Bistable microelectromechanical actuator

• US 5,867,302 A
• Filed: 08/07/1997
• Issued: 02/02/1999
• Est. Priority Date: 08/07/1997
• Status: Expired due to Fees

• Current Assignee: Sandia Corporation (Martin Marietta Corporation)
• Original Assignee: Sandia Corporation (Martin Marietta Corporation)
• Inventors: Fleming, James G.
• Primary Examiner(s): Ben, Loha
• Application Number:
  US08/908,639
• Time in Patent Office: 544 Days
• Field of Search: 359/290, 359/291, 359/295, 359/298, 359/224, 359/230, 359/846, 359/850, 310/328, 310/366, 348/770, 348/771
• US Class Current: 359/291
• CPC Class Codes: B81B 2201/018 Switches not provided for in B81B2201/014 - B81B2201/016
• CPC Class Codes: B81B 2201/045 Optical switches
• CPC Class Codes: B81B 2203/0109 Bridges
• CPC Class Codes: B81B 3/0054 For holding or placing an element in a given position
• CPC Class Codes: G02B 26/0825 the reflecting element being a flexible sheet or membrane, e.g. for varying the focus flexible mirrors for cosmetic use A45D42/24
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: H01G 5/16 using variation of distance between electrodes
• CPC Class Codes: H01G 5/38 Multiple capacitors, e.g. ganged
• CPC Class Codes: H01G 5/40 Structural combinations of variable capacitors with other electric elements not covered by this subclass, the structure mainly consisting of a capacitor, e.g. RC combinations
• CPC Class Codes: H01H 2001/0042 Bistable switches, i.e. having two stable positions requiring only actuating energy for switching between them, e.g. with snap membrane or by permanent magnet
• CPC Class Codes: Y10S 359/904 Micromirror

Abstract

A bistable microelectromechanical (MEM) actuator is formed on a substrate and includes a stressed membrane of generally rectangular shape that upon release assumes a curvilinear cross-sectional shape due to attachment at a midpoint to a resilient member and at opposing edges to a pair of elongate supports. The stressed membrane can be electrostatically switched between a pair of mechanical states having mirror-image symmetry, with the MEM actuator remaining in a quiescent state after a programming voltage is removed. The bistable MEM actuator according to various embodiments of the present invention can be used to form a nonvolatile memory element, an optical modulator (with a pair of mirrors supported above the membrane and moving in synchronism as the membrane is switched), a switchable mirror (with a single mirror supported above the membrane at the midpoint thereof) and a latching relay (with a pair of contacts that open and close as the membrane is switched). Arrays of bistable MEM actuators can be formed for applications including nonvolatile memories, optical displays and optical computing.

Claims

1. A microelectromechanical (MEM) actuator, comprising:

(a) a shaped membrane formed above a substrate, the membrane being held in compression by elongate supports attached to a pair of opposing edges of the membrane and by an elongate resilient member attached to the membrane at a midpoint thereof to provide a curvilinear cross-sectional shape for the membrane and thereby define a first mechanical state of the membrane; and

(b) electrostatic means for switching the membrane from the first mechanical state to a second mechanical state having a cross-sectional shape that is a mirror image the first mechanical state.

2. The MEM actuator of claim 1 wherein the substrate comprises silicon.

3. The MEM actuator of claim 1 wherein the membrane comprises a material selected from the group consisting of polysilicon, silicon nitride, silicon dioxide, metals and metal alloys.

4. The MEM actuator of claim 1 wherein the membrane has a rectangular shape in plan view.

5. The MEM actuator of claim 1 wherein the electrostatic means for switching the membrane comprises at least one electrode formed on or within the membrane, and an opposing electrode formed proximate to the substrate.

6. The MEM actuator of claim 1 wherein the electrostatic means for switching the membrane comprises at least one pair of spaced electrodes forming an air-gap capacitor, and a programming voltage applied between the pair of spaced electrodes to generate an electrostatic force of attraction therebetween.

7. The MEM actuator of claim 6 wherein each mechanical state of the actuator is stable in the absence of the programming voltage.

8. The MEM actuator of claim 6 wherein the programming voltage is provided by an electrical signal generator.

9. The MEM actuator of claim 8 wherein the electrical signal generator is formed as an integrated circuit on the substrate proximate to the membrane.

10. The MEM actuator of claim 8 further including addressing circuitry connected between the electrical signal generator and the spaced electrodes to provide the programming voltage to a predetermined pair of the spaced electrodes.

11. The MEM actuator of claim 10 wherein the addressing circuitry is formed on the substrate proximate to the membrane.

12. The MEM actuator of claim 1 further including a mirror supported on a post and centered above the membrane, with the mirror being switchable between a pair of angular states in response to the mechanical states of the actuator being switched, thereby deflecting an incident light beam.

13. The MEM actuator of claim 12 wherein the mirror includes a reflective coating.

14. The MEM actuator of claim 12 wherein the electrostatic means for switching the membrane comprises at least one pair of spaced electrodes forming an air-gap capacitor, and a programming voltage applied between the pair of spaced electrodes to generate an electrostatic force of attraction therebetween.

15. The MEM actuator of claim 14 wherein each angular state of the actuator is stable in the absence of the programming voltage.

