Inertial sensors
First Claim
Patent Images
1. An inertial sensor assembly comprising:
- first and second planar members; and
first and second inertial sensors formed from said planar members, said planar members having surface formations along edges of said members formed from material of said members, wherein said surface formations on different ones of said planar members engage one another, and wherein said surface formations mechanically support and retain said planar members in an angular relationship with one another.
1 Assignment
0 Petitions
Accused Products
Abstract
An inertial sensor assembly has three silicon chips that are each machined to form a respective vibrating inertial sensor, an acceleration sensor and engaging edge formations. The three chips are assembled in an orthogonal arrangement by engaging the edge formations with one another.
21 Citations
14 Claims
-
1. An inertial sensor assembly comprising:
- first and second planar members; and
first and second inertial sensors formed from said planar members, said planar members having surface formations along edges of said members formed from material of said members, wherein said surface formations on different ones of said planar members engage one another, and wherein said surface formations mechanically support and retain said planar members in an angular relationship with one another. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
- first and second planar members; and
-
11. An inertial sensor assembly comprising:
- three planar members;
three solid state vibrating inertial sensors machined from respective ones of said planar members, said planar members having surface formations along edges of said members formed from material of said members, wherein said surface formations on different ones of said planar members engage one another, and wherein said surface formations mechanically support and retain said planar members in an orthogonal relationship with one another. - View Dependent Claims (12)
- three planar members;
-
13. A method of manufacture of an inertial sensor assembly comprising the steps of:
-
providing first and second planar members; forming a first inertial sensor from a portion of the material of said first planar member; forming a second inertial sensor from a portion of the material of said second planar member; forming surface formations in said planar members from the material of said members; and positioning said first and second inertial sensors in a desired relation to one another by engaging surface formations of said first planar member with surface formations of said second planar member such that said planar members are supported and retained in an angular relationship with one another by said engaging surface formations. - View Dependent Claims (14)
-
Specification