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Multi-dimensional capacitive transducer

  • US 5,869,751 A
  • Filed: 07/29/1997
  • Issued: 02/09/1999
  • Est. Priority Date: 10/01/1993
  • Status: Expired due to Term
First Claim
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1. A high precision transducer comprising:

  • a first capacitive transducer including first means for imparting force or movement and/or detecting force, weight, or position in a first direction via a pick-up plate movably mounted relative to a drive plate therein; and

    a second capacitive transducer including second means for imparting force or movement and/or detecting force, weight, or position in the first direction via a pick-up plate movably mounted relative to a drive plate therein.

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