Glass/Metal package and method for producing the same

• US 5,877,042 A
• Filed: 08/28/1996
• Issued: 03/02/1999
• Est. Priority Date: 08/28/1996
• Status: Expired due to Fees

• Current Assignee: CTS Corporation
• Original Assignee: Motorola, Inc. (Motorola Solutions, Inc.)
• Inventors: Chaudhari, Piyush, Skoda, William G., Mattson, John E., Yamamoto, Joyce K., Miesem, Ross A.
• Primary Examiner(s): Picardat, Kevin M.
• Application Number:
  US08/697,712
• Time in Patent Office: 916 Days
• Field of Search: 438/112, 438/121, 438/122, 438/123, 438/124, 438/125, 438/126, 257/704, 257/676
• US Class Current: 438/123
• CPC Class Codes: H01L 21/4846 Leads on or in insulating or insulated substrates, e.g. metallisation H01L21/4821 takes precedence; metallisation of ceramics in general C04B41/51; printed circuits H05K3/00
• CPC Class Codes: H01L 23/49861 Lead-frames fixed on or encapsulated in insulating substrates H01L23/4985, H01L23/49805 take precedence
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H01L 2924/09701 Low temperature co-fired ceramic [LTCC]

Abstract

A method of producing a glass/metal package where a glass portion of the package is built up around a provided leadframe (10) using applications of solderable and glass pastes (20) which are subsequently fired (30). The glass paste and leadframe are chosen to have similar coefficients of expansion and the leadframe is pretreated to degasify and control oxidation of the metal to promote glass adhesion to the leadframe and prevent microcracking at a glass/metal interface. A seal ring is applied to the glass paste (40) and a lid is attached to the seal ring (50). The package is used to provide an sealed inert internal environment for sensitive electronic components such as a piezoelectric element. The package may be configured for leaded or surface mounting (60).

Claims

1. A method of making a glass/metal package, comprising the steps of:

providing a lid having a cavity and a metal leadframe including an array of cells, the leadframe having top and bottom sides and a plurality of leads;

screen printing a solderable paste and a glass paste onto the leadframe, the solderable paste is applied to a plurality of electrical connection locations on the leadframe, the glass paste is applied to cover a central portion of the leadframe leaving the solderable paste and the leads exposed, the covered portion of the leadframe defining a package base;

firing the package base;

applying a seal ring onto a sealing area of at least one of the package base and the lid;

sealing the lid and the package base, the lid and base defining a sealed package; and

singulating the package from the leadframe.

2. The method of claim 1, wherein after the first step, further comprising the step of pretreating the leadframe to degas the leadframe such that an oxide layer on the leadframe is controlled such that the wettability of the leadframe by the glass paste is maintained.

3. The method of claim 1, wherein the applying step includes applying at least one of the group consisting of a glass frit seal ring, a solder seal ring, an epoxy seal ring, and a preformed metal seal ring.

4. The method of claim 1, wherein the screen printing step comprises:

affixing an adhesive backing to the bottom side of the leadframe;

applying solderable paste to a plurality of electrical connection locations on the leadframe and drying the solderable paste;

filling all gaps in the leadframe with the glass paste and drying the glass paste;

applying glass paste to the top side of the leadframe leaving the solderable paste and the leads exposed and drying the glass paste;

removing the adhesive backing; and

applying glass paste to the bottom side of the leadframe leaving the leads exposed and drying the glass paste.

5. The method of claim 1, wherein the screen printing step includes drying the solderable and glass pastes before the firing step.

6. The method of claim 1, wherein the screen printing step includes screen printing solderable paste on the bottom side of the leadframe, screen printing glass paste on the bottom side of the leadframe leaving the solderable paste exposed, and wherein the singulating step includes excising the leads flush with the package base, thereby defining a surface mount package.

7. The method of claim 1, wherein the singulating step includes the steps of:

excising the leads near a periphery of the leadframe; and

bending and adjusting the leads of the leadframe to a shape such that the package is suitable for mounting.

8. The method of claim 7, wherein the bending and adjusting step includes forming the leads to have a shape selected from at least one of the group consisting of a straight lead, a through-hole lead, a gullwing lead, a butt-joint lead and a J-shaped lead.

9. A method of making a glass/metal package, comprising the steps of:

providing a lid having a cavity and a metal leadframe including an array of cells, the leadframe having top and bottom sides and a plurality of leads;

affixing an adhesive backing to the bottom side of the leadframe;

screen printing a solderable paste to a plurality of electrical connection locations on the leadframe and drying the solderable paste;

filling all gaps in the leadframe with a glass paste and drying the glass paste;

screen printing glass paste to the top side of the leadframe leaving the solderable paste and the leads exposed and drying the glass paste;

removing the adhesive backing;

screen printing glass paste to the bottom side of the leadframe leaving the leads exposed and drying the glass paste, the pastes and leadframe defining a package base;

firing the package base;

applying a glass frit seal ring onto a sealing area of at least one of the package base and the lid;

sealing the lid and the package base, the lid and base defining a sealed package; and

singulating the package from the leadframe.

10. The method of claim 9, wherein after the first step, further comprising the step of pretreating the leadframe in a reducing atmosphere at a temperature over 600°

C. for at least 10 minutes to degas the leadframe such that an oxide layer on the leadframe is controlled.

11. The method of claim 9, wherein the firing step includes an organics burnout stage at about 350±

10°

C. for about 90 minutes, a peak temperature stage of about 600±

5°

C. for about 3 to 18 minutes, an anneal stage at about 535±

10°

C. for about 20 to 30 minutes, and a cooling stage back to room temperature.

12. The method of claim 9, wherein the sealing step includes sealing the lid to the seal ring at a temperature of about 330°

C. for about 10 minutes.

13. The method of claim 9, wherein after the removing adhesive backing step, further comprising a screen printing step including screen printing solderable paste on the bottom side of the leadframe, and wherein the screen printing glass paste on the bottom side of the leadframe step includes leaving the solderable paste exposed, and wherein the singulating step includes excising the leads flush with the package base, thereby defining a surface mount package.

14. The method of claim 9, wherein the singulating step includes the steps of:

excising the leads near a periphery of the leadframe; and

bending and adjusting the leads of the leadframe to a shape selected from at least one of the group consisting of a straight lead, a through-hole lead, a gullwing lead, a butt-joint lead and a J-shaped lead.