Miniature silicon condenser microphone
First Claim
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1. A solid state condensor microphone comprising:
- a semi-conductor substrate forming a support structure and having an opening;
a thin-film cantilever structure forming a diaphragm responsive to fluid-transmitted acoustic pressure extending over a portion of the opening, the structure having a proximal end and a distal end, wherein the proximal end is attached to the support structure, and the distal end is detached from and extends over a portion of the support structure; and
a variable gap capacitor having a movable plate and a fixed plate, wherein the movable plate is disposed on the distal end of the structure and the fixed plate is disposed on the support structure adjacent the movable plate, wherein said condenser microphone produces an output proportional to the position of the movable plate relative to the fixed plate.
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Abstract
Multiple embodiments of a solid state condenser transducer, and methods of manufacture, are disclosed. The transducer comprises a semi-conductor substrate forming a frame and having an opening, a thin-film cantilever structure forming a diaphragm extending over a portion of the opening, the structure having a proximal portion and a distal portion. The proximal portion is attached to the frame, and the distal portion extends over a portion of the frame. A variable gap capacitor having a movable plate and a fixed plate is provided, wherein the movable plate is disposed on the distal portion of the structure and the fixed plate is disposed on the frame adjacent the movable plate.
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Citations
28 Claims
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1. A solid state condensor microphone comprising:
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a semi-conductor substrate forming a support structure and having an opening; a thin-film cantilever structure forming a diaphragm responsive to fluid-transmitted acoustic pressure extending over a portion of the opening, the structure having a proximal end and a distal end, wherein the proximal end is attached to the support structure, and the distal end is detached from and extends over a portion of the support structure; and a variable gap capacitor having a movable plate and a fixed plate, wherein the movable plate is disposed on the distal end of the structure and the fixed plate is disposed on the support structure adjacent the movable plate, wherein said condenser microphone produces an output proportional to the position of the movable plate relative to the fixed plate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A solid state condenser microphone comprising:
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a silicon substrate forming a support structure and having an opening; a multi-layer thin-film cantilever structure forming a diaphragm responsive to fluid-transmitted acoustic pressure extending over a portion of the opening, the structure having a proximal end and a distal end, wherein the proximal end is attached to the support structure, and the distal end is detached from and extends over a portion of the support structure; and a variable gap capacitor having a movable plate and a fixed plate, wherein the movable plate is disposed on the distal end of the structure and the fixed plate is disposed on the support structure adjacent the movable plate, wherein said condenser microphone produces an output proportional to the position of the movable plate relative to the fixed plate. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20)
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21. A solid state condenser microphone comprising:
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a silicon substrate support structure including a frame defining an opening and a thin-film web attached to said frame and extending across said opening; a thin-film cantilever forming a diaphragm responsive to fluid-transmitted acoustic pressure having a central portion and a peripheral end, wherein the central portion is attached to the web, and the peripheral end is detached from and extends over a portion of the support structure; and a variable gap capacitor having a movable plate and a fixed plate, wherein the movable plate is disposed on the peripheral end of the structure and the fixed plate is disposed on the support structure adjacent the movable plate wherein said condenser microphone produces an output proportional to the position of the movable plate relative to the fixed plate. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28)
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Specification