Window frame-guided stage mechanism

• US 5,874,820 A
• Filed: 04/04/1995
• Issued: 02/23/1999
• Est. Priority Date: 04/04/1995
• Status: Expired due to Term

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Lee, Martin E.
• Primary Examiner(s): Ro, Bentsu
• Application Number:
  US08/416,558
• Time in Patent Office: 1,421 Days
• Field of Search: 318/575, 318/625, 318/626, 318/648, 318/649, 318/689, 269/71, 269/73, 414/282, 414/331, 414/618, 414/627, 414/743, 414/749, 414/750, 74/471 XY, 74/490.07, 74/490.08
• US Class Current: 318/575
• CPC Class Codes: G03F 7/70358 Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
• CPC Class Codes: G03F 7/70716 Stages
• CPC Class Codes: G03F 7/70825 Mounting of individual elements, e.g. mounts, holders or supports workpiece or mask holders G03F7/707
• CPC Class Codes: G03F 7/70833 Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
• CPC Class Codes: G03F 7/709 Vibration, e.g. vibration detection, compensation, suppression or isolation
• CPC Class Codes: Y10T 74/20201 Control moves in two planes

Abstract

A guided stage mechanism suitable for supporting a reticle in a photolithography machine includes a stage movable in the X-Y directions on a base. Laterally surrounding the stage is a rectangular window frame guide which is driven in the X-axis direction on two fixed guides by means of motor coils on the window frame guide co-operating with magnetic tracks fixed on the base. The stage is driven inside the window frame guide in the Y-axis direction by motor coils located on the stage co-operating with magnetic tracks located on the window frame guide. Forces from the drive motors of both the window frame guide and the stage are transmitted through the center of gravity of the stage, thereby eliminating unwanted moments of inertia. Additionally, reaction forces caused by the drive motors are isolated from the projection lens and the alignment portions of the photolithography machine. This isolation is accomplished by providing a mechanical support for the stage independent of the support for its window frame guide. The window frame guide is a hinged structure capable of a slight yawing (rotational) motion due to hinged flexures which connect the window frame guide members.

Claims

1. A stage mechanism moveable in two dimensions, comprising:

a base defining a principal surface;

a movable stage located on the principal surface of the base;

a frame of four members flexibly connected together and laterally surrounding the stage thereby permitting a yaw movement of the frame in a plane defined by the principal surface of the base, a first and second of the members being opposing and in slidable contact with the stage; and

first and second fixed guides mounted spaced apart and parallel to each other, a third and fourth of the members being opposing and in slidable contact with respectively the first and second fixed guides.

2. The stage mechanism of claim 1, wherein the first and second members are each connected to both the third and fourth members by flexures, thereby allowing movement of each member relative to the other members.

3. The stage mechanism of claim 2, wherein each flexure comprises at least two strips of metal, the two strips each being connected to two of the members, and the two strips overlying one another in an X configuration.

4. The stage mechanism of claim 1, further comprising a plurality of fluid bearings located on an underside of the stage and confronting the base.

5. The stage mechanism of claim 1, further comprising at least two fluid bearings located on each of the third and fourth members and confronting, respectively, surfaces of the first and second fixed guides.

6. The stage mechanism of claim 1, further comprising a first motor element on each of the third and fourth members, thereby driving the frame relative to the first and second fixed guides.

7. The stage mechanism of claim 6, further comprising a second motor element on the base and associated with each of the respectively first and second fixed guides co-operating with one of the first motor elements.

8. The stage mechanism of claim 1, further comprising a first motor element located on opposing sides of the stage confronting respectively the first and second members, thereby driving the stage relative to the first and second members.

9. The stage mechanism of claim 1, further comprising a fluid bearing spring mounted on one of the third and fourth members and confronting a surface of one of the first and second fixed guides, thereby loading the frame against the first and second fixed guides.

10. The stage mechanism of claim 1, further comprising a support base for the first and second fixed guides and the frame members, the support base being supported independently of the base on which the stage is located.

11. The stage mechanism of claim 1, further comprising a fluid bearing gimbal mounted on one of the third and fourth members and confronting a surface of one of the first and second fixed guides, thereby loading the frame against the first and second fixed guides.

12. A method of operating a stage moveable in two perpendicular directions, comprising the steps of:

locating the stage on a base, the stage being adapted for flexing in the two perpendicular directions;

laterally surrounding the stage with a frame in slidable contact with the stage;

driving the frame in a first of the two perpendicular directions relative to the base; and

driving the stage in a second of the two perpendicular directions relative to the frame.

13. The method of claim 12, further comprising supporting the base independently from the frame.

14. A stage mechanism moveable in two dimensions, comprising:

a base defining a principal surface;

a movable stage located on the principal surface of the base;

a frame of four members connected together and laterally surrounding the stage, a first and second of the members being opposing and in slidable contact with the stage, wherein the first and second members are each connected to both the third and fourth members by flexures, thereby allowing movement of each member relative to the other members; and

first and second fixed guides mounted spaced apart and parallel to each other, a third and fourth of the members being opposing and in slidable contact with respectively the first and second fixed guides.

15. A stage mechanism moveable in two dimensions, comprising:

a base defining a principal surface;

a movable stage located on the principal surface of the base;

a frame of four members connected together and laterally surrounding the stage, a first and second of the members being opposing and in slidable contact with the stage;

first and second fixed guides mounted spaced apart and parallel to each other, a third and fourth of the members being opposing and in slidable contact with respectively the first and second fixed guides;

a first linear motor disposed between the third member and the first fixed guide;

a second linear motor disposed between the fourth member and the second fixed guide; and

a differential drive control connected to the first and second linear motors.