Anisotropic conductive film for microconnections
First Claim
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1. Process for the production of an anisotropic conductive film, comprising the steps of:
- depositing a layer of a first meltable material on a substrate,depositing a polymer layer on the layer of first meltable material,annealing said polymer layer,forming through holes in the polymer layer,depositing a hard conductive material in the holes wherein the hard conductive material has a melting point that is higher than that of the first meltable material,depositing a second meltable material on the hard material, andheating to a temperature T equal to or above the melting point of the first meltable material, and in this way debonding the anisotropic conductive film comprising the polymer layer which contains the hard conductive material in the holes from the substrate.
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Abstract
This self-supported, anisotropic conductive film has a partly annealed polymer layer (46) containing through holes, nail-shaped conductive elements (51) filling the through holes, having a central portion and ends, and the central portion of the nails is made from a hard material (52) and each end respectively of a first and a second meltable materials (44, 54).
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Citations
15 Claims
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1. Process for the production of an anisotropic conductive film, comprising the steps of:
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depositing a layer of a first meltable material on a substrate, depositing a polymer layer on the layer of first meltable material, annealing said polymer layer, forming through holes in the polymer layer, depositing a hard conductive material in the holes wherein the hard conductive material has a melting point that is higher than that of the first meltable material, depositing a second meltable material on the hard material, and heating to a temperature T equal to or above the melting point of the first meltable material, and in this way debonding the anisotropic conductive film comprising the polymer layer which contains the hard conductive material in the holes from the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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Specification