Integrated Silicon profilometer and AFM head
First Claim
1. A micromachined XY scanning stage comprising:
- an outer stage-base that is adapted to be held fixed with respect to a surface to be scanned;
an intermediate X-axis stage that is coupled to and supported from the stage-base by a plurality of flexures, at least one of the flexures coupling between said stage-base and said X-axis stage having a shear stress sensor formed therein for sensing stress in that flexure;
an inner Y-axis stage that is coupled to and supported from the X-axis stage by a plurality of flexures, at least one of the flexures coupling between said X-axis stage and said Y-axis stage having a shear stress sensor formed therein for sensing stress in that flexure;
said stage-base, X-axis stage, Y-axis stage, and flexures all being monolithically fabricated from a semiconductor single-crystal silicon layer of a substrate; and
sensing means supported by, and carried for X-axis and Y-axis translation by, said X-axis stage and Y-axis stage.
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Abstract
A topographic head for profilometry and AFM supports a central paddle by coaxial torsion bars projecting inward from an outer frame. A tip projects from the paddle distal from the bars. The torsion bars include an integrated paddle rotation sensor. A XY stage may carry the topographic head for X and Y axis translation. The XYZ stage'"'"'s fixed outer base is coupled to an X-axis stage via a plurality of flexures. The X-axis stage is coupled to a Y-axis stage also via a plurality of flexures. One of each set of flexures includes a shear stress sensor. A Z-axis stage may also be included to provide an integrated XYZ scanning stage. The topographic head'"'"'s frame, bars and paddle, and the XYZ stage'"'"'s stage-base, X-axis, Y-axis and Z-axis stages, and flexures are respectively monolithically fabricated by micromachining from a semiconductor wafer.
57 Citations
20 Claims
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1. A micromachined XY scanning stage comprising:
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an outer stage-base that is adapted to be held fixed with respect to a surface to be scanned; an intermediate X-axis stage that is coupled to and supported from the stage-base by a plurality of flexures, at least one of the flexures coupling between said stage-base and said X-axis stage having a shear stress sensor formed therein for sensing stress in that flexure; an inner Y-axis stage that is coupled to and supported from the X-axis stage by a plurality of flexures, at least one of the flexures coupling between said X-axis stage and said Y-axis stage having a shear stress sensor formed therein for sensing stress in that flexure;
said stage-base, X-axis stage, Y-axis stage, and flexures all being monolithically fabricated from a semiconductor single-crystal silicon layer of a substrate; andsensing means supported by, and carried for X-axis and Y-axis translation by, said X-axis stage and Y-axis stage. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification