Rotating cup coating device

• US 5,879,457 A
• Filed: 01/14/1997
• Issued: 03/09/1999
• Est. Priority Date: 01/16/1996
• Status: Expired due to Term

• Current Assignee: Tokyo OHKA Kogyo Company Limited
• Original Assignee: Tokyo OHKA Kogyo Company Limited
• Inventors: Sahoda, Tsutomu, Miyamoto, Hidenori, Endo, Hiroki, Ueda, Koji
• Primary Examiner(s): Simmons, David A.
• Assistant Examiner(s): PADGETT, CALVIN F
• Application Number:
  US08/783,988
• Time in Patent Office: 784 Days
• Field of Search: 118/52, 118/320, 118/319, 118/500, 118/501, 269/21, 427/240, 427/430.1, 134/153, 156/345
• US Class Current: 118/319
• CPC Class Codes: B05C 11/08 Spreading liquid or other fluent material by manipulating the work, e.g. tilting
• CPC Class Codes: H01L 21/6715 Apparatus for applying a liquid, a resin, an ink or the like H01L21/67126 takes precedence

Abstract

A rotating cup type liquid coating device with structure for suppressing pulsatory movement of the coated liquid when stopping rotation of the inner cup 3, includes a buffer space S formed for connecting an inner space of the inner cup 3 and an inner space of an outer cup 2 surrounding the inner cup, on an outer periphery of the inner cup 3 , through respective throttle portions 16, 17.

Claims

1. A rotating cup coating device, comprising:

an inner cup for being driven to rotate by a spinner and for supporting thereon a substantially planar material to be treated;

an outer cup disposed outside of the inner cup for receiving a drain from said inner cup;

a first lid body for covering an upper surface of said inner cup; and

a second lid body for covering an upper surface of said outer cup, wherein;

a buffer space is defined in an outer periphery of said inner cup for connecting an inner space of said inner cup and an inner space of said outer cup.

2. A rotating cup coating device as claimed in claim 1, wherein said buffer space is connected to the inner space of said inner cup and the inner space of said outer cup through respective throttle portions also defined in the outer periphery of said inner cup.

3. A rotating cup coating device according to claim 2, wherein said buffer space has a larger cross-sectional area than cross-sectional areas of said throttle portions.

4. A rotating cup coating device according to claim 2, wherein said buffer space and said throttle portions define a continuously open communication path which allows a substantially turbulence-free flow of air from the inner space of the outer cup to the inner space of the inner cup after a coating operation.

5. A rotating cup coating device as defined in claim 1, wherein said inner space of said outer cup is defined in a drain collecting passage at a periphery of the outer cup.

6. A rotating cup coating device as claimed in claim 1, wherein said inner space of said inner cup is a space for performing a coating operation on the substantially planar material.

7. A rotating cup coating device as claimed in claim 1, wherein said buffer space is ring shaped and extends around the outer periphery of said inner cup.

8. A rotating cup coating device as claimed in claim 7 wherein said buffer space has a constant cross-sectional area.

9. A rotating cup coating device as claimed in claim 1, wherein the outer periphery of said inner cup and an outer periphery of the first lid body have mating convex-and-concave portions defined therein which operatively engage each other when the first lid body covers the upper surface of the inner cup.

10. A rotating cup coating device as claimed in claim 9, further including a sealing member disposed with one of said convex-and-concave portions for being sealingly engaged therebetween when the first lid body covers the upper surface of said inner cup.

11. A rotating cup coating device as claimed in claim 10, wherein the other of said convex-and-concave portions has a convex part with a tapered surface that engages said sealing member when the first lid body covers the upper surface of said inner cup.

12. A rotating cup coating device according to claim 1, wherein said buffer space defines a continuously open communication path which channels said drain from said inner cup to said inner space of said outer cup during a coating operation of the coating device and which allows a buffered flow of air from the inner space of the outer cup to the inner space of the inner cup after the coating operation.

13. A rotating cup coating device, comprising:

an inner cup for being driven to rotate by a spinner and for supporting thereon a substantially planar material to be treated;

an outer cup disposed outside of the inner cup for receiving a drain from said inner cup;

lid means for selectively covering upper surfaces of said inner cup and said outer cup; and

buffer means defined in an outer peripheral portion of said inner cup for providing a buffered communication path between an inner space of said inner cup and an inner space of said outer cup to reduce pressure differences between the inner spaces of said inner and outer cups.

14. A rotating cup coating device as claimed in claim 13, wherein said buffered communication path includes a buffer space defined within the outer peripheral portion of said inner cup.

15. A rotating cup coating device as claimed in claim 14, wherein said buffered communication path further includes throttle portions defined in the outer peripheral portion of said inner cup for respectively connecting said buffer space with the inner space of said inner cup and the inner space of said outer cup.

16. A rotating cup coating device as claimed in claim 15, wherein said buffer space has a larger cross-sectional area than cross-sectional areas of said throttle portions.

17. A rotating cup coating device as claimed in claim 14, wherein said buffer space is ring shaped and extends around the outer peripheral portion of said inner cup.

18. A rotating cup coating device according to claim 13, wherein said buffered communication path is continuously open so that it functions automatically to reduce the pressure differences between the inner spaces of said inner and outer cups after a coating operation.

19. A rotating cup coating device according to claim 13, wherein said buffered communication path allows a substantially turbulence-free flow of air from said inner space of said outer cup to said inner space of said inner cup after a coating operation.