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Substrate temperature measurement by infrared spectroscopy

  • US 5,876,121 A
  • Filed: 06/30/1997
  • Issued: 03/02/1999
  • Est. Priority Date: 08/05/1994
  • Status: Expired due to Fees
First Claim
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1. A method of determining the temperature of an infrared radiation scattering medium comprising:

  • a) exposing an infrared scattering medium containing a liquid which contains different hydrogen bonding at different temperatures to infrared radiation,b) measuring reflected infrared radiation scattered by the medium, at different wavelengths,c) comparing the reflected radiation with calibrated values of reflected radiation and temperature, andd) evaluating the temperature of the medium from the comparison,wherein the different wavelengths comprise wavelengths for water between 900 and 1300 nm comprising a wavelength for free OH groups and a wavelength for hydrogen-bonded OH groups.

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