Probe card identification for computer aided manufacturing

• US 5,866,024 A
• Filed: 12/19/1996
• Issued: 02/02/1999
• Est. Priority Date: 12/29/1995
• Status: Expired due to Term

• Current Assignee: SGS-Thomson Microelectronics (STMicroelectronics NV)
• Original Assignee: SGS-Thomson Microelectronics (STMicroelectronics NV)
• Inventors: de Villeneuve, Thierry
• Primary Examiner(s): Porta, David P.
• Assistant Examiner(s): St. Cyr, Daniel
• Application Number:
  US08/767,140
• Time in Patent Office: 775 Days
• Field of Search: 235/382, 235/384, 235/449, 235/493, 342/51
• US Class Current: 235/493
• CPC Class Codes: G01R 1/07342 the body of the probe being at an angle other than perpendicular to test object, e.g. probe card

Abstract

A system for identifying probe cards including a prober which accepts a number of interchangeable probe cards, each carrying a transponder tag; a magnetic coupling antenna supported above the probe card when it is in use, the transponder tag being substantially located within a magnetic field generated by the magnetic coupling antenna; and circuitry connected to the magnetic coupling antenna for receiving signals emitted by the transponder tag, for deriving data therefrom, and for communicating the data to a central computer which holds information on the probe cards in a memory.

Claims

1. A system for identifying probe cards, including a prober which accepts a number of interchangeable probe cards, comprising:

a probe card carrying a transponder tag;

a magnetic coupling antenna supported above the probe card when the magnetic coupling antenna is in use, wherein the magnetic coupling antenna comprises a coil of wire wound onto an armature, shaped as a partial toroid, having two ends and a gap between the two ends, the transponder tag being substantially located within a magnetic field generated by the magnetic coupling antenna; and

circuitry connected to the magnetic coupling antenna for receiving signals emitted by the transponder tag, for deriving data therefrom, and for communicating the data to a central computer which holds information on the probe cards in a memory.

2. A system for identifying probe cards, including a prober which accepts a number of interchangeable probe cards, comprising:

a probe card carrying a transponder tag;

a magnetic coupling antenna supported above the probe card when the magnetic coupling antenna is in use, the transponder tag being substantially located within a magnetic field generated by the magnetic coupling antenna; and

a sprung contact ring, held vertically above the probe card, the magnetic coupling antenna being retained within a magnetically inert carrier, supported in a hole in the sprung contact ring; and

circuitry connected to the magnetic coupling antenna for receiving signals emitted by the transponder tag, for deriving data therefrom, and for communicating the data to a central computer which holds information on the probe cards in a memory.

3. A system according to claim 2, wherein the magnetic coupling antenna comprises an armature in the form of a partial toroid, having a coil of wire wound thereon.

4. An identification system comprising:

a magnetic coupling antenna mounted within a prober, wherein said magnetic coupling antenna comprises a coil of wire wound onto an armature shaped as a partial toroid having two ends and a gap between the two ends, and

a probe card including a transponder tag, wherein when said probe card is mounted within said prober, said transponder is substantially located between said two ends of said magnetic coupling antenna, and said magnetic coupling antenna receives identification information from said transponder tag.

5. An identification system comprising:

a magnetic coupling antenna mounted within a prober;

a probe card including a transponder tag, wherein when said probe card is mounted within said prober, said magnetic coupling antenna receives identification information from said transponder tag and wherein said prober accepts a plurality of interchangeable probe cards, each transponder tag of said plurality of probe cards having different identification information; and

a computer means for processing said identification information.

6. The system of claim 5 wherein said computer means stores said identification information of each of said plurality of interchangeable probe cards in a memory to track probe card usage.

7. An identification system comprising:

a magnetic coupling antenna mounted within a prober wherein said magnetic coupling antenna is housed within a non-magnetic carrier mounted within a sprung contact ring of said prober; and

a probe card including a transponder tag, wherein when said probe card is mounted within said prober and said magnetic coupling antenna receives identification information from said transponder tag.

8. A method for identifying each of a plurality of interchangeable probe cards used in a prober, the method comprising:

programming each of a plurality of transponder tags with identification information;

affixing one of said plurality of transponder tags to each of said probe cards;

mounting one of said probe cards within said prober; and

magnetically reading said identification information from said probe card.

9. The method of claim 8 further comprising storing said identification information to track the usage history of said probe card.

10. The method of claim 9 further comprising replacing said probe card when said stored identification information indicates that service is necessary.

11. A system for identifying each of a plurality of interchangeable probe cards used in a prober, the system comprising:

means, affixed to each of said probe cards, for transmitting identification information in a magnetic form;

means for receiving said identification information;

means for processing said identification information; and

means for transferring said identification information from said means for receiving to said means for processing.

12. The system of claim 11 wherein said means for transmitting comprises a transponder tag which is programmed with said identification information.

13. The system of claim 11 wherein said means for receiving comprises a magnetic coupling antenna.

14. The system of claim 13 wherein said magnetic coupling antenna comprises an armature in the form of a partial toroid, having a coil of wire wound thereon.

15. The system of claim 11 wherein said means for processing comprises computer means which receives said identification information from said means for receiving and stores said information in storage means.

16. A method of increasing the reliability of a prober which uses a plurality of interchangeable probe cards, the method comprising:

programming each of said probe cards with magnetic identification information;

reading said magnetic identification information from a probe card currently in use.

17. The method of claim 16, further comprising the steps of:

storing said magnetic identification information;

analyzing said identification information; and

servicing said probe card.

18. The method of claim 17, wherein said analyzing step comprises calculating a usage history based on the use of the probe card, and said servicing step occurs when said usage history indicates that service is necessary.

19. The method of claim 16, further comprising the step of:

determining if the probe card currently in use is a correct type of probe card for a currently running test.

20. The method of claim 19, wherein if, said determining step results in a determination that the probe card currently in use is not the correct type of probe card, the method further comprises the step of indicating that the probe card currently in use is not the correct type.

21. The method of claim 16, wherein said programming step comprises affixing a transponder tag with said magnetic identification to each of said plurality of probe cards.

22. The method of claim 16, wherein said reading step comprises receiving said magnetic identification information and translating said information into an identification code.