Chemically amplified positive resist composition
First Claim
1. A chemically amplified positive resist composition comprising(A) an organic solvent,(B) a base resin in the form of a polymer having recurring units of the following general formula (1), and having a weight-average molecular weight of 3,000 to 300,000, ##STR10## wherein R1 is a hydrogen atom or methyl group, R2 is a group represented by the following general formula (2):
- ##STR11## wherein R4 and R5 are independently a hydrogen atom or a normal or branched alkyl group having 1 to 6 carbon atoms, R6 is a normal, branched or cyclic alkyl group having 1 to 10 carbon atoms, or R4 and R5, R4 and R6, or R5 and R6, taken together, may form a ring wherein R4, R5 and R6 are independently a normal or branched alkylene group having 1 to 6 carbon atoms,R3 is an acid labile group different from R2, andletters x and y are 0 or a positive number, x and y are not equal to 0 at the same time, and z is a positive number, x, y and z satisfy 0≦
x/(x+y+z)≦
0.5, 0≦
y/(x+y+z)≦
0.5, 0.4≦
z/(x+y+z)≦
0.9, and x+y+z=1,(C) a photoacid generator, and(D) a compound having at least two vinyl ether groups in a molecule.
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Abstract
A chemically amplified positive resist composition contains (A) an organic solvent, (B) a base resin in the form of a polyhydroxystyrene having phenolic hydroxyl groups some of which are protected with alkoxyalkyl groups and having a weight-average molecular weight of 3,000-300,000 and a dispersity of 1.0 to 1.5, (C) a photoacid generator, and (D) a vinyl ether group-containing compound. The composition is sensitive to actinic radiation, especially KrF excimer laser beam, has high sensitivity and resolution, and forms a resist pattern having improved plasma etching resistance and heat resistance.
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Citations
29 Claims
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1. A chemically amplified positive resist composition comprising
(A) an organic solvent, (B) a base resin in the form of a polymer having recurring units of the following general formula (1), and having a weight-average molecular weight of 3,000 to 300,000, ##STR10## wherein R1 is a hydrogen atom or methyl group, R2 is a group represented by the following general formula (2): - ##STR11## wherein R4 and R5 are independently a hydrogen atom or a normal or branched alkyl group having 1 to 6 carbon atoms, R6 is a normal, branched or cyclic alkyl group having 1 to 10 carbon atoms, or R4 and R5, R4 and R6, or R5 and R6, taken together, may form a ring wherein R4, R5 and R6 are independently a normal or branched alkylene group having 1 to 6 carbon atoms,
R3 is an acid labile group different from R2, and letters x and y are 0 or a positive number, x and y are not equal to 0 at the same time, and z is a positive number, x, y and z satisfy 0≦
x/(x+y+z)≦
0.5, 0≦
y/(x+y+z)≦
0.5, 0.4≦
z/(x+y+z)≦
0.9, and x+y+z=1,(C) a photoacid generator, and (D) a compound having at least two vinyl ether groups in a molecule. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
- 27. The chemically amplified positive resist composition of claim 2, wherein the compound having at least two vinyl ether groups in a molecule is a vinyl ether compound of one of the following formulae (I) and (II),
- space="preserve" listing-type="equation">A-- --O--(R.sup.14 --O).sub.n --CH═
CH.sub.2 !.sub.m (I)
space="preserve" listing-type="equation">A-- --B--R.sup.14 --O--CH═
CH.sub.2 !.sub.m (II)wherein A is an alkyl, aryl or heterocyclic group having a valence of m, B is --CO--O--, --NHCOO-- or --NHCONH--, R14 is a normal or branched alkylene group having 1 to 10 carbon atoms, letter n is 0 or an integer of 1 to 10, and letter m is an integer of 2 to 6. - space="preserve" listing-type="equation">A-- --O--(R.sup.14 --O).sub.n --CH═
- ##STR11## wherein R4 and R5 are independently a hydrogen atom or a normal or branched alkyl group having 1 to 6 carbon atoms, R6 is a normal, branched or cyclic alkyl group having 1 to 10 carbon atoms, or R4 and R5, R4 and R6, or R5 and R6, taken together, may form a ring wherein R4, R5 and R6 are independently a normal or branched alkylene group having 1 to 6 carbon atoms,
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28. The chemically amplified positive resist composition of claim 1, wherein R3 is tert-butyl, tert-butoxycarbonyl, tert-butoxycarbonylmethyl, 3-oxycyclohexyl or a group of the formula (2), different from R2 when present.
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29. The chemically amplified positive resist composition of claim 2, wherein R3 is tert-butyl, tert-butoxycarbonyl, tert-butoxycarbonylmethyl, 3-oxycyclohexyl or a group of the formula (2), different from R2 when present.
Specification