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Polishing apparatus

  • US 5,860,847 A
  • Filed: 09/06/1996
  • Issued: 01/19/1999
  • Est. Priority Date: 09/06/1995
  • Status: Expired due to Fees
First Claim
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1. A polishing apparatus comprising:

  • a turntable having mounted on an upper surface thereof an abrasive cloth;

    a first motor having connected thereto a first timing pulley, said first motor being coupled to said turntable through said first timing pulley for rotating said turntable;

    a top ring positioned above said turntable for supporting a workpiece to be polished against said abrasive cloth;

    a second motor having connected thereto a second timing pulley, said second motor being coupled to said top ring through said second timing pulley for rotating said top ring;

    at least one of said first motor and said second motor having an output shaft; and

    a torque detector, incorporated between said output shaft and a respective at least one of said first timing pulley and said second timing pulley, operable to detect an output torque produced by said at least one of said first motor and said second motor.

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