith, a driven sleeve spaced radially outwardly of said boss and fixed to said coupling means for rotation therewith, and a detector unit interposed radially between and connected to said boss and said driven sleeve.

11. A polishing apparatus as claimed in claim 10, wherein said detector unit includes a strain gage.

12. A method for polishing a workpiece, :

said method comprising;

pressing said workpiece by a top ring against an abrasive cloth on an upper surface of a turntable;

transmitting rotation of an output shaft of a first motor to said turntable through a first coupling device mounted on said output shaft;

transmitting rotation of an output shaft of a second motor to said top ring through a second coupling device mounted on said output shaft of said second motor; and

detecting an output torque produced by at least one of said first motor and said second motor by a torque detector incorporated between said at least one of said first motor and said second motor and a respective at least one of said first coupling device and said second coupling device.

13. A method as claimed in claim 12, comprising detecting both an output torque produced by said first motor by a first torque detector incorporated between said first motor and said first coupling device and an output torque produced by said second motor by a second torque detector incorporated between said second motor and said second coupling device.

14. A method for detecting an end point of a polishing operation of polishing a workpiece, wherein said polishing operation includes pressing said workpiece by a top ring against an abrasive cloth on an upper surface of a turntable while rotating said turntable by transmitting rotation of an output shaft of a first motor to said turntable and rotating said top ring by transmitting rotation of an output shaft of a second motor to said top ring, said method comprising:

detecting an output torque produced by at least one of said first motor and said second motor by a torque detector incorporated between a respective at least one of said output shaft of said first motor and said output shaft of said second motor and a coupling device mounted thereon; and

detecting an occurrence of a change in the thus detected output torque indicative of an end point of said polishing operation.

15. A method as claimed in claim 14, comprising detecting both a first output torque produced by said first motor by a first torque detector incorporated between a first coupling device mounted on said output shaft of said first motor and a second output torque produced by said second motor by a second torque detector incorporated between a second coupling device mounted on said output shaft of said second motor, and detecting an occurrence of a change both of said first output torque and said second output torque as indicative of said end point of said polishing operation.