Multi-dimensional capacitive transducer
First Claim
Patent Images
1. A high precision transducer comprising:
- a first capacitive transducer including first means for imparting force or movement and/or detecting force, weight, or position in a first direction via a pick-up plate movably mounted relative to a drive plate therein; and
a second capacitive transducer including second means for imparting force or movement and/or detecting force, weight, or position in the first direction via a pick-up plate movably mounted relative to a drive plate therein.
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Abstract
High precision force imparting and/or a force (including weight) and displacement measuring/indicating device which includes a multi-dimensional capacitor transducer system. The multi-dimensional transducer includes a first capacitive transducer for imparting force or movement and/or detecting force, weight or position in a first direction and a second capacitive transducer for imparting force or movement and/or detecting force, weight or position in a second direction. The multi-dimensional transducer may be used to provide in situ imaging in micro-mechanical test systems.
172 Citations
26 Claims
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1. A high precision transducer comprising:
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a first capacitive transducer including first means for imparting force or movement and/or detecting force, weight, or position in a first direction via a pick-up plate movably mounted relative to a drive plate therein; and a second capacitive transducer including second means for imparting force or movement and/or detecting force, weight, or position in the first direction via a pick-up plate movably mounted relative to a drive plate therein. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A high precision transducer comprising:
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a first capacitive transducer including first means for imparting force or movement and/or detecting force, weight, or position in a first direction via a pick-up plate movably mounted relative to a drive plate therein; and a second capacitive transducer including second means for imparting force or movement and/or detecting force, weight, or position in the first direction via a pick-up plate movably mounted relative to a drive plate therein, further wherein the first means for imparting force or movement and/or detecting force, weight, or position in a first direction operates within a first range of forces, and wherein the second means for imparting force or movement and/or detecting force, weight, or position in the first direction operates in a second range of forces different from the first range of forces.
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11. A high precision transducer comprsing:
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a first capacitive transducer including first means for imparting force or movement and/or detecting force, weight, or position in a first direction via a pick-up plate movably mounted relative to a drive plate therein; and a second capacitive transducer including second means for imparting force or movement and/or detecting force, weight, or position in the first direction via a pick-up plate movably mounted relative to a drive plate therein, further comprising means for maintaining each pick-up plate relatively parallel to each other during movement of the pick-up plate.
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12. A high precision transducer comprising:
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a first capacitive transducer including first means for imparting force or movement and/or detecting force, weight, or position in a first direction via a pick-up plate movably mounted relative to a drive plate therein; and a second capacitive transducer including second means for imparting force or movement and/or detecting force, weight, or position in the first direction via a pick-up plate movably mounted relative to a drive plate therein, further comprising; a tip mechanism; and means for coupling each pick-up plate to the tip mechanism. - View Dependent Claims (13)
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14. In a scanned probe microscope apparatus for high resolution surface imaging and/or mechanical properties testing, the improvement including a high precision transducer comprising:
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a first capacitive transducer including first means for imparting force or movement and/or detecting force, weight, or position in a first direction via a pick-up plate movably mounted relative to a drive plate therein; and a second capacitive transducer including second means for imparting force or movement and/or detecting force, weight, or position in the first direction via a pick-up plate movably mounted relative to a drive plate therein. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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21. In a scanned probe microscope apparatus for high resolution surface imaging and/or mechanical properties testing, the improvement including a high precision transducer comprising:
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a first capacitive transducer including first means for imparting force or movement and/or detecting force, weight, or position in a first direction via a pick-up plate movably mounted relative to a drive plate therein; and a second capacitive transducer including second means for imparting force or movement and/or detecting force, weight, or position in the first direction via a pick-up plate movably mounted relative to a drive plate therein, further wherein the first means for imparting force or movement and/or detecting force, weight, or position in a first direction operates within a first range of forces, and wherein the second means for imparting force or movement and/or detecting force, weight, or position in the first direction operates in a second range of forces different from the first range of forces.
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22. In a scanned probe microscope apparatus for high resolution surface imaging and/or mechanical properties testing, the improvement including a high precision transducer comprising:
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a first capacitive transducer including first means for imparting force or movement and/or detecting force, weight, or position in a first direction via a pick-up plate movably mounted relative to a drive plate therein and a second capacitive transducer including second means for imparting force or movement and/or detecting force, weight, or position in the first direction via a pick-up plate movably mounted relative to a drive plate therein, further comprising means for operably coupling the first capacitive transducer pick-up plate to the second capacitive transucer pick-up plate.
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23. In a scanned probe microscope apparatus for high resolution surface imaging and/or mechanical properties testing, the improvement including a high precision transducer comprising:
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a first capacitive transducer including first means for imparting force or movement and/or detecting force, weight, or position in a first direction via a pick-up plate movably mounted relative to a drive plate therein; and a second capacitive transducer including second means for imparting force or movement and/or detecting force, weight, or position in the first direction via a pick-up plate movably mounted relative to a drive plate therein, further comprising means for maintaining each pick-up plate relatively parallel to its respective drive plate during movement of the pick-up plate.
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24. In a scanned probe microscope apparatus for high resolution surface imaging and/or mechanical properties testing, the improvement including a high precision transducer comprising:
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a first capacitive transducer including first means for imparting force or movement and/or detecting force, weight, or position in a first direction via a pick-up plate movably mounted relative to a drive plate therein; and a second capacitive transducer including second means for imparting force or movement and/or detecting force, weight, or position in the first direction via a pick-up plate movably mounted relative to a drive plate therein, further comprising means for maintaining each pick-up plate relatively parallel to each other during movement of the pick-up plate.
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25. In a scanned probe microscope apparatus for high resolution surface imaging and/or mechanical properties testing, the improvement including a high precision transducer comprising:
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a first capacitive transducer including first means for imparting force or movement and/or detecting force, weight, or position in a first direction via a pick-up plate movably mounted relative to a drive plate therein; and a second capacitive transducer including second means for imparting force or movement and/or detecting force, weight or position in the first direction via a pick-up plate movably mounted relative to a drive plate therein further comprising; a tip mechanism; and means for coupling each pick-up plate to the tip mechanism. - View Dependent Claims (26)
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Specification