Ink jet printhead with channels formed in silicon with a (110) surface orientation

• US 5,870,123 A
• Filed: 07/15/1996
• Issued: 02/09/1999
• Est. Priority Date: 07/15/1996
• Status: Expired due to Term

• Current Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Original Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Inventors: Lorenze, Robert V. Jr., O'Neill, James F.
• Primary Examiner(s): HARTARY, JOSEPH W
• Application Number:
  US08/679,977
• Time in Patent Office: 939 Days
• Field of Search: 347/65, 347/63, 347/56, 347/54, 347/20, 216/27, 216/2, 216/33, 216/36, 216/56, 216/99
• US Class Current: 347/65
• CPC Class Codes: B41J 2/14032 Structure of the pressure chamber
• CPC Class Codes: B41J 2/1604 of the edge shooter type
• CPC Class Codes: B41J 2/1623 bonding and adhesion
• CPC Class Codes: B41J 2/1629 wet etching
• CPC Class Codes: B41J 2/1631 photolithography
• CPC Class Codes: B41J 2202/03 Specific materials used

Abstract

In an ink-jet printhead, the individual channels for ejecting ink onto a print medium are orientation dependently etched along the (111) planes perpendicular to the (110) surface orientation of a single crystal silicon wafer. The silicon wafer is bonded on a glass substrate to act as both a support and an etch stop in the etching process. The orientation of the channels within the silicon layer facilitates channels which are rectangular in cross section.

Claims

1. An ink-jet printhead comprising:

a substrate defining a main surface;

a single crystal silicon wafer bonded to the main surface of the substrate, the silicon wafer being oriented with a (110) plane parallel to the main surface of the substrate; and

a plurality of parallel channels defined in the silicon wafer, with a portion of the main surface of the substrate being exposed within each channel, wherein each parallel channel defines sidewalls in the silicon wafer which are perpendicular to the main surface of the substrate.

2. The printhead of claim 1, wherein the substrate comprises a silicate glass.

3. The printhead of claim 2, wherein the silicate glass is silicon dioxide.

4. The printhead of claim 1, further comprising a heater chip disposed adjacent the parallel channels, the heater chip defining a plurality of heating elements, each of the plurality of heating elements being disposed in a parallel channel.

5. The printhead of claim 1, wherein the parallel channels are parallel to a (111) plane of the single crystal silicon wafer.

6. The printhead of claim 1, further comprising an aperture defined in the substrate, the aperture accessing a parallel channel in the silicon wafer.

7. A method of making an ink-jet printhead, comprising the steps of

providing a substrate defining a main surface;

bonding a single crystal silicon wafer to the main surface of the substrate, the silicon wafer being oriented with a (110) plane parallel to the main surface of the substrate; and

creating a plurality of parallel channels in the silicon wafer, with a portion of the main surface of the substrate being exposed within each channel.

8. The method of claim 7, wherein the bonding step includes the steps of

heating the substrate and the silicon wafer to a predetermined temperature;

and

applying an electrical field across the substrate and the silicon wafer.

9. The method of claim 7, wherein the creating step includes the step of chemically etching the parallel channels in the silicon wafer.

10. The method of claim 7, wherein the substrate comprises silicon dioxide.

11. The method of claim 7, wherein the parallel channels are created parallel to (111) planes of the single crystal silicon wafer.