Method and apparatus for aligning surfaces in close proximity

• US 5,875,560 A
• Filed: 11/21/1996
• Issued: 03/02/1999
• Est. Priority Date: 11/21/1996
• Status: Expired due to Term

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Lemmons, Robert, Boe, Jeff
• Primary Examiner(s): BENNETT, GEORGE B
• Application Number:
  US08/754,728
• Time in Patent Office: 831 Days
• Field of Search: 33/1 PT, 33/366, 33/533, 33/613, 33/626, 33/645, 33/551, 33/552, 33/553, 33/554, 33/555, 340/686, 340/689, 341/34
• US Class Current: 33/366.11
• CPC Class Codes: H01L 21/681 using optical controlling means

Abstract

Apparatus and method are disclosed for adjusting the alignment of surfaces in close proximity. The apparatus includes at least three travel sensitive switches fixed in a non-linear configuration, each switch having a known actuating distance, and a display connected to the switches to show the status of each switch. In order to align two surfaces in parallel, the switches have essentially the same actuating distance. The switches are placed between the surfaces and the surfaces are moved together until the display shows that one or more switches is actuated. The information provided by the switches guides alignment of the surfaces to achieve essentially simultaneous actuation of all switches having actuating distances which correspond to a desired alignment when the surfaces are moved within the actuating distances of the switches. A second set of at least three travel sensitive switches having a smaller actuating distance than the first set of switches can be used to simplify the alignment process. The apparatus and method are especially useful in aligning parallel surfaces in chemical vapor deposition equipment for making integrated circuits.

Claims

1. An apparatus for aligning surfaces in close proximity, comprising:

at least three travel sensitive switches disposed between the surfaces, each switch having a known actuating distance; and

a display connected to the switches to show the status of each switch.

2. The apparatus of claim 1, wherein the switches are molded within a keypad.

3. The apparatus of claim 2, wherein the keypad holds at least a first set of three switches having a first actuating distance and a second set of three switches having a second actuating distance.

4. The apparatus of claim 3, wherein the switches are aligned in a T formation.

5. The apparatus of claim 1, further comprising:

an actuator connected to one of the surfaces to be aligned to provide pitch and roll adjustments to the surface.

6. The apparatus of claim 3, wherein the switches are aligned in a Y formation.

7. The apparatus of claim 3, wherein the first set of switches and the second set of switches are positioned in corresponding pairs.

8. A process for aligning surfaces in close proximity, the process comprising the steps of:

placing at least three travel sensitive switches between the surfaces, each switch having a known actuating distance and each switch directly monitored by a display showing the status of the switch;

moving the surfaces together until the display shows that one or more switches is actuated; and

adjusting the alignment of the surfaces to achieve essentially simultaneous actuation of all switches having actuating distances which correspond to a desired alignment when the surfaces are moved within the actuating distances of the switches.

9. The process of claim 8, wherein the switches are molded within a keypad.

10. The process of claim 9, wherein the keypad holds at least a first set of three switches having a first actuating distance and a second set of three switches having a second actuating distance.

11. The process of claim 10, wherein the switches are aligned in a T formation.

12. The process of claim 11, wherein the pitch and roll of the surfaces are adjusted separately.

13. The process of claim 12, wherein the first set of switches have an actuating distance of 306 mil and the second set of switches have an actuating distance of 294 mil.

14. A process for aligning a support plate with a vapor distribution plate in a chemical deposition chamber, comprising the steps of:

placing a membrane containing at least six travel sensitive switches on the support plate, the switches including a first set of at least three switches having a first actuating distance and a second set of at least three switches having a second actuating distance, each switch being monitored by a display showing the status of the switch;

adjusting the vertical movement of the support plate so that raising of the support plate actuates one or more of the first switches without actuating any of the second switches; and

adjusting the alignment of the support plate so that raising of the support plate actuates all of the first switches without actuating any of the second switches.

15. The process of claim 14, wherein the switches are aligned in a T formation and a line containing two of the first switches is placed perpendicular to the pitch or roll axis of the support plate.

16. The process of claim 15, wherein the pitch and roll of the support plate are adjusted separately.

17. The process of claim 16, wherein the first set of switches have an actuating distance of 306 mil and the second set of switches have an actuating distance of 294 mil.

18. A method for aligning surfaces in close proximity, comprising:

placing a first set of at least three travel sensitive switches between the surfaces, each switch having a first actuating distance;

monitoring a display showing each switch'"'"'s status;

moving the surfaces in close proximity until the display shows that the first set of switches are substantially simultaneously actuated.

19. The method of claim 18, further comprising:

placing a second set of at least three travel sensitive switches between the surfaces, each switch having a second actuating distance.

20. The method of claim 19, wherein the step of moving the surfaces comprises:

moving the surfaces in close proximity until the display shows that the first set of switches are substantially simultaneously actuated and that none of the second set of switches are actuated.