Semiconductor chemical sensor device and method of forming a thermocouple for a semiconductor chemical sensor device
First Claim
1. A semiconductor chemical sensor device having a sensitive layer for detecting chemicals and a heater for heating the sensitive layer, the heater being formed by a heater portion of a polysilicon conductive layer in the semiconductor chemical sensor device, the semiconductor chemical sensor device further comprising a first thermocouple for detecting the temperature of the sensitive layer, the first thermocouple comprising a P/N junction such that a signal developed across the P/N junction is representative of the temperature of the sensitive layer, the P/N junction formed as one ofa part of the heater portion of the polysilicon conductive layer ora part of the polysilicon conductive layer adjacent the heater portion of the polysilicon conductive layer.
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Accused Products
Abstract
A semiconductor chemical sensor device (2) comprises a sensitive layer (4) for detecting specific chemicals and a heater for heating the sensitive layer, which is formed by a heater portion (6) of a conductive layer (8) in the semiconductor chemical sensor device (2). The semiconductor chemical sensor device (2) further comprises a thermocouple (12) for detecting the temperature of the sensitive layer (4), the thermocouple comprising a P/N junction (14) formed as part of or adjacent the heater portion (6) of the conductive layer (8) such that a signal developed across the P/N junction (14) is representative of the temperature of the sensitive layer (4).
57 Citations
10 Claims
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1. A semiconductor chemical sensor device having a sensitive layer for detecting chemicals and a heater for heating the sensitive layer, the heater being formed by a heater portion of a polysilicon conductive layer in the semiconductor chemical sensor device, the semiconductor chemical sensor device further comprising a first thermocouple for detecting the temperature of the sensitive layer, the first thermocouple comprising a P/N junction such that a signal developed across the P/N junction is representative of the temperature of the sensitive layer, the P/N junction formed as one of
a part of the heater portion of the polysilicon conductive layer or a part of the polysilicon conductive layer adjacent the heater portion of the polysilicon conductive layer.
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10. A semiconductor chemical sensor device having a sensitive layer for detecting chemicals and a heater for heating the sensitive layer, the heater being formed by a heater portion of a polysilicon conductive layer in the semiconductor chemical sensor device, the semiconductor chemical sensor device further comprising:
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a first thermocouple for detecting the temperature of the sensitive layer, the first thermocouple comprising a P/N junction formed as part of or adjacent the heater portion of the polysilicon conductive layer such that a signal developed across the P/N junction is representative of the temperature of the sensitive layer; and a second thermocouple for detecting the temperature of a region of the semiconductor chemical sensor device remote from the heater, the second thermocouple comprising a P/N junction formed in a conductive layer such that a signal developed across the P/N junction is representative of the temperature of the region of the semiconductor chemical sensor device.
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Specification