Phase modulating device

• US 5,867,301 A
• Filed: 04/22/1996
• Issued: 02/02/1999
• Est. Priority Date: 04/22/1996
• Status: Expired due to Fees

• Current Assignee: Craig D. Engle
• Original Assignee: Craig D. Engle
• Inventors: Engle, Craig D.
• Primary Examiner(s): Epps, Georgia
• Assistant Examiner(s): BEY, DAWN MARIE
• Application Number:
  US08/636,155
• Time in Patent Office: 1,016 Days
• Field of Search: 359/290, 359/291, 359/292, 359/293, 359/294, 359/295
• US Class Current: 359/291
• CPC Class Codes: G02B 26/06 for controlling the phase of light G02B26/08 takes precedence , measuring optical phase difference G01J9/00
• CPC Class Codes: G02B 26/0808 by means of one or more diffracting elements
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means

Abstract

A surface deformation type wavefront phase modulator (36) utilizes a transmissive deformable conductor (30) affixed to a single layer of transmissive deformable media (24). Media (24) is affixed to a substrate (12). A dielectric reflector (18) is affixed to the substrate (12). Conductor (30) is opposite the substrate (12). Electrostatic forces are applied to the conductor (30) to vary the deformation of media (24) and conductor (30) to phase modulate a wavefront which is incident on conductor (30), traverses media 24 and is reflected by reflector (18) to again traverse the media (24). Several advantages are inherent in my invention. Utilizing a transmissive deformable conductor (30) avoids the compromises involving reflectivity and conductor thickness which has plagued prior art devices.

Claims

1. A spatial light modulator component comprising:

a substrate,

a single layer of transmissive electrostatically deformable media,

said media further includes a first surface facing said substrate and a second surface opposite thereof,

transmissive layer means mechanically coupled to said second surface of said media,

said media is integrally associated with said substrate,

reflective means opposite said second surface of said media,

control means for applying electrostatic forces to said layer means,

means operatively associated with said control means varying said electrostatic forces which varies separation between said layer means and said substrate.

2. The device of claim 1 wherein varying said electrostatic forces varies deformation of said layer means and said media thereby modulating a wavefront incident on said layer means and traversing said media and impinging on and reflected by said reflective means to again traverse said media and issue from said modulator.

3. The device of claim 2 wherein said modulated wavefront is a phase modulated wavefront,

schlieren means to transform said phase modulated wavefront to a wavefront having identifiable irradiance characteristics.

4. The device of claim 3 wherein said layer means comprises a material selected from the group consisting of transparent electrical conductors and transparent electrical insulators,

said media comprises a second material selected from the group consisting of transparent viscoelastic substances and transparent elastomers.

5. The device of claim 3 wherein said layer means comprises a transparent electrical insulator.

6. The device of claim 5 wherein said control means further comprises charge means for depositing an electronic charge on said layer means in accordance with an information bearing signal.

7. The device of claim 3 wherein said reflective means comprises a dielectric reflector means affixed to said substrate,

said layer means comprises a material selected from the group consisting of transparent electrical conductors and transparent electrical insulators.

8. The device of claim 3 wherein said layer means comprises a transparent electrical conductor.

9. A spatial light modulator component comprising:

a substrate;

a capacitive pixel element comprising;

a single layer of transmissive electrostatically deformable media,

said media further includes a first surface facing said substrate and a second surface opposite thereof,

said media is integrally associated with said substrate,

transmissive layer means mechanically coupled to said second surface of said media.

reflective means opposite said second surface of said media,

electric field control means to apply electrostatic forces to said layer means of said pixel element,

means operatively associated with said control means varying said electrostatic forces which varies separation of said layer means from said substrate.

10. The device of claim 9 wherein varying said electrostatic forces varies deformation of said layer means and said media thereby modulating a wavefront incident on said layer means and traversing said media and impinging on and reflected by said reflective means to again traverse said media and issue from said modulator.

11. The device of claim 10 wherein said modulated wavefront is a phase modulated wavefront,

schlieren means to transform said phase modulated wavefront to a wavefront having identifiable irradiance characteristics.

12. The device of claim 11 wherein said layer means comprises a material selected from the group consisting of transparent electrical conductors and transparent electrical insulators,

said media means comprises a second material selected from the group of consisting of transparent viscoelastic substances and transparent elastomers.

13. A spatial light modulator component comprising:

a substrate,

a plurality of capacitive pixel elements, each said pixel element comprising;

a single layer of transmissive electrostatically deformable media,

said media further includes a first surface facing said substrate and a second surface opposite thereof,

said media is integrally associated with said substrate,

transparent layer means mechanically coupled to said second surface of said media,

reflective means opposite said second surface of said media,

electric field control means to apply electrostatic forces to said layer means of said pixel elements,

means operatively associated with said control means varying said electrostatic forces which varies separation of said layer means and said second surface of said media of the pixel elements from said substrate.

14. A spatial light modulator comprising:

a substrate,

transmissive electrostatically deformable media means,

said media means further includes a first surface facing said substrate and a second surface opposite thereof,

transmissive layer means mechanically coupled to said second surface of said media means,

said media means is integrally associated with said substrate,

reflective means opposite said second surface of said media means,

electric field control means for applying electrostatic forces to said layer means,

means operatively associated with said control means varying said electrostatic forces which varies separation between said layer means and said substrate thereby modulating a wavefront incident on said layer means traversing said media means incident on and reflected by said reflective means to again traverse said media means and issue from said modulator,

schlieren means to transform said phase modulated wavefront to a wavefront having identifiable irradiance characteristics.

15. The device of claim 14 wherein said layer means comprises a material selected from the group consisting of transparent electrical conductors and transparent electrical insulators,

said media means comprises a second material selected from the group consisting of transparent viscoelastic substances and transparent elastomers.

16. A spatial light modulator component comprising:

a substrate,

a single layer of transmissive electrostatically deformable media,

said media further includes a first surface facing said substrate and a second surface opposite thereof,

transmissive layer means mechanically coupled to said second surface of said media means,

said media means is integrally associated with said substrate,

reflective means opposite said second surface of said media.

17. The device of claim 16 wherein said layer means comprises a material selected from the group consisting of transparent electrical conductors and transparent electrical insulators,

said media means comprises a second material selected from the group consisting of transparent viscoelastic substances and transparent elastomers.