16. The MEM actuator of claim 1 further including a pair of mirrors supported above the membrane, with each mirror being located substantially halfway between the resilient member and one of the opposing edges of the membrane, the pair of mirrors being moveable in opposing vertical directions in response to switching of the mechanical states of the actuator, thereby modulating an incident light beam.

17. The MEM actuator of claim 16 wherein the mirror includes a reflective coating.

18. The MEM actuator of claim 16 wherein the pair of mirrors are coplanar in the first mechanical state and non-coplanar in the second mechanical state.

19. The MEM actuator of claim 18 wherein each mechanical state of the actuator is stable until activation thereof by the electrostatic means for switching the membrane.

20. The MEM actuator of claim 1 further including a first relay contact formed on the membrane and a second relay contact formed proximate to the membrane, the first and second relay contacts forming an electrical closed circuit in one mechanical state of the membrane, and forming an electrical open circuit in the other mechanical state of the membrane.

21. The MEM actuator of claim 20 wherein the second relay contact is formed below the membrane and in electrical contact therewith.

22. The MEM actuator of claim 20 wherein each mechanical state of the actuator is latched until activation thereof by the electrostatic means for switching the membrane.

23. A bistable microelectromechanical (MEM) actuator comprising:

(a) a substrate;

(b) a stressed membrane formed above the substrate, the membrane being supported at a pair of opposing edges thereof and further being supported by a resilient member below the membrane near a midpoint thereof to provide a curvilinear cross-sectional shape for the membrane to define a first mechanical state thereof; and

(c) electrostatic means for switching the stressed membrane from the first mechanical state to a second mechanical state having a cross-sectional shape that is a mirror image of the first mechanical state.

24. The MEM actuator of claim 23 wherein the substrate comprises silicon, and the membrane comprises a material selected from the group consisting of polysilicon, silicon nitride, silicon dioxide, metals and metal alloys.

25. The MEM actuator of claim 23 wherein the substrate includes a cavity wherein the resilient member is located.

26. The MEM actuator of claim 23 wherein the electrostatic means for switching the membrane comprises at least one electrode formed in contact with the membrane and another electrode spaced at a distance therefrom.

27. The MEM actuator of claim 26 wherein the electrostatic means further includes addressing circuitry for providing a programming voltage to the electrodes to actuate the MEM actuator.

28. The MEM actuator of claim 27 wherein the programming voltage is provided by an electrical signal generator.

29. The MEM actuator of claim 27 wherein the programming voltage is provided by or controlled by a computer.

30. The MEM actuator of claim 29 in the form of a switchable mirror device.

31. The MEM actuator of claim 30 wherein the moveable mirrors are held stationary in the absence of the programming voltage applied to the actuator.

32. The MEM actuator of claim 30 in the form of an optical modulator.

33. The MEM actuator of claim 32 wherein a first electrical contact is formed on the membrane and a second electrical contact is formed superposed with the first electrical contact.

34. The MEM actuator of claim 23 further including a mirror supported above the membrane, with the mirror being rotatable in response to switching of the membrane, thereby deflecting an incident light beam.

35. The MEM actuator of claim 34 wherein the incident light beam is deflected between a pair of angular states.

36. The MEM actuator of claim 35 wherein each angular state is stable in the absence of a programming voltage applied to the actuator.

37. The MEM actuator of claim 23 further including a pair of mirrors supported above the membrane, with each mirror being located substantially halfway between the resilient member and one of the supported edges of the membrane, the pair of mirrors being synchronously moveable in response to switching the stressed membrane, thereby modulating an incident light beam.

38. The MEM actuator of claim 37 wherein the pair of mirrors are substantially coplanar in one of the mechanical states and non-coplanar in another of the mechanical states.

39. The MEM actuator of claim 23 further including at least one electrical contact moveable by the membrane to provide in one mechanical state of the membrane an electrical closed circuit, and to provide in another mechanical state of the membrane an electrical open circuit.

40. The MEM actuator of claim 39 wherein the electrical open circuit or closed circuit is maintained until the application of a programming voltage to the MEM actuator.

41. The MEM actuator of claim 39 in the form of a latching relay.

42. A method for forming a microelectromechanical (MEM) actuator, comprising steps for:

(a) forming a resilient member and a pair of elongate supports on a substrate;

(b) forming a stressed membrane having a curvilinear shape by attaching the membrane at a midpoint thereof to the resilient member and at a pair of opposing edges thereof to the elongate supports; and

(c) forming a first electrode on or within the stressed membrane, and forming a second electrode spaced therefrom for electrostatically switching the membrane between a pair of mechanical states thereof.

43. The method of claim 42 wherein the step for forming the resilient member and elongate supports comprises steps for:

(a) forming an insulating layer on the substrate;

(b) depositing a sacrificial layer on the insulating layer;

(c) etching the sacrificial layer and forming a plurality of sidewalls therein;

(d) depositing a resilient-member-forming layer on the sacrificial layer and sidewalls; and

(e) anisotropically etching the resilient-member-forming layer to remove the resilient-member-forming layer except on the sidewalls, thereby forming the resilient member and elongate supports.

44. The method of claim 42 wherein the step for forming the stressed membrane comprises steps for:

(a) depositing a sacrificial layer above the substrate and filling in a region between the resilient member and elongate supports;

(b) depositing the stressed membrane above the sacrificial layer; and

(c) releasing the stressed membrane by etching away the sacrificial layer.

45. The method of claim 42 further including steps for forming at least one mirror supported above the membrane.