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Acceleration sensor having coaxially-arranged fixed electrode and movable electrode

  • US 5,864,064 A
  • Filed: 09/20/1996
  • Issued: 01/26/1999
  • Est. Priority Date: 09/22/1995
  • Status: Expired due to Fees
First Claim
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1. An acceleration sensor comprising:

  • a substrate;

    an anchor fixedly arranged on said substrate;

    a beam having one end integrated with said anchor, made of the same material as said anchor, and arranged approximately in parallel to a surface of said substrate to be elastically transformed;

    a cylindrical dead-weight movable electrode integrated with said beam, made of the same material as said anchor, held over said substrate with said dead-weight movable electrode separated from said substrate by a predetermined radial interval, provided with a detecting face on an approximately cylindrical side in a direction perpendicular to said substrate, and displaceable by applied acceleration in the direction parallel to the surface of said substrate;

    a fixed electrode fixedly arranged on said substrate, separated from said detecting face of said dead-weight movable electrode by a predetermined radial interval, and provided with a detected face on an approximately cylindrical side opposite to said detecting face; and

    detecting means for detecting said acceleration based upon the change of the distance between said detecting face of said dead-weight movable electrode and said detected face of said fixed electrode.

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