Micromachined integrated opto-flow gas/liquid sensor

• US 5,869,749 A
• Filed: 04/30/1997
• Issued: 02/09/1999
• Est. Priority Date: 04/30/1997
• Status: Expired due to Term

• Current Assignee: Honeywell Incorporated (Honeywell International Inc.)
• Original Assignee: Honeywell Incorporated (Honeywell International Inc.)
• Inventors: Bonne, Ulrich, Cole, Barrett E., Higashi, Robert E.
• Primary Examiner(s): LARKIN, DANIEL SEAN
• Application Number:
  US08/841,748
• Time in Patent Office: 650 Days
• Field of Search: 73/23.31, 73/24.02, 73/25.01, 73/25.05, 73/31.01, 73/31.02, 73/31.03, 73/31.04, 73/31.05, 73/53.01, 73/61.41, 73/61.43 , 73/61.45, 73/61.76, 73/61.79, 73/64.53, 250/339.01, 250/339.06, 250/339.12, 250/339.13, 250/341.1
• US Class Current: 73/53.01
• CPC Class Codes: G01N 2021/0346 Capillary cells; Microcells
• CPC Class Codes: G01N 2021/1704 in gases
• CPC Class Codes: G01N 21/03 Cuvette constructions
• CPC Class Codes: G01N 21/1702 with opto-acoustic detection, e.g. for gases or analysing solids
• CPC Class Codes: G01N 21/3504 for analysing gases, e.g. multi-gas analysis
• CPC Class Codes: G01N 21/37 using pneumatic detection opto-acoustic detection G01N21/1702

Abstract

A micromachined integrated opto-fluidic or opto-acoustic sensor having a rapidly intensity-varying or pulsing light source, an interference filter, a gas cavity, which may or may not be an optical and/or acoustic resonator tuned to a particular wavelength of light, or sound frequency, into which the detected gas can diffuse into via a filter, and a fluidic or pressure sensor to detect the heating and cooling, and the resulting expansion and contraction of the gas due to the absorption of light at the particular wavelength by the specific gas being detected. The presence of other gases is inferred from the detected gas.

Claims

1. A micromachined integrated gas/liquid sensor comprising:

a wafer;

a light source formed on said wafer;

a layer formed on said wafer;

an optical filter formed on said layer;

a cavity formed on said layer;

a flow sensor formed proximate to said cavity; and

a porous filter formed on said cavity.

2. The sensor of claim 1 wherein said layer is glass.

3. The sensor of claim 2 wherein:

said optical filter is a narrow band pass filter for passing light from said light source, passes a first wavelength into said cavity; and

a gas or liquid to be sensed has an absorption wavelength at the first wavelength.

4. The sensor of claim 3 wherein:

the gas or liquid in an ambient environment about the sensor will infiltrate through said porous filter into said cavity;

light that may come from said light source and pass through said optical filter into said cavity has an intensity that increases and decreases;

the gas or liquid in said cavity and impinged by the light from said optical filter, will expand and contract if the gas or liquid has an absorption wavelength at the first wavelength;

the gas or liquid in said cavity and impinged by the light from said optical filter, will not expand and contract if the gas or liquid has an absorption wavelength not at the first wavelength; and

said flow sensor can sense an expansion or contraction of the gas or liquid.

5. The sensor of claim 4 wherein said porous filter is a compressed metal frit.

6. The sensor of claim 5 wherein:

said flow sensor can output a signal that indicates a magnitude of the expansion or contraction of the gas or liquid; and

the magnitude of the expansion or contraction indicates an amount of concentration of the gas or liquid having an absorption wavelength at the first wavelength, in said cavity and in turn in the ambient environment of the sensor.

7. The sensor of claim 6 further comprising a processor, wherein:

the signal from said flow sensor, indicating an amount of concentration of the gas or liquid having an absorption wavelength at the first wavelength, goes to said processor; and

said processor processes the signal from said flow sensor and provides inferred information.

8. The sensor of claim 7 wherein the first wavelength is at an absorption wavelength of CO.

9. The sensor of claim 7 wherein the first wavelength is at an absorption wavelength of CO₂.

10. The sensor of claim 9 wherein

said processor comprises a table of information.

11. The sensor of claim 7 further comprising an integrated circuit formed on said wafer and wherein said integrated circuit has a processor.

12. The sensor of claim 11 further comprising an antireflective coating for the first wavelength formed on said layer.

13. The sensor of claim 1 wherein said layer is a wafer.

14. A micromachined integrated circuit gas/liquid sensor comprising:

a first layer;

a set of microemitters formed on a first surface of said first layer;

a second layer;

a narrow band pass filter for a first wavelength formed on a first surface of said second layer;

a third layer;

a fourth layer having a first surface adjacent to a first surface of said third layer, wherein said third and fourth layers have central portions removed to form a cavity;

a channel formed in at least one first surface of said third and fourth layers, from the cavity to an outer edge of said third and fourth layers;

a detector formed in said channel;

a porous filter layer formed on a second surface of said fourth layer; and

wherein;

the first surface of said first layer is adjacent to a second surface of said second layer; and

the first surface of said second layer is adjacent to a second surface of said third layer.

15. The sensor of claim 14 wherein said porous filter layer is a frit having appropriately low porosity.

16. The sensor of claim 15 wherein:

said first, third, and fourth layers are wafers; and

said second layer is a glass plate.

17. The sensor of claim 16 further comprising:

a first through-the-layer contact formed on a second surface of said first layer and through said first layer to said set microemitters; and

a second through-the-layer contact formed on the second surface of said first layer and through said first, second, and third layers to said detector.

18. The sensor of claim 17 further comprising an integrated circuit formed on the second surface of said first layer.

19. The sensor of claim 18 further comprising an antireflective coating formed on the second surface of said second layer.

20. The sensor of claim 19 wherein:

the gas or liquid in an ambient environment about the sensor will infiltrate through said porous filter layer into the cavity;

light that may come from said set of microemitters and pass through said narrow band pass filter into the cavity has an intensity that is modulated;

the gas or liquid in the cavity and impinged by the light passing through said narrow band pass filter, will change in temperature, pressure, and volume, in that order, if the gas or liquid has an absorption wavelength at the first wavelength;

the gas or liquid in the cavity and impinged by the light passing through said narrow band pass filter, will not have a change of volume caused by the light if the gas or liquid has an absorption wavelength not at the first wavelength; and

said detector can sense a change of volume of the gas or liquid.

21. The sensor of claim 20 wherein:

said detector can output a signal that indicates a magnitude of the change of volume of the gas or liquid; and

the magnitude of the change of volume indicates an amount of concentration of the gas or liquid having an absorption wavelength at the first wavelength, in the cavity and in turn in the ambient environment of the sensor.

22. The sensor of claim 21 further comprising a processor, wherein:

the signal from said detector, indicating an amount of concentration of the gas or liquid having an absorption wavelength at the first wavelength, goes to said processor; and

said processor processes the signal from said detector and provides inferred information.

23. The sensor of claim 22 wherein said processor comprises a table of information.

24. The sensor of claim 23 wherein:

the first wavelength is at an absorption wavelength of CO₂ ; and

the presence of CO₂ indicates the presence of certain combustion products.

25. The sensor of claim 15 wherein said first, second, third, and fourth layers are wafers.

26. The sensor of claim 15 wherein said frit has a porosity that may be decreased with increased compression of said frit or increased with decreased compression of said frit, for optimal porosity.

27. Means for sensing a gas or liquid, comprising:

means for providing radiation;

means for filtering radiation, proximate to said means for providing radiation;

means for containing the gas or liquid, proximate to said means for filtering radiation;

first means for permitting the gas or liquid to enter or leave said means for containing the gas or liquid, proximate to said means for containing the gas or liquid;

second means for permitting the gas or liquid to enter or leave said means for containing the gas or liquid, proximate to said means for containing the gas or liquid; and

means for detecting a rate of flow of the gas or liquid in or out of said means for containing the gas or liquid, proximate to said second means for permitting the gas or liquid to enter or leave means for containing the gas or liquid; and

wherein;

said means for filtering radiation is a narrow band pass filter for passing radiation at a first wavelength;

radiation from said means for providing radiation has a varying intensity;

the gas or liquid having an absorption of radiation at the first wavelength will vary in temperature, pressure, and volume, in that order, due to absorption of radiation having a varying intensity; and

said means for detecting a rate of flow of the gas or liquid in or out of said means for containing the gas or liquid, will detect a variation in volume of the gas or liquid in said means for containing the gas or liquid.