Method and apparatus for uniformly spin-coating a photoresist material

• US 5,874,128 A
• Filed: 06/30/1997
• Issued: 02/23/1999
• Est. Priority Date: 01/22/1997
• Status: Expired due to Fees

• Current Assignee: Samsung Electronics Co. Ltd.
• Original Assignee: Samsung Electronics Co. Ltd.
• Inventors: Kim, Choung-hyep
• Primary Examiner(s): BELL, JANYCE A
• Application Number:
  US08/885,793
• Time in Patent Office: 603 Days
• Field of Search: 427/240, 427/385.5, 437/231, 118/52, 118/53
• US Class Current: 427/240
• CPC Class Codes: B05C 11/08 Spreading liquid or other fluent material by manipulating the work, e.g. tilting
• CPC Class Codes: G03F 7/162 Coating on a rotating support, e.g. using a whirler or a spinner

Abstract

A method and apparatus for uniformly spin-coating photoresist material on wafers before the wafers are subjected to a photoetching process. The spin-coating apparatus comprises a first rotating device for rotating a rotating connector about a first axis and a second rotating device located on the outer portion of the rotating connector. The second rotating device rotates a wafer about a second axis while the rotating connector rotates around the first axis. The first and second axes are parallel to each other but are spaced apart by a designated distance. The designated distance can be adjusted and a plurality of second rotating devices may be connected to outer portions of the rotating connector.

Claims

1. A spin-coating apparatus for uniformly applying a layer of photoresist material to a wafer, comprising:

a first rotating device for rotating a rotating connector about a first axis; and

a second rotating device, connected to an outer portion of said rotating connector, for rotating the wafer about a second axis while said rotating connector rotates about said first axis, said first and second axes being substantially parallel to each other and spaced apart by a designated distance, which said designated distance is variable.

2. A spin-coating apparatus as recited in claim 1, wherein said first rotating device comprises a first spinner with a rotating axis coincident with said first axis, said first spinner rotating at a predetermined velocity.

3. A spin-coating apparatus as recited in claim 1, wherein the rotating connector comprises a rotating disk.

4. A spin-coating apparatus as recited in claim 1, wherein the rotating connector comprises a rotating beam.

5. A spin-coating apparatus as recited in claim 1, wherein the rotating connector comprises rotating crossed beams.

6. A spin-coating apparatus as recited in claim 1, wherein the rotating connector comprises a rotating ring-shaped member.

7. A spin-coating apparatus as recited in claim 1, wherein said second rotating device comprises:

a second spinner attached to said rotating connector, and with a rotating axis coincident with said second axis and substantially coincident with a central axis of a wafer, said second spinner rotating at a second predetermined velocity; and

a vacuum chuck rotatably connected to said second spinner for holding said wafer by a vacuum suction force.

8. A spin-coating apparatus as recited in claim 7, wherein said vacuum chuck is of a size sufficient to adhere an 8 inch wafer.

9. A spin-coating apparatus as recited in claim 7, wherein said vacuum chuck is of a size sufficient to adhere a 12 inch wafer.

10. A spin-coating apparatus as recited in claim 1, wherein said first rotating device and said second rotating device rotate in the same direction.

11. A spin-coating apparatus as recited in claim 1, wherein said first rotating device and said second rotating device rotate in opposite directions.

12. A spin-coating apparatus as recited in claim 1, further comprising a plurality of second rotating devices, connected to the outer portions of said rotating connector.

13. A spin-coating apparatus as recited in claim 1, further comprising an adjusting member for varying said designated distance.

14. A spin-coating apparatus as recited in claim 13, wherein said adjusting member comprises a screw, wherein one end of said screw is connected to said rotating connector and said screw mechanically communicates with said second rotating device via operation of threads of said screw.

15. A spin-coating apparatus for uniformly applying a layer of photoresist material to a wafer, comprising:

a first rotating spinner for rotating a disk about a first axis at a predetermined velocity;

a second rotating spinner, connected to an outer portion of said disk, for rotating the wafer about a second axis substantially coincident with a center axis of said wafer, said spinner rotating at a second predetermined velocity while said disk rotates about said first axis, said first and second axes being substantially parallel and spaced apart by a designated distance;

a vacuum chuck rotatably connected to said second spinner for holding said wafer by a vacuum suction force; and

an adjusting member for varying said designated distance, said adjusting member comprising a screw wherein one end of said screw is connected to said rotating disk and said screw mechanically communicates with said second spinner via operation of threads of said screw.

16. A spin-coating method for uniformly applying a layer of photoresist material to a wafer, comprising:

rotating a rotating connector about a first axis with a first rotating device at a first predetermined velocity; and

rotating the wafer about a second axis with a second rotating device located at an outer portion of said rotating connector, said second rotating device rotating at a second predetermined velocity while rotating said connector about said first axis, said second axis being substantially coincident with a center axis of said wafer, and said first and second axes being substantially parallel and spaced apart by a designated distance, which said designated distance is variable.

17. A spin-coating method as recited in claim 16, wherein said rotating connector and said wafer rotate in the same direction relative to each other.

18. A spin-coating method as recited in claim 16, wherein said rotating connector and said wafer rotate in opposite directions relative to each other.

19. A spin-coating method as recited in claim 16, further comprising a step of adjusting said designated distance prior to said rotating steps.

20. A spin-coating apparatus for uniformly applying a layer of photoresist material to a wafer, comprising:

a first rotating device for rotating a rotating connector about a first axis; and

a second rotating device, connected to an outer portion of said rotating connector, for rotating the wafer about a second axis while said rotating connector rotates about said first axis,

wherein said first and second axes are substantially parallel to each other and spaced apart by a designated distance,

and wherein said second axis is substantially coincident with a center axis of said wafer, whereby the wafer is substantially parallel to the rotating connector.