Light-emitting semiconductor device using gallium nitride compound

• US 5,862,167 A
• Filed: 05/27/1997
• Issued: 01/19/1999
• Est. Priority Date: 07/19/1994
• Status: Expired due to Term

• Current Assignee: Hiroshi Amano, Isamu Akasaki, Research Development Corporation Of Japan (Japan Science And Technology Agency), Toyoda Gosei Company Limited (Toyota Motor Corporation)
• Original Assignee: Hiroshi Amano, Isamu Akasaki, Research Development Corporation Of Japan (Japan Science And Technology Agency), Toyoda Gosei Company Limited (Toyota Motor Corporation)
• Inventors: Amano, Hiroshi, Akasaki, Isamu, Koide, Norikatsu, Shibata, Naoki, Koike, Masayoshi, Sassa, Michinari, Yamazaki, Shiro, Umezaki, Junichi
• Primary Examiner(s): Lee, John D.
• Assistant Examiner(s): Song, Yisun
• Application Number:
  US08/863,397
• Time in Patent Office: 602 Days
• Field of Search: 372/44, 372/45, 372/96, 257/103, 257/98
• US Class Current: 372/45.01
• CPC Class Codes: H01L 33/105 with a resonant cavity structure
• CPC Class Codes: H01L 33/32 containing nitrogen
• CPC Class Codes: H01L 33/405 Reflective materials
• CPC Class Codes: H01L 33/465 with a resonant cavity structure
• CPC Class Codes: H01S 5/0207 Substrates having a special shape
• CPC Class Codes: H01S 5/0213 Sapphire, quartz or diamond based substrates
• CPC Class Codes: H01S 5/18375 based on metal reflectors
• CPC Class Codes: H01S 5/32341 blue laser based on GaN or GaP

Abstract

A light-emitting diode or laser diode is provided which uses a Group III nitride compound semiconductor satisfying the formula (Al_x Ga_1-x)_y In_1-y N, inclusive of 0≦x≦1, and 0≦y≦1. A double hetero-junction structure is provided which sandwiches an active layer between layers having wider band gaps than the active layer. The diode has a multi-layer structure which has either a reflecting layer to reflect emission light or a reflection inhibiting layer. The emission light of the diode exits the diode in a direction perpendicular to the double hetero-junction structure. Light emitted in a direction opposite to the light outlet is reflected by the reflecting film toward the direction of the light outlet. Further, the reflection inhibiting film, disposed at or near the light outlet, helps the release of exiting light by minimizing or preventing reflection. As a result, light can be efficiently emitted by the light-generating diode.

Claims

1. A gallium nitride Group compound semiconductor laser diode satisfying the formula (Al_X Ga_1-X)_Y In_1-Y N, inclusive of 0≦

X≦

1, and 0≦

Y≦

1, said laser diode comprising;

a substrate;

a multi-layer having a double hetero-junction structure sandwiching an active layer between layers having wider band gaps than said active layer formed on one of said substrate and a buffer layer fabricated on said substrate;

a first electrode layer made of a reflecting film and fabricated on a top layer of said multi-layer;

a second electrode layer made of a reflecting film, said second electrode layer being fabricated beneath a lowest layer of said multi-layer and being exposed in a hole of said substrate; and

wherein a combined structure comprising said first and second electrode layers and layers of said multi-layer sandwiched between said first and second electrode layers functions as a cavity of said semiconductor laser diode, and wherein a laser light exits from said laser diode in a direction perpendicular to said first and second electrode layers.

2. A laser diode according to claim 1, wherein said substrate is sapphire.

3. A light-emitting diode using Group III nitride compound material satisfying the formula (Al_X Ga_1-X)_Y In_1-Y N, inclusive of 0≦

X≦

1, and 0≦

Y≦

1, said light-emitting diode comprising;

a substrate;

a multi-layer having a double hetero-junction structure sandwiching an active layer between layers having wider band gaps than said active layer, said double hetero-junction structure being on one of said substrate and a buffer layer fabricated on said substrate;

a first electrode layer fabricated on a top layer of said multi-layer;

a second electrode layer made of a reflecting film, said second electrode layer being fabricated beneath a lowest layer of said multi-layer and being exposed in a hole of said substrate; and

wherein light exits from a side of said first electrode in a direction perpendicular to said first and second electrode layers.

4. A light-emitting diode according to claim 3, wherein said first electrode layer is transparent and a plane parallel to said second electrode layer.

5. A light-emitting diode according to claim 3, wherein said substrate is sapphire.