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Apparatus and methods for surface contour measurement

  • US 5,870,191 A
  • Filed: 02/12/1996
  • Issued: 02/09/1999
  • Est. Priority Date: 02/12/1996
  • Status: Expired due to Term
First Claim
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1. A method for determining, on an object having a surface, three-dimensional position information of a point on said surface of said object, said method comprising the steps of:

  • providing two sources of radiation, said sources being coherent with respect to one another;

    illuminating said point with said radiation from each of said sources;

    changing the phase of said radiation from one of said sources relative to the phase of said radiation from the other of said sources as measured at said point on said surface of said object;

    detecting radiation scattered by said point on said surface of said object; and

    calculating position information in response to said change in phase of said radiation from said sources and said detected radiation scattered by said point on said surface of said object.

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