Hybrid motor

• US 5,866,971 A
• Filed: 08/14/1996
• Issued: 02/02/1999
• Est. Priority Date: 09/09/1993
• Status: Expired due to Term

• Current Assignee: Cymer Incorporated (ASML Holding NV)
• Original Assignee: Active Control eXperts, Inc. (ASML Holding NV)
• Inventors: Lazarus, Kenneth B., Saarmaa, Erik, Crawley, Edward F., Russo, Farla M.
• Primary Examiner(s): Dougherty, Thomas M.
• Application Number:
  US08/699,680
• Time in Patent Office: 902 Days
• Field of Search: 310/328, 310/330, 310/331, 310/324
• US Class Current: 310/328
• CPC Class Codes: H02N 2/043 Mechanical transmission means, e.g. for stroke amplification

Abstract

A hybrid actuator includes strain actuated elements that displace fluid to move a piston, with the elements forming a fluid housing, and being oriented and actuated to optimize force, stroke or bandwidth. In one preferred embodiment the elements are cylinders enclosing the fluid, with radial and axial components of strain-induced dimensional change adding together to enhance displacement. In another preferred embodiment, piezo bender elements produce large stroke, high bandwidth movements. Strokes of up to fifty percent of actuator length, and bandwidths above 500 Hz are achieved in light weight electrically actuated devices free of external piping or hydraulics. The actuator is readily integrated into a gate valve, sub-woofer, or other driven device.

Claims

1. A hybrid actuator comprising

a housing defining a single fluid reservoir and containing a body of fluid

an electrical actuator member within said housing, said member having a major movable displacing face which moves when electrically actuated to increase and decrease available volume for fluid in said reservoir and apply pressure on fluid in the reservoir

said body of fluid filling the reservoir

a piston slidably extending into the body of fluid in the reservoir such that motion of the piston tracks displacement of fluid caused by motion of said displacing face, and

wherein opposed ends of said piston are slideably supported by said housing, and a portion of said piston has fluid contacting surface regions which are of two different diameters located within the reservoir

the surface regions being acted upon by pressure of the body of fluid in the reservoir such that decrease in volume of said reservoir drives the piston in one direction while an increase in volume drives the piston in an opposite direction.

2. A hybrid actuator according to claim 1, wherein said means for enhancing displacement includes sealing means for sealing said member against contact with fluid, such that fluid is displaced only by movement of said displacing face and does not contact said actuator member transverse to said displacing face.

3. A hybrid actuator according to claim 1, wherein electrical actuation member includes piezoelectric elements supporting a pusher plate, said pusher plate displacing fluid upon actuation of said elements.

4. A hybrid actuator according to claim 1, wherein the electrically actuable member is a piezoelectric cylinder.

5. A hybrid actuator according to claim 7, wherein said electrically actuable member is a cylinder that is closed by an end plate for forming said housing.

6. A hybrid actuator according to claim 1, wherein said electrically actuable member is a stack actuated in a direction axially aligned with motion of said piston.

7. A hybrid actuator according to claim 1, wherein said electrically actuable member is a piezoelectric element actuated to displace fluid in a direction perpendicular to motion of said piston.

8. A hybrid actuator according to claim 1, wherein said piston slides in a linear bearing.

9. A hybrid actuator according to claim 1, wherein said piston is of different diameter at each of said opposed ends.

10. A hybrid actuator according to claim 1, wherein said portion of said piston within the reservoir is tapered.

11. A hybrid actuator according to claim 1, wherein said electrical actuator member forms a circumferential wall of said reservoir.

12. A hybrid actuator according to claim 1, wherein said electrical actuator member forms an end of said reservoir.

13. A hybrid actuator according to claim 1, wherein said electrical actuator member encloses the fluid.

14. A hybrid actuator according to claim 1, further comprising a plate attached to and driven by said piston to move at audio frequencies and form a high-displacement audio woofer.