Method and apparatus for three-dimensional imaging using laser illumination interferometry

• US 5,880,841 A
• Filed: 09/08/1997
• Issued: 03/09/1999
• Est. Priority Date: 09/08/1997
• Status: Expired due to Term

• Current Assignee: Coherix Incorporated
• Original Assignee: ERIM International, Inc. (Altarum Institute)
• Inventors: Gleichman, Kurt W., Marron, Joseph C.
• Primary Examiner(s): KIM, ROBERT H
• Application Number:
  US08/925,377
• Time in Patent Office: 547 Days
• Field of Search: 356/359, 356/360, 356/358
• US Class Current: 356/512
• CPC Class Codes: G01B 11/22 for measuring depth
• CPC Class Codes: G03H 1/0866 Digital holographic imaging, i.e. synthesizing holobjects from holograms
• CPC Class Codes: G03H 2001/0038 analogue or digital holobjects holographic interferometry G01B9/021; investigating particles G01N15/0227
• CPC Class Codes: G03H 2210/30 3D object
• CPC Class Codes: G03H 2222/13 Multi-wavelengths wave with discontinuous wavelength ranges G03H2222/18 takes precedence

Abstract

A method for determining a range dimension of an object utilizing multiple wavelength interferometry to form an image of the object includes developing a discernible two-dimensional image from an interference pattern at selected points for each of a number of wavelengths, collecting complex values from the interference pattern and developing a phase value from the complex value, and determining a phase correction vector based on a difference between measured phase values and an ideal phase value associated with one or more reference points. The phase correction vector is used to correct each of the selected points. A one-dimensional Fourier transform is performed on the corrected values to yield a range profile for each selected point. A peak value is then determined from the range profile to determine the range dimension. The peak value may be determined based on a simple maximum, oversampling in selected areas prior to performing the Fourier transform, or using curve-fitting techniques. The phase correction vector minimizes phase errors due to various causes such as insufficient knowledge of the laser frequencies, or which occur when optical path lengths of the object and reference beams are not matched, to provide a computationally efficient method of improving accuracy in the range dimension.

Claims

1. A method for determining a range dimension of an object based on an image of the object formed utilizing multiple wavelength interferometry, the method comprising:

developing a two-dimensional representation of the image of the object from an interference pattern for each of a plurality of wavelengths at each of a plurality of selected points on the object;

collecting a complex value from the two-dimensional representation for each of the plurality of wavelengths at each of the plurality of selected points on the object and developing a phase value from the complex value;

selecting at least one reference point on the object;

determining a difference between the phase values of the reference point and an associated ideal phase value for each of the wavelengths;

establishing a phase correction vector from the difference;

establishing a corrected value for each of the selected points by adding the phase correction vector to the complex value for each of the selected points;

Fourier transforming the corrected values for each of the selected points to yield a range profile for each selected point; and

determining a peak value for each range profile to determine the range dimension of the object at each selected point.

2. The method of claim 1 wherein the peak value is determined by:

locating a likely peak on the range profile;

oversampling the Fourier transform in an area proximate the likely peak; and

selecting a peak from the range profile of the oversampled area to determine the peak value.

3. The method of claim 1 wherein the peak value is determined by:

locating a likely peak on the range profile; and

curve-fitting data points near the likely peak; and

determining the peak value from the fitted curve.

4. The method of claim 1 further including constructing a three-dimensional image of the object at the selected points based upon the peak values.

5. The method of claim 1 wherein the phase correction vector is the complex conjugate of a difference between the phase values of each reference point and its associated ideal phase value for each of the wavelengths at that reference point.

6. The method of claim 1 wherein selecting at least one reference point comprises:

defining a neighborhood of points surrounding and including the reference point;

comparing data from selected wavelengths for each point in the neighborhood to determine an ideal point having superior phase information data; and

selecting the ideal point as the reference point.

7. The method of claim 6 wherein the neighborhood comprises nine pixels.

8. The method of claim 7 wherein the points associated with each reference point form a subset of the selected points.

9. The method of claim 8 wherein the subsets associated with each reference point do not contain common points.

10. A method for determining a range dimension of an object utilizing multiple wavelength interferometry to form an image of the object, the method comprising:

(a) developing a discernible two-dimensional image from an interference pattern for each of a plurality of wavelengths by utilizing a lens to perform a two-dimensional transform of the interference pattern while directing the pattern on a two-dimensional detector array which is positioned in an image plane of the lens;

(b) collecting a complex value from the interference pattern directed by the lens onto the detector array for each of the plurality of wavelengths at each of a plurality of selected points on the object and developing a phase value from the complex value;

(c) selecting at least one reference point on the object;

(d) determining a difference between the phase values of each reference point and an associated ideal phase value for each of the wavelengths at that reference point;

(e) establishing a phase correction vector from the difference determined in (d), wherein the phase correction vector is a complex conjugate of the difference between the phase values of each reference point and its associated ideal phase value for each of the wavelengths at that reference point;

(f) establishing a corrected value for each of the selected points by adding the phase correction vector to the complex values of each of the selected points;

(g) performing a Fourier transform on a series of the corrected values for each of the selected points to yield a range profile for each selected point;

(h) determining a peak value from each of the range profiles to determine the range dimension; and

(i) constructing a three-dimensional image of the object at the selected points based upon the peak values